• 제목/요약/키워드: Substrate Depth

검색결과 351건 처리시간 0.023초

Cu와 Si간의 확산방지막으로서의 Ti-Si-N에 관한 연구 (Thermal Stability of Ti-Si-N as a Diffusion Barrier)

  • 오준환;이종무
    • 한국재료학회지
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    • 제11권3호
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    • pp.215-220
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    • 2001
  • 본 실험에서는 반응성 스퍼터링법으로 $N_2$/Ar 유속비를 달리하여 약 200 과 650 두께의 비정질 Ti-Si-N막을 증착한 후 Cu (750 )와 Si사이의 barrier 특성을 면저항측정, XRD, SEM, RBS 그리고 Ti-Si-N막에서 질소 함량의 영향에 초점을 둔 ABS depth profiling 등의 분석방법을 통해 조사되었다. 질소 함량이 증가함에 따라 처음에는 불량 온도가 46%까지 증가하다가 그 이상에서는 감소하는 경향을 보였다. 650 의 Ti-Si-N barrier막을 80$0^{\circ}C$에서 열처리 후에는 Cu$_3$Si 피크만 관찰될 뿐 Cu피크는 거의 완전히 사라졌으므로 Barrier 불량기구는 Cu$_3$Si상을 형성하기 위해 Si 기판내로의 Cu의 확산에 의해 일어난 것으로 보인다. 본 실험에서 Ti-Si-N의 최적 조성은 $Ti_{29}$Si$_{25}$N$_{46}$이었다. 200 과 650 두께의 $Ti_{29}$Si$_{25}$N$_{46}$ barrier 층의 불량온도는 각각 $650^{\circ}C$$700^{\circ}C$이었다.이었다.

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자갈하천에서 서식처 교란이 어류 군집구조에 미치는 영향 (Effects of Habitat Disturbance on Fish Community Structure in a Gravel-Bed Stream, Korea)

  • 김석현;이완옥;조강현
    • Ecology and Resilient Infrastructure
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    • 제1권2호
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    • pp.49-60
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    • 2014
  • 본 연구는 전형적인 자갈하천인 가평천에서 하천 환경과 서식처 교란이 어류 군집구조에 미치는 영향을 파악하기 위하여, 13개 조사지점에서 미국 환경청의 간편 생물평가법을 적용하여 하천환경을 평가하고 어류 군집구조를 조사하였다. 하천환경 평가 자료를 이용하여 주요인분석을 실시한 결과, 하상 경사와 관계가 있는 하상 서식환경, 유속/수심 체제, 유사 퇴적이 주요한 평가항목으로 판별되었다. 가평천에서 출현한 어종은 12과 46종이었고, 우점종이 참갈겨니 (Zacco koreanus), 아우점종이 피라미 (Z. platypus)이었다. 종별 개체수 자료를 사용하여 계층적 군집분석의 결과, 조사지는 상류, 중류 및 하류의 세 개의 집단으로 구분되었다. 비모수다차원척도법 결과에 의하면, 어류는 하천환경 평가 항목 중 하상 서식환경, 하상 매몰, 유속/수심 체제, 유사 퇴적, 하도 개수, 여울 빈도 항목과 유의한 상관관계가 있었다. 따라서 자갈하천인 가평천에서 어류 군집구조는 일차적으로 하상의 종적 환경 변화에 의하여 영향을 받고, 인위적 교란에 의하여 군집구조에 변화가 나타났다.

PIT telemetry를 이용한 얼록동사리의 서식지 선택 연구 (Study on Habitat Selection of Odontobutis interrupta using PIT Telemetry)

  • 김준완;김규진;최범명;윤주덕;장민호
    • 생태와환경
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    • 제55권4호
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    • pp.294-304
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    • 2022
  • 본 연구는 고유종인 얼록동사리(Odontobutis interrupta) 의 이동 패턴과 서식지 특성을 파악하기 위해 PIT telemetry를 이용하여 금강 수계의 지류 하천인 용수천의 상류 지점(충남 공주시 반포면 공암리 공암교, St. 1)과 용수천 중류 지점 (세종특별자치시 금남면 두만리 백룡교. St. 2)에서 2021년 3월부터 10월까지 수행되었다. 어류 채집은 족대(망목: 5×5 mm)와 통발(5×5 mm)을 이용하였고, PIT tag 삽입은 현장에서 즉시 수행하였다. 총 21회 모니터링에서 70개체가 115회 감지되었으며, 분석결과 얼록 동사리의 평균 총이동거리는 36.5 (±6.6) m로 확인되었으며, 전장에 따른 얼록동사리의 이동거리는 크기가 큰 개체일수록 더 멀리 이동하는 것으로 나타났다 P≤0.05). 얼록동사리가 감지된 지점의 평균 수심은 36.2 (±1.9) cm, 평균유속은 0.03 (±0.07) m s-1 , 평균 수변부로부터의 거리는 4.4 (±0.3) m로 나타났다. 또한, 감지된 돌 면적에 대해 방류 후 최초선택하는 돌의 면적과 이후에 선택하는 돌의 면적을 비교한 결과 통계적으로 차이가 없는 것으로 나타났으나(P>0.05) 방류 후 24시간 이전 감지를 제외한 나머지 감지에 대한 전장과 돌의 면적을 비교한 결과 통계적으로 유의한 차이가 나타났다(P<0.01). 따라서, 서식지 복원을 위해서는 개체크기별 다양한 서식조건(수심, 유속, 돌 등)을 제공하여 개체별 다양한 하상 구조를 조성하는 것이 필요할 것으로 판단된다.

연엽산 산지계류에 있어서 저서성 대형무척추동물의 서식특성 (Habitat Characteristics of Benthic Macroinvertebrates at a Headwater Stream in the Yeonyeopsan (Mt.))

  • 장수진;남수연;김석우;구효빈;김지현;이윤태;전근우
    • 한국환경생태학회지
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    • 제34권4호
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    • pp.334-344
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    • 2020
  • 연엽산 산지계류의 저서성 대형무척추동물은 총 24과 44종 658개체가 확인되었으며, 참납작하루살이(Ecdyonurus dracon Kluge)가 13%로 우점하였다. 서식습성군으로는 붙는 무리(56%), 굴파는 무리(19%), 헤엄치는 무리(14%) 및 기는 무리(56%)의 총 4군집이 확인되었고, 1개소(UP1)를 제외한 모든 조사지점에서 붙는 무리가 우점한 것으로 나타났다. 그리고 서식특성은 서식처의 유속, 수심, 계상재료 등 수리학적 요인과 용존산소, 수온 등 수질 요인에 따라 달라지며, 유수가 정체하는 소(pool)보다는 유속이 빠른 여울(riffle, step-riffle)에서 그 차이가 나타났다. 즉, 여울에서는 수심과 관계없이 계상의 유속이 빠르고 계상재료의 중앙입경과 최대입경이 클수록 서식처에서 붙는 무리가, 유속이 느리고 계상재료의 중앙입경과 최대입경이 작은 서식처에서 굴파는 무리와 기는 무리가 우점하였다. 또한, 용존산소와 유속은 정의 상관관계(y = 0.6666x - 0.659, R2 = 0.0851)에 있으며, 굴파는 무리가 기는 무리와 붙는 무리보다 더 넓은 범위에 서식하는 것으로 나타났다. 수심이 얕을수록 일사량에 대한 수온의 민감도가 크기 때문에 수심과 수온은 부의 상관관계(y = -26.397x + 283.87, R2 = 0.1802)를 보였으며, pH와 수온은 정의 상관관계가 나타났다. 한편, pH와 용존산소의 관계를 상·하류로 구분하여 서식특성을 파악한 결과, 군집과 상관없이 울페도가 68%로 높았던 상류에서는 높은 용존산소값과 낮은 pH를, 울페도가 51%로 상대적으로 낮았던 하류에서는 낮은 용존산소값과 높은 pH가 나타나, 계안림에 의한 부착조류의 증식과 수온상승을 억제하는 역할을 한 것으로 판단된다. 이 연구는 산지계류에 있어서 저서성 대형무척추동물의 서식특성을 파악함으로써, 산지계류가 청정지역으로 인식되어 연구 대상으로서의 관심도가 낮았던 부분의 자료를 보완하였다. 따라서 향후 산지계류의 보호 및 관리 측면에서의 연구 방안 마련과 학술적인 가치를 높이기 위한 기초자료로 활용될 것으로 기대된다.

한국잔디식재 옥상녹화의 온도저감 및 증발산량 평가 (Assessment of Temperature Reduction and Evapotranspiration of Green Roof Planted with Zoysia japonica)

  • 김세창;이현정;박봉주
    • 한국환경과학회지
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    • 제22권11호
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    • pp.1443-1449
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    • 2013
  • This was an experimental study to evaluate temperature reduction and evapotranspiration of extensive green roof. Three test cells with a dimension of $1.2(W){\times}1.2(D){\times}1.0(H)$ meters were built using 4-inch concrete blocks. Ten-centimeter concrete slab was installed on top of each cell. The first cell was control cell with no green roof installed. The second and third cells were covered with medium-leaf type Zoysiagrass (Zoysia japonica) above a layer of soil. Soil thickness on the second cell was 10cm and that on the third cell was 20cm. Air temperature, relative humidity and solar irradiance were measured using AWS (automatic weather system). Temperature on top surface and ceiling of the control cell and temperature on top surface, below soil and ceiling of green roof cells was measured. Evapotranspiration of the green roof cells were measured using weight changes. Compared with temperature difference on the control cell, temperature difference was greater on green roof cells. Between two green roof cells, the temperature difference was greater on the third cell with a thicker soil layer. Temperature differences below soil and on ceilings of green roof cells were found greater than those of the control cell. Between the green roof cells, there was no difference in the temperature reduction effects below soil and on ceilings based on substrate depth. In summary, green roof was found effective in temperature reduction due to evapotranspiration and shading effect.

Electromagnetic Micro x-y Stage for Probe-Based Data Storage

  • Park, Jae-joon;Park, Hongsik;Kim, Kyu-Yong;Jeon, Jong-Up
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제1권1호
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    • pp.84-93
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    • 2001
  • An electromagnetic micro x-y stage for probe-based data storage (PDS) has been fabricated. The x-y stage consists of a silicon body inside which planar copper coils are embedded, a glass substrate bonded to the silicon body, and eight permanent magnets. The dimensions of flexures and copper coils were determined to yield $100{\;}\mu\textrm{m}$ in x and y directions under 50 mA of supplied current and to have 440 Hz of natural frequency. For the application to PDS devices, electromagnetic stage should have flat top surface for the prevention of its interference with multi-probe array, and have coils with low resistance for low power consumption. In order to satisfy these design criteria, conducting planar copper coils have been electroplated within silicon trenches which have high aspect ratio ($5{\;}\mu\textrm{m}$in width and $30{\;}\mu\textrm{m}$in depth). Silicon flexures with a height of $250{\;}\mu\textrm{m}$ were fabricated by using inductively coupled plasma reactive ion etching (ICP-RIE). The characteristics of a fabricated electromagnetic stage were measured by using laser doppler vibrometer (LDV) and dynamic signal analyzer (DSA). The DC gain was $0.16{\;}\mu\textrm{m}/mA$ and the maximum displacement was $42{\;}\mu\textrm{m}$ at a current of 180 mA. The measured natural frequency of the lowest mode was 325 Hz. Compared with the designed values, the lower natural frequency and DC gain of the fabricated device are due to the reverse-tapered ICP-RIE process and the incomplete assembly of the upper-sided permanent magnets for LDV measurements.

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Chemical Vapor Deposition of Ga2O3 Thin Films on Si Substrates

  • Kim, Doo-Hyun;Yoo, Seung-Ho;Chung, Taek-Mo;An, Ki-Seok;Yoo, Hee-Soo;Kim, Yun-Soo
    • Bulletin of the Korean Chemical Society
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    • 제23권2호
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    • pp.225-228
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    • 2002
  • Amorphous $Ga_2O_3$ films have been grown on Si(100) substrates by metal organic chemical vapor deposition (MOCVD) using gallium isopropoxide, $Ga(O^iPr)_3$, as single precursor. Deposition was carried out in the substrate temperature range 400-800 $^{\circ}C$. X-ray photoelectron spectroscopy (XPS) analysis revealed deposition of stoichiometric $Ga_2O_3$ thin films at 500-600 $^{\circ}C$. XPS depth profiling by $Ar^+$ ion sputtering indicated that carbon contamination exists mostly in the surface region with less than 3.5% content in the film. Microscopic images of the films by scanning electron microscopy (SEM) and atomic force microscopy (AFM) showed formation of grains of approximately 20-40 nm in size on the film surfaces. The root-mean-square surface roughness from an AFM image was ${\sim}10{\AA}$. The interfacial layer of the $Ga_2O_3$/Si was measured to be ${\sim}35{\AA}$ thick by cross-sectional transmission electron microscopy (TEM). From the analysis of gaseous products of the CVD reaction by gas chromatography-mass spectrometry (GC-MS), an effort was made to explain the CVD mechanism.

Effects of Mechanical Stimuli on the Cell Proliferation and Collagen Production on the Micropatterned Substrate

  • ;;;;;;;신정욱
    • 대한의생명과학회지
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    • 제12권2호
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    • pp.119-125
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    • 2006
  • In relation to the tissue engineering, the cellular responses to the morphology of the scaffold surface are interesting topics. Human ligament fibroblasts (HLFs) were cultured on the micrpatterned silicone substrates subjected to cyclic stretch to simulate ligament motion. Groove and ridge width of silicone substrates was 10/50, 20/50, 20/10, and 20/20 ${\mu}m$ (groove/ridge ${\mu}m$) with a depth of $3{\mu}m$. Strain was applied over two days for 4 hours per day with a frequency of 0.5 Hz with the magnitudes of 4 or 8%. The purpose of this study was to evaluate ligament fibroblast alignment and cellular responses in relation to the pattern of microgrooved surface and stretching magnitude. Ligament fibroblasts in the microgrooved surface were elongated and aligned parallel to the microgrooves under no stretch. Uniaxial cyclic stretch induced cellular activities and their orientation rise in cellular response and the cells showed alignment and elongation perpendicular to the direction of the stretch. Biochemical analyses showed that the best cellular response was found on the $20/50{\mu}m$ under 8% stretch. The surface morphology and mechanical stretching were found to contribute to increase of proliferation, collagen production.

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다공성(多孔性) 유리메디아를 이용한 고정상(固定床) 생물막법(生物膜法)에 관한 연구(硏究) (A Study on a Fixed Bed Biofilm Process Using Porous Glass Media)

  • 윤태일;김재훈
    • 상하수도학회지
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    • 제10권1호
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    • pp.112-120
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    • 1996
  • In this study, the porous glass media was utilized as biomass carrier, and the optimum characteristics of this new media in fixed bed biofilm process were investigated. The characteristics of media considered here are a void volume fraction, a specific surface area, and surface characteristics of media. The effect of surface roughness and material could be clearly demonstrated by the fact that the porous glass media showed a good potential for biofilm development. This might results from the fact that biofilm is initially formed in the surface cavities of the media is protect from the shear effect. Therefore, the microcolonies are not readily detached by the fluid shear. In the steady state, biofilm formation along the packing bed depth was different from media to media. The specific area was also an important factor for the attachment of microorganism on the media surface. The specific area was also an important factor for the attachment of microorganism on the media surface. In the case of porous glass media, about $100m^2/m^3$ was enough to obtain a good organic removal efficiency The organic removal efficiency could be improved by increasing the void volume fraction in the reactor, at least 80% was required to obtain a high removal efficiency and prevent clogging. From the analysis of kinetics study, the yield coefficient, Y, was 0.42 mgMLSS/mgSBOD, endogenous respiration coefficient, ke, was $0.12day^{-1}$ and substrate removel coefficient of Mckinney. km, was $16.8hr^{-1}$ for the porous glass media G-2

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미세금형 가공을 위한 전기화학식각 공정의 유한요소 해석 및 실험결과 비교 (Finite Element Simulation and Experimental Study on the Electrochemical Etching Process for Fabrication of Micro Metal Mold)

  • 류헌열;임현승;조시형;황병준;이성호;박진구
    • 한국재료학회지
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    • 제22권9호
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    • pp.482-488
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    • 2012
  • To fabricate a precise micro metal mold, the electrochemical etching process has been researched. We investigated the electrochemical etching process numerically and experimentally to determine the etching tendency of the process, focusing on the current density, which is a major parameter of the process. The finite element method, a kind of numerical analysis, was used to determine the current density distribution on the workpiece. Stainless steel(SS304) substrate with various sized square and circular array patterns as an anode and copper(Cu) plate as a cathode were used for the electrochemical experiments. A mixture of $H_2SO_4$, $H_3PO_4$, and DIW was used as an electrolyte. In this paper, comparison of the results from the experiment and the numerical simulation is presented, including the current density distribution and line profile from the simulation, and the etching profile and surface morphology from the experiment. Etching profile and surface morphology were characterized using a 3D-profiler and FE-SEM measurement. From a comparison of the data, it was confirmed that the current density distribution and the line profile of the simulation were similar to the surface morphology and the etching profile of the experiment, respectively. The current density is more concentrated at the vertex of the square pattern and circumference of the circular pattern. And, the depth of the etched area is proportional to the current density.