Structural and optical properties of $TiO_2$ thin film fabricated by reactive sputtering
(반응성 스퍼터링법에 의한 $TiO_2$ 박막의 구조적 및 광학적 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.04c
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- pp.58-61
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- 2008