• Journal of KSNVE
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• v.9 no.6
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• pp.1227-1233
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• 1999

Modern technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a nanometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. This paper deals with the structural dynamic design in high class semiconductor factory in order to be satisfied more strict vibration criteria for high sensitive equipment.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1994.10a
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• pp.52-57
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• 1994

본 논문에서는 실험적 모우드해석법을 이용하여 현재, 국내에서 가동 또는 건설 중인 반도체공장의 세가지 유형에 대한 격자보의 동적특성을 분석, 결정하고 이를 격자보의 동적설계에 활용하고자 한다.

• Journal of Magnetics
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• v.13 no.1
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• pp.34-36
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• 2008

For the measurement of the magnetic field distribution with high spatial resolution and high accuracy, the magnetic field sensing probe must be non-magnetic, but the MFM probe and sub-millimeter-meter size Hall probe use a ferromagnetic tip and block, respectively, to increase the sensitivity. To overcome this drawback, we developed a micro-size search coil magnetometer which consists of a single turn search coil, Terfenol-D actuator, scanning system, and control software. To reduce the noise generated by the stray ac magnetic field of the actuator driving coil, we employed an even function $\lambda$-H magnetostriction curve and lock-in technique. Using the developed magnetometer, we were able to measure the magnetic field distribution with a magnetic field resolution of 1 mT and spatial resolution of $0.1mm{\times}0.2mm$ at a coil vibration frequency of 1.8 kHz.