• Clean Technology
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• v.29 no.4
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• pp.255-261
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• 2023

Power semiconductors are semiconductors used for power conversion, transformation, distribution, and control. Recently, the global demand for high-voltage power semiconductors is increasing across various industrial fields, and optimization research on high-voltage IGBT components is urgently needed in these industries. For high-voltage IGBT development, setting the resistance value of the wafer and optimizing key unit processes are major variables in the electrical characteristics of the finished chip. Furthermore, the securing process and optimization of the technology to support high breakdown voltage is also important. Etching is a process of transferring the pattern of the mask circuit in the photolithography process to the wafer and removing unnecessary parts at the bottom of the photoresist film. Ion implantation is a process of injecting impurities along with thermal diffusion technology into the wafer substrate during the semiconductor manufacturing process. This process helps achieve a certain conductivity. In this study, dry etching and wet etching were controlled during field ring etching, which is an important process for forming a ring structure that supports the 3.3 kV breakdown voltage of IGBT, in order to analyze four conditions and form a stable body junction depth to secure the breakdown voltage. The field ring ion implantation process was optimized based on the TEG design by dividing it into four conditions. The wet etching 1-step method was advantageous in terms of process and work efficiency, and the ring pattern ion implantation conditions showed a doping concentration of 9.0E13 and an energy of 120 keV. The p-ion implantation conditions were optimized at a doping concentration of 6.5E13 and an energy of 80 keV, and the p+ ion implantation conditions were optimized at a doping concentration of 3.0E15 and an energy of 160 keV.

• Journal of Korean Society of Disaster and Security
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• v.16 no.4
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• pp.45-59
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• 2023

The global focus on mitigating climate change has traditionally centered on carbon dioxide, but recent attention has shifted towards methane as a crucial factor in climate change adaptation. Natural settings, particularly aquatic environments such as wetlands, reservoirs, and lakes, play a significant role as sources of greenhouse gases. The accumulation of organic contaminants on the lake and reservoir beds can lead to the microbial decomposition of sedimentary material, generating greenhouse gases, notably methane, under anaerobic conditions. The escalation of methane emissions in freshwater is attributed to the growing impact of non-point sources, alterations in water bodies for diverse purposes, and the introduction of structures such as river crossings that disrupt natural flow patterns. Furthermore, the effects of climate change, including rising water temperatures and ensuing hydrological and water quality challenges, contribute to an acceleration in methane emissions into the atmosphere. Methane emissions occur through various pathways, with ebullition fluxes-where methane bubbles are formed and released from bed sediments-recognized as a major mechanism. This study employs Biochemical Methane Potential (BMP) tests to analyze and quantify the factors influencing methane gas emissions. Methane production rates are measured under diverse conditions, including temperature, substrate type (glucose), shear velocity, and sediment properties. Additionally, numerical simulations are conducted to analyze the relationship between fluid shear stress on the sand bed and methane ebullition rates. The findings reveal that biochemical factors significantly influence methane production, whereas shear velocity primarily affects methane ebullition. Sediment properties are identified as influential factors impacting both methane production and ebullition. Overall, this study establishes empirical relationships between bubble dynamics, the Weber number, and methane emissions, presenting a formula to estimate methane ebullition flux. Future research, incorporating specific conditions such as water depth, effective shear stress beneath the sediment's tensile strength, and organic matter, is expected to contribute to the development of biogeochemical and hydro-environmental impact assessment methods suitable for in-situ applications.