• Journal of the Semiconductor & Display Technology
• /
• v.22 no.4
• /
• pp.72-75
• /
• 2023

Carbon neutrality has been emerged as important mission for all the manufacturing industry to reduce energy usage and carbon emission equivalent. Korean semiconductor and display manufacturing industries are also in huge interest by minimize the energy usage as well as to find a less global warming product gases in both etch and cleaning. In addition, Korean government is also investing long term research and development plan for the safe environment in various ways. In this paper, we revisit previous research activities on carbon emission equivalent and current research activities performed in semiconductor process diagnosis research center at Myongji University with respect to the reduction of NF3 usage for the PECVD chamber cleaning, and we present the analytical result of the exhaust gas with residual gas analysis in both 6 inches and 12 inches PECVD equipment. The presented result can be a reference study of the development of new substitution gas in near future to compare the cleaning rate of the silicon oxide deposition chamber.

• Journal of Welding and Joining
• /
• v.33 no.2
• /
• pp.32-39
• /
• 2015

This study examined the welding residual stress and fracture toughness of 78mm thick steel electro gas welding (EGW) and flux cored arc welding (FCAW) welded joints by numerical analyses of the thermal elasto-plastic behavior and fracture toughness(KIC). The residual stress, fracture toughness characteristics and production mechanism on the welded joints were clarified. Moreover, the effects of the welding process (EGW and FCAW) on the welding residual stresses and fracture toughness of welded joints were evaluated. The results showed that the new welding process (EGW) appears to be an effective substitute for the existing welding process (FCAW) in a thick steel plate with high strength.

• Journal of Advanced Marine Engineering and Technology
• /
• v.25 no.6
• /
• pp.1203-1210
• /
• 2001

This study was carried out to develop an engine for off-road vehicles especially for farm tractors using the liquefied petroleum gas (LPG) which is known as a source of energy having good potential of substitute fuel for diesel engine because of its economical advantage and low pollutant materials after combustion. The study was focused on develop an engine of high in specific power output, low in specific fuel consumption and emission of pollutants. A series of teat was dope on the engine - various laboratory tests to analyze performance of the engine and actual field tests with the engine installed on a farm tractor as a power source.

• 한국가스학회:학술대회논문집
• /
• 2007.04a
• /
• pp.27-32
• /
• 2007

Dimethyl Ether (DME, $CH_3OCH_3$) is the simplest ether and is considered as one of the leading candidates in the quest for a substitute fur petroleum-based fuels. In this work, we analyzed the one-step synthesis of DME in a shell and tube type fixed bed reactor and carried out a simulation with a one-dimensional, steady state model of a heterogeneous catalyst bed, while taking into consideration the heat and mass transfer between the catalyst pellets and reactants gas and the effectiveness factor of the catalysts, together with the reactor cooling through the reactor tube wall. The reactor simulation was carried out under steady state condition and we compared the simulation results with the experimental data obtained from operations of a pilot-scale reactor and found good agreement between them.

• Journal of Welding and Joining
• /
• v.32 no.1
• /
• pp.47-52
• /
• 2014

Due to of high intensity, lower noise and easy controllability of the heat, induction heating system became well known. Induction heating method has been suggested as substitute for the gas heat source and adopted in the automation of curved hull forming system. In this study, an investigation was accomplished to find the effects on the change of material properties when the induction heating was applied on the mild steel plate. Plates were heated using weaving method to get sufficiently heat affected zone and then cooled with water or in the air. The mechanical properties of the heated plate were evaluated. As results, the tensile test, impact test and microstructures satisfied the class rule.

• Proceedings of the Korean Institute of Building Construction Conference
• /
• 2015.05a
• /
• pp.171-172
• /
• 2015

Recently, it is the global warming phenomenon because of the greenhouse gas exhaustion caused by and the environment problem is serious. And it is the situation where the problem of the exhaustion of resource because of the indiscriminate picking of the that is the raw material of the cement, limestone and natural aggregate are emphasized. In addition, thus the cement reduction amount of use and substitute material research is the urgent actual condition with the gas emission, which here it is generated in conducting compression molding in the building stone manufacturing process performance degradation phenomenon and fire resistance, and problem of the durability. Therefore, in this research, the waste porcelain is applied to the artificial stone and the durability property of the artificial stone according to it tries to be investigated.

• Proceedings of the Korean Institute of Building Construction Conference
• /
• 2014.11a
• /
• pp.51-52
• /
• 2014

Recently, it is the global warming phenomenon because of the greenhouse gas exhaustion caused by and the environment problem is serious. And it is the situation where the problem of the exhaustion of resource because of the indiscriminate picking of the that is the raw material of the cement, limestone and natural aggregate are emphasized. In addition, thus the cement reduction amount of use and substitute material research is the urgent actual condition with the gas emission, which here it is generated in conducting compression molding in the building stone manufacturing process performance degradation phenomenon and fire resistance, and problem of the durability. Therefore, in this research, because of being the magnesia phosphate ceramics, the waste porcelain is applied and the anti-wearing character of the artificial stone according to it tries to be investigated.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.11 no.1
• /
• pp.55-60
• /
• 2010

Vortex tube is the device that can separate small particles from the compressed gas, as well as compressed gas into hot and cold flow. Due to energy separation ability, a vortex tube can substitute for an EGR cooler of the automotive engine. In this study, experimental approach has been performed to analyze the energy separation characteristics of the vortex tube. Energy separation characteristics of the vortex tube has been tested for supply pressure, cold-out pressure, and hot-out pressure. As increasing supply pressure, energy separation effect increased. Maximum temperature exists about 0.85 of the cold-out-flow-ratio, and minimum exists about 0.35. Hot-out temperature of the vortex tube is affected by the hot-out and cold-out pressure. However, for the given conditions, cold-out temperature is independent of exit pressure change. The results from this study can be used for the basic design parameter of the EGR cooler substitute of an automotive engine.

• The Korean Journal of Physiology
• /
• v.24 no.1
• /
• pp.15-26
• /
• 1990

Hemoglobin was purified from the outdated human red blood cells. Phospholipids were purified from egg yolk and stored in chloroform. The artificial red blood cells (hemosome) were prepared by encapsulation of hemoglobin with phospholipid mutilayer using rotary vacuum evaporator. The shape and size of hemosomes were measured by phase contrast microscope and image analyzer. The function of hemosomes was tested by measuring oxygen dissociation curve using blood gas analyzer. In order to test whether hemosomes are useful as blood substitute they were infused into rats of which one third of total blood were drawn. The results obtained are summarized at followings. 1) Hemosomes were spherical shape and their mean diameter was 0.7 um. 2) Oxygen dissociation curve of hemosomes showed the same figure as that of normal red blood cells. 3) All rats given 1/3 transfusion with hemosomes survived until sacrificed whereas three of four rats given 1/3 transfusion with saline died within 1 hour and the rest of them died within 24 hours.

• Applied Chemistry for Engineering
• /
• v.3 no.3
• /
• pp.451-463
• /
• 1992

A selective chlorination of titaniferrous magnetite in a fluidized bed reactor was investigated to find the optimum condition for selective removal of Fe component from low grade titaniferrours magnetite ore and to produce a rutile substitute from titaniferrous magnetite ore. The optimum chlorination condition was determined to be a temperaure of $950^{\circ}C$, 2hr of reaction time, reducting agent(petroleum coke) to titaniferrous magnetite weight ratio of 0.12, and $Cl_2$ gas velocity of 5cm/sec. Under the above mentioned condition, 99% of Fe in titaniferrous magnetite was removed and the reaction residue which became rutile substitute was identified as rutile by x-ray diffraction and was found to contain 70% $TiO_2$.