• Title/Summary/Keyword: Substrate rotation

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Analysis of Polarization Characteristics of Reflection Type Photopolymer for Stabilization (반사형 광 폴리머의 효율 안정을 위한 편광특성 분석)

  • Kim, Eun-Seok;Kim, Nam
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.7
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    • pp.36-42
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    • 2000
  • Some polarization characteristics of reflection type photopolymer are investigated. Photopolymer on a Mylar substrate alters an incoming linearly polarized laser beam to an elliptical polarization. Due to the rotation of the polarization, the recording gratings show different diffraction efficiencies. The rotation angle is of order of 10-50% for the tested samples. It is found that the polymer layer does not changes the polarization direction but the Mylar substrate alone distorts the incoming polarization to a comparable degree. As align the polarization states of photopolymers to be parallel with a laser using a He-Ne laser(633nm), which is not sensitive to that material, it was possible to make high diffraction efficiency gratings.

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Shadow Modeling using Z-map Algorithm for Process Simulation of OLED Evaporation

  • Lee, Eung-Ki
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.487-490
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    • 2004
  • In order to simulate OLED evaporation process, modeling of directional distribution of the vaporized organic materials, film thickness distribution profile and pattern-mask shadow effect are required In accordance with many literatures; all of them except shadow effect modeling are studied and developed. In this paper, modeling algorithm of evaporation shadow is presented for process simulation of full-color OLED evaporating system. In OLED evaporating process the offset position of the point cell-source against the substrate rotation axis and the usage of the patterned mask are the principal causes for evaporation shadow. For geometric simulation of shadow using z-map, the film thickness profile, which is condensed on a glass substrate, is converted to the z-map data. In practical evaporation process, the glass substrate is rotated. This physical fact is solved and modeled mathematically for z-map simulation. After simulating the evaporation process, the z-map data can present the shadow-effected film thickness profile. Z-map is an efficient method in that the cross-sectional presentations of the film thickness profile and thickness distribution evaluation are easily and rapidly achieved.

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Orientational deformation of ferroelectric liquid crystal molecules by bending performance of plastic substrate

  • Son, Ock-Soo;Lee, Ji-Hoon;Jang, Chi-Woong;Lim, Tong-Kun
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.338-341
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    • 2005
  • We have examined the aspects of the orientational ordering deformation of ferroelectric liquid crystal during bending performance of plastic substrate by analyzing the polarizing optical microscope texture and the birefringence of the cell. Striped texture becomes more prominent as the radius of curvature of substrate gets smaller. The optic axis of the adjacent stripes domain was not same and the relative angle between them becomes larger as the radius of curvature gets smaller. Especially, the optic axis rotation angle of one domain was lager than the other and the liquid crystal molecules in each domain became more coherent. In addition, the birefringence data with obliquely incident light shows the polar direction shift of liquid crystal molecule by bending performance.

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The Evaluation of STS304 Coating Layer on S45C Substrate by friction Surfacing Process. (S45C 모계에 대한 STS304 마찰 육성층 평가)

  • Noh, Joong-Suk;Cho, Houn-Jin;Kim, Heung-Ju;Chun, Chang-Gun;Chang, Woong-Seong
    • Proceedings of the KWS Conference
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    • 2005.06a
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    • pp.229-231
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    • 2005
  • Friction surfacing of STS304 consumable rod on S45C substrate was investigated by microstructural observation and mechanical tests. STS304 layer formed a strongly-bonded thick layer under a wide range of surfacing conditions. The hardness distribution showed the peak value in the boundry layer, while the highest coating efficiency obtained in the condition of 1000rpm-2.5mm/sec-2.5mm/sec. As the consumable rotation rate and the traveling rate increased, the coating efficiency tended to decrease. On the other hand, as the feeding rate increased, the coating efficiency appeared to be increased.

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Deposition conditions of $YBa_{2}$$Cu_{3}$$O_{7-x}$ deposited by a MOCVD method for coated conductors (MOCVD 법에 의해 증착 된 coated conductor용 $YBa_{2}$$Cu_{3}$$O_{7-x}$의 증착조건)

  • 선종원;전병혁;김찬중
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2003.10a
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    • pp.83-86
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    • 2003
  • YBa$_2$Cu$_3$$O_{7-x}$ thin films for coated conductor application were deposited on a MgO single crystalline substrate by a metal organic chemical vapor deposition (MOCVD) system of a vertical type using a single liquid source. The film uniformity was enhanced by controlling the gas shower head structure, the distance between the shower head and substrate, and the rotation of the substrate. The source mole ratio of Y(thd)$_3$: Ba(thd)$_2$: Cu(thd)$_2$ was changed for obtaining stoichiometric film. The phase formation, crystal orientation, surface morphology and film composition were investigated with different source mole ratios, and the critical temperature (T$_{c}$) was measured.red.

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LASER ABLATION OF Bi-SUBSTITUTED GADOLINIUM IRON GARNET FILMS WITH LARGE FARADAY ROTATION

  • Watanabe, N.;Tsushima, K.
    • Journal of the Korean Magnetics Society
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    • v.5 no.5
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    • pp.720-725
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    • 1995
  • Bi-substituted gadolinium iron garnet films were deposited on GGG(111) and NGG (111) substrates by irradiating KrF excimer laser onto targets having compositions of $Bi_{x}Gd_{3-x}Fe_{5}O_{12}$ ($2.0{\leq}x{\leq}3.0$) under substrate temperature of $580~620^{\circ}C$. Analysis on structure, composition and angle of Faraday rotation, ${\theta}_{F}$, were carried out. The composition, the structure and the magneto-optical properties of the obtained films were found to be strongly dependent both on the compositions of the targets and on the pressure of oxygen. Before annealing in air, all films showed ${\theta}_{F}{\geq}0$ at ${\lambda}=6328{\AA}$, while several films showed ${\theta}_{F}{\leq}0$ after the annealing. The highest value of Bi-substitution up to x = 1.76 with uniform composition was obtained.

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Oxide perovskite crystals type ABCO4:application and growth

  • Pajaczkowska, A.
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1996.06a
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    • pp.258-292
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    • 1996
  • In the last year great interest appears to YBCO thin films preparation on different substrate materials. Preparation of epitaxial film is a very difficult problem. There are many requirements to substrate materials that must be fullfilled. Main problems are lattice mismatch (misfit) and similarity of structure. From paper [1] or follows that difference in interatomic distances and angles of substrate and film is mire important problem than similarity of structure. In this work we present interatomic distances and angle relations between substrate materials belonging to ABCO4 group (where A-Sr or Ca, B-rare earth element, C-Al or Ga) of different orientations and YBCO thin films. There are many materials used as substrates for HTsC thin films. ABCO4 group of compounds is characterized by small dielectric constants (it is necessary for microwave applications of HTsC films), absence of twins and small misfit [2]. There most interesting compounds CaNdAlO4, SrLaAlO4 and SrLaGaO4 were investigated. All these compounds are of pseudo-perovskite structure with space group 14/mmm. This structure is very similar to structure of YBCO. SLG substrate has the lowest misfit (0.3%) and dielectric constant. For preparation of then films of substrates of this group of compound plane of <100> orientation are mainly used. Good quality films of <001> orientations are obtained [3]. In this case not only a-a misfit play role, but c-3b misfit is very important too. Sometimes, for preparation of thin films substrates of <001> and <110> orientations were manufactured [3]. Different misfits for different YBCO faces have been analyzed. It has been found that the mismatching factor for (100) face is very similar to that for (001) face so there is possibility of preparation of thin films on both orientations. SrLaAlO4(SLA) and SrLaGaO4(SLG) crystals of general formula ABCO4 have been grown by the Czochralski method. The quality of SLA and SLG crystals strongly depends on axial gradient of temperature and growth and rotation rates. High quality crystals were obtained at axial gradient of temperature near crystal-melt interface lower than 50℃/cm, growth rate 1-3 mm/h and the rotation rate changing from 10-20pm[4]. Strong anisotropy in morphology of SLA and SLG single crystals grown by the Czochralski method is clearly visible. On the basics of our considerations for ABCO4 type of the tetragonal crystals there can appear {001}, {101}, and {110} faces for ionic type model [5]. Morphology of these crystals depend on ionic-covalent character of bonding and crystal growth parameters. Point defects are observed in crystals and they are reflected in color changes (colorless, yellow, green). Point defects are detected in directions perpendicular to oxide planes and are connected with instability of oxygen position in lattice. To investigate facets formations crystals were doped with Cr3+, Er3+, Pr3+, Ba2+. Chromium greater size ion which is substituted for Al3+ clearly induces faceting. There appear easy {110} faces and SLA crystals crack even then the amount of Cr is below 0.3at.% SLG single crystals are not so sensitive to the content of chromium ions. It was also found that if {110} face appears at the beginning of growth process the crystal changes its color on the plane {110} but it happens only on the shoulder part. The projection of {110} face has a great amount of oxygen positions which can be easy defected. Pure and doped SLA and SLG crystals measured by EPR in the<110> direction show more intensive lines than in other directions which allows to suggest that the amount of oxygen defects on the {110} plane is higher. In order to find the origin of colors and their relation with the crystal stability, a set of SLA and SLG crystals were investigated using optical spectroscopy. The colored samples exhibit an absorption band stretching from the UV absorption edge of the crystal, from about 240 nm to about 550 m. In the case of colorless sample, the absorption spectrum consists of a relatively weak band in the UV region. The spectral position and intensities of absorption bands of SLA are typical for imperfection similar to color centers which may be created in most of oxide crystals by UV and X-radiation. It is pointed out that crystal growth process of polycomponent oxide crystals by Czochralski method depends on the preparation of melt and its stoichiometry, orientation of seed, gradient of temperature at crystal-melt interface, parameters of growth (rotation and pulling rate) and control of red-ox atmosphere during seeding and growth (rotation and pulling rate) and control of red-ox atmosphere during seeding and growth. Growth parameters have an influence on the morphology of crystal-melt interface, type and concentration of defects.

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The Research via Linear of Tantalum Thin Film Thickness Depending on Revolution Velocity of Spin Coater (스핀코터 회전속도에 따른 탄탈륨 박막두께의 선형모델에 관한 연구)

  • Kim, Seung Wook
    • Journal of the Semiconductor & Display Technology
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    • v.19 no.1
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    • pp.17-22
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    • 2020
  • Recently, the decrease in thin film thickness has been actively studied by changing several physical elements such as the increase in revolution velocity of lower substrate equipped with AC or DC motor. In this paper, we propose a novel spin coater control system that changes AC or DC motor and common use software with limitation of velocity and position control into step motor and LABVIEW software based on GUI to control revolution velocity and position more precisely. By determining six input values of rotation velocity 1, 5, 10, 25, 50, 100 PPS, we fabricated six samples using coating target, TA(tantalum) on silicon substrate and measured their thin film thickness by SEM. Hence, this research can be applied to inferring thin film thickness of tantalum regarding any value of revolution velocity without additional experiments and for linear reference model via property analysis of thin film thickness using other thin-film materials.

Bending effect of flexible liquid crystal display

  • Lin, Yan-Rung;Jeng, Shie-Chang;Kuo, Chia-Wei;Liao, Chi-Chang;Chen, Cheng-Chung;Shy, Joe-Tsong
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.710-712
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    • 2007
  • The effects of stress on the IZO/PC substrate and the electro-optical properties of a flexible LCD with microstructure in bending were investigated. It showed that the IZO/PC substrate and the periodic cross spacers are good enough to be employed in the application of the ECB or polarization rotation LC mode.

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Effects of Flow on the Chemical Vapor Deposition of Si in System SiH$_4$-H$_2$ (SiH$_4$-H$_2$계에서 유체유동이 Si의 화학증착에 미치는 영향)

  • 조성욱;이경우;조영환;윤종규
    • Journal of Surface Science and Engineering
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    • v.23 no.3
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    • pp.160-166
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    • 1990
  • The effects of the variation of proedd varibles on the flow patterns and effects of the flow patterns on the deposition rate and uniformity in the Si-epitaxy CVD with SiH4 as the source of Si were studied through the calculation by use of control volume method. The reslts showed that the natural convection was undesirable to the uniformity of deposition rate, whose effects were decreased with the dercrese with the decrese of the pressure in the reactoor and with the increase of the flow rate. However. the excessive increase of flow rate caused the movement of the unreacted gas to the substrate. Therefore it resulted in the non-uniform depositions. The rotation of substrate was apperared to improve the uniformity. The resulte of this study could used in CVD process to design the reator and to find the optimum conditions of the process variables.

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