• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2445-2450
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• 2003

Recently, biological technology industry shows great development. Instruments and systems related biological technology have been developed actively. In this paper, we developed a new micro end-effector for biological cell manipulation. The existing micro end-effector for biological cell manipulation has not any force sensing mechanism. Usually, excessive contact force occurring when the end-effector and a cell collide might make a damage on the cell. However, unfortunately, user can not notice the condition in case of using the existing end-effector. In order to overcome we proposed the improved micro end-effector having a force sensing mechanism. This paper presents the design concepts of the new micro end-effector. We carried out calibration of the force sensor and tested the performance of the proposed micro end-effector. Through a series of experiments the new micro end-effector shows the possibility of application for precision biological cell manipulation such as DNA operation

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.6
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• pp.470-474
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• 2001

This paper describes the fabrication and characteristics of CrN thin-film type pressure sensors, in which the sensing elements were deposited on SuS. 630 diaphragm by DC reactive magnetron sputtering in an argon-nitride atmosphere(Ar-(10%)N$_2$). The optimized condition of CrN thin-film sensing elements was thickness range of 3500$\AA$ and annealing condition(300$\^{C}$, 3 hr) in Ar-10%N$_2$ deposition atmosphere. Under optimum conditions, the CrN thin-films for strain gauges is obtained a high resistivity, ρ=1147.65 $\mu$Ωcm, a low temperature coefficient of resistance, TCR=186ppm/$\^{C}$ and a high temporal stability with a good longitudinal, 11.17. The output sensitivity of fabricated CrN thin-film type pressure sensors is 2.36 mV/V, 4∼20nA and the maximum non-linearity is 0.4%FS and hysteresis is less than 0.2%FS.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.8
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• pp.683-688
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• 2014

This paper presents a high-performance flexible tactile sensor based on inorganic silicon flexible electronics. We created 100 nm-thick semiconducting silicon ribbons equally distributed with 1 mm spacing and $8{\times}8$ arrays to sense the pressure distribution with high-sensitivity and repeatability. The organic silicon rubber substrate was used as a spring material to achieve both of mechanical flexibility and robustness. A thin copper layer was deposited and patterned on top of the pressure sensing layer to create a flexible temperature sensing layer. The fabricated tactile sensor was tested through a series of experiments. The results showed that the tactile sensor is capable of measuring pressure and temperature simultaneously and independently with high precision.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.11
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• pp.1871-1884
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• 1997

This paper describes the design process of a 3-component load cell with a multiple parallel plate structure which may be used to measure transverse forces and twisting moment simultaneously. Also we have derived equations to predict the bending strains on the surface of the beams in the multiple parallel plate structure under transverse force or twisting moment. It reveals that the bending strains calculated from the derived equations are in good agreement with the results from finite element analysis and experiment. Also we have evaluated the rated output and interference error of each component, which can be efficiently used to design a 3-component load cell with a multiple parallel plate structure.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.6 s.177
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• pp.1540-1546
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• 2000

Recently, force measurement systems are commonly used in many industrial fields and the precision of the measurement system is getting more important as the industry needs more precise tools and in struments to make high quality products. However, a high precision force measurement system is hard to make unless we know precisely the causes, quality and quantity of measurement errors in advance. In this work, many possible mechanical causes of measurement errors are reviewed including ratio of length to diameter of sensing part, radius of contact area, radius of bearing part, ratio of material properties and change of boundary conditions. Also, the measurement errors are analyzed by nonlinear finite element method and the nonlinear behavior of the errors are investigated. The results can be used to design force measurement systems and expected to be very useful especially for compact type load cells.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.737-740
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• 2001

This paper describes the fabrication and characteristics of CrN thin-film type pessure sensors, which the sensing elements were deposited on SUS. 630 diaphragm by DC reactive magnetron sputtering in an argon-nitride atmosphere(Ar-(10%)N$_2$). The optimized condition of CrN thin-film sensing elements was thickness range of 3500${\AA}$ and annealing condition(300$^{\circ}C$, 3 hr) in Ar-10 %N$_2$deposition atmosphere. Under optimum conditions, the CrN thin-films for strain gauges is obtained a high resistivity, $\rho$=1147.65 ${\mu}$$\Omega$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal, 11.17. The output sensitivity of fabricated CrN thin-film type pressure sensors is 2.36 mV/V, 4∼20 mA and the maximum non-linearity is 0.4 %FS and hysteresis is less than 0.2 %FS.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1375-1377
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• 2001

This paper describes the fabrication and characteristics of CrN thin-film type pessure sensors, in which the sensing elements were deposited on SUS. 630 diaphragm by DC reactive magnetron sputtering in an argon-nitride atmosphere(Ar-(10%) $N_2$). The optimized condition of CrN thin-film sensing elements was thickness range of 3500$\AA$ and annealing condition($300^{\circ}C$, 3 hr) in Ar-10 %$N_2$ deposition atmosphere. Under optimum conditions, the CrN thin-films for strain gauges is obtained a high resistivity, $\rho$=1147.65 ${\mu}{\Omega}$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal, 11.17. The output sensitivity of fabricated CrN thin-film type pressure sensors is 2.36 mV/V, 4$\sim$20 mA and the maximum non-linearity is 0.4 %FS and hysteresis is less than 0.2 %FS..

• Proceedings of the Korean Society For Composite Materials Conference
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• 2002.10a
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• pp.261-264
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• 2002

Interfacial evaluation, damage sensing and cure monitoring of single carbon fiber/thermosetting composite with different curing processes was investigated using electro-micromechanical test. After curing, residual stress was monitored by measurement of electrical resistance (ER) and then it was compared to correlate with various curing processes. In thermal curing, curing shrinkage appeared significantly by matrix shrinkage and residual stress due to the difference in thermal expansion coefficient (TEC). The change in electrical resistance (ΔR) on thermal curing was higher than that on ultraviolet (UV) curing. For thermal curing, apparent modulus was the highest and reaching time until same strain was faster. So far thermal curing shows strong durability on the IFSS after boiling test.

• Journal of Sensor Science and Technology
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• v.16 no.3
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• pp.211-219
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• 2007

This paper describes the development of 6-axis force/moment sensor for a humanoid robot. In order to walk on uneven terrain safely, the robot's foot should perceive the applied forces Fx, Fy, Fz and moments Mx, My, Mz to itself, and be controlled by the foot using the forces and moments. Also, in order to grasp unknown object safely, the robot's hand should perceive the weight of the object using the mounted 6-axis force/moment sensor to its wrist, and be controlled by the hand using the forces and moments. Therefore, 6-axis force/moment sensor should be necessary for a humanoid robot's hand and foot. In this paper, 6-axis force/moment sensor for a humanoid robot was developed using many PPBs (parallel plate-beams). The structure of the sensor was newly modeled, and the sensing element of the sensor was designed using theoretical analysis. Then, 6-axis force/moment sensor was fabricated by attaching strain-gages on the sensing elements, and the characteristic test of the developed sensor was carried out. The rated outputs from theoretical analysis agree well with the results from the experiments.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.229.1-229.1
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• 2014

Tactile sensors have widely been researched in the areas of electronics, robotic system and medical tools for extending to the form of bio inspired devices that generate feeling of touch mimicking those of humans. Recent efforts in adapting the tactile sensor have included the use of novel materials with both scalability and high sensitivity [1]. Graphene, a 2-D allotrope of carbon, is a prospective candidate for sensor technology, having strong mechanical properties [2] and flexibility, including recovery from mechanical stress. In addition, its truly 2-D nature allows the formation of continuous films that are intrinsically useful for realizing sensing functions. However, very few investigations have been carrier out to investigate sensing characteristics as a device form with the graphene subjected to strain/stress and pressure effects. In this study, we present a sensor of vertical forces based on single-layer graphene, with a working range that corresponds to the pressure of a gentle touch that can be perceived by humans. In spite of the low gauge factor that arises from the intrinsic electromechanical character of single-layer graphene, we achieve a resistance variation of about 30% in response to an applied vertical pressure of 5 kPa by introducing a pressure-amplifying structure in the sensor. In addition, we demonstrate a method to enhance the sensitivity of the sensor by applying resistive single-layer graphene.