• 센서학회지
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• 제13권4호
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• pp.303-308
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• 2004

This paper descibes on the characteristics of Ta-N(tantalum nitride) ceramic thin-film strain gauges which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-nitrogen atmosphere (Ar-$(4{\sim}16%)N_{2}$) for high-temperature applications. These films were annealed in $2{\times}10^{-6}$ Torr vacuum furnace at the range of $500{\sim}1000^{\circ}C$. Optimum deposition atmosphere and annealing temperature were determined at $900^{\circ}C$ for 1 hr. in 8% $N_{2}$ gas flow ratio. Under optimum formation conditions, the Ta-N thin-film for strain gauges was obtained a high-resistivity of $768.93{\mu}{\Omega}{\cdot}cm$, a low temperature coefficient of resistance (TCR) of -84 ppm/$^{\circ}C$ and a good longitudinal gauge factor (GF) of 4.12.

• 한국정밀공학회지
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• 제29권6호
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• pp.621-625
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• 2012

Conventionally, to measure derailment coefficient of a railway wheel, strain gauges for lateral force measurement are attached to both side of the wheel. But narrow gap between railway wheel and traction motor makes it difficult to attache the strain gauges at the inner side of wheel. In this study, to overcome the hard accessibility to the strain gauge points by narrow gap, a new Wheatstone bridge connection method is presented by attaching all the strain gauges at the outer side of wheel with a new bridge connection. We evaluate the running safety of railway vehicles in accordance with railway safety regulations. The experimental results obtained shows higher sensitivity than conventional methods and the derailment coefficient measurement procedure becomes simpler.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.573-576
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• 2000

The physical, electrical and piezoresitive characteristics of CrN(chromium nitride) thin-films on silicon substrates have been investigated for use as strain gauges. The thin-film depositions have been carried out by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(5∼25 %)Na$_2$). The deposited CrN thin-films with thickness of 3577${\AA}$ and annealing conditions(300$^{\circ}C$, 48 hr) in Ar-10 % N$_2$deposition atmosphere have been selected as the ideal piezoresistive material for the strain gauges. Under optimum conditions, the CrN thin-films for the strain gauges is obtained a high electrical resistivity, $\rho$=1147.65 ${\mu}$$\Omega$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=11.17.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.713-716
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• 2002

The dimensional accuracy of the cold forged products is strongly dependent on the elastic behavior of the die. The elastic deformation of the die is continuously changed during the process. Therefore, it is needed to measure the deformation of die. Strain gauges are used to measure the elastic strains in the die during cold backward extrusion process. The strain gauges are attached on the die surface and embedded at the interface between the die insert and the stress ring. In order to compare the results with the FE-analysis, the rigid-plastic FE-analysis of cold backward extrusion process using DEFORM-3D has been performed, and the analysis of elastic deformation of the die has been done by using ANSYS with non-linear contact.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.59-63
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• 2002

This paper reports on the fabrication process and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited on a thermally oxidized micromachined Si diaphragms with buried cavities for overpressure tolerance. The proposed device takes advantage of the good mechanical properties of single-crystalline Si as a diaphragm fabricated by SDB and electrochemical etch-stop technology, and in order to extend the temperature range, it has relatively higher resistance, stability and gauge factor of Ta-N thin-films more than other gauges. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.21 ~ 1.097 mV/V.kgf/$\textrm{cm}^2$ in temperature ranges of 25~ $200^{\circ}C$ and a maximum non-linearity is 0.43 %FS.

• 한국구조물진단유지관리공학회 논문집
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• 제16권1호
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• pp.99-109
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• 2012

이 연구에서는 변형률계를 사용하여 변위를 추정하는 이론식을 제안 및 검증하고 하중 작용점과 크기를 추정하여 강재보의 건전도 평가 시스템을 개발하고자 하였다. 실험결과 160kN(항복하중의 56%)가력시 최대처짐 점에서 변형률계를 사용하여 얻는 처짐과 변위계의 측정처짐과의 오차율이 2%이내로 나타났으며 하중작용점 및 크기의 추정도 오차율1% 이내로 나타났다. 이를 통해 변형률계로 강재보의 변위 및 하중을 계측 할 수 있으며 나아가 변위계와 하중계의 생략으로 경제적인 센서설계를 할 수 있다. Lab VIEW로 구현된 건전도 평가 프로그램은 측정된 데이터가 일정 범위(강도 한계상태, 사용성 한계상태, 항복변형률)를 넘어설 때 단계별 경고를 발생하였고 변형률계 만으로 사용성한계상태와 강도한계상태를 동시에 모니터링 할 수 있었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.1067-1068
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• 2011

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집C
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• pp.586-591
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• 2001

In the cold forging, elastic deformation of the die has been investigated to improve the accuracy of cold forged parts with F.E.M analysis using DEFORM, and with experiments using strain gauges. In the experiments, initial billet was selected to easily find the effect of elastic deformation according to the forging modes, extrusion and upsetting type, and only extrusion type. Elastic deformation of the die can be obtained by the signal from the strain gauges and this signal can be amplified by data acquisition system during the process. In the F.E.M analysis, two types of analysis are used to predict elastic strain of the die. To improve an accuracy of forged product and die dimension, this study compared with strain distribution between experiment and F.E.M analysis. As a result, the history of the deformation of the die and elastic recovery of forged product can be obtained by the elastic strain analysis of forged product and die according to the forging modes.

• 한국지반공학회논문집
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• 제23권4호
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• pp.25-32
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• 2007

도로 성토재 및 구조물 뒤채움재로 점성토 활용의 필요성이 증가함에 따라 보강재로 배수성을 갖고 있는 토목섬유 부직포가 점차 주목을 받고 있으나, 현장 보강토구조물에서 부직포의 변형거동을 분석한 사례는 거의 없으며, 그 이유는 부직포의 경우 지오그리드나 직포에 비해 강성이 작고 변형률이 크며 스트레인 게이지를 이용한 계측이 곤란하기 때문이다. 본 연구에서는 스트레인 게이지를 이용하여 부직포의 변형거동을 보다 간편하게 계측할 수 있는 방법을 제안하였고, 이를 실내시험과 2개의 실물보강토옹벽에 적용하여 유용성 여부를 검토하였다. 구속압 70kPa 하에서 실시한 실내 광폭인장시험의 경우 스트레인 게이지에 의해 계측된 부직포의 국부변형은 LVDT에 의해 계측된 전체변형과 유사한 패턴으로 거동하는 것으로 나타났다. 실물보강토옹벽에서 부직포의 변형범위는 직포나 지오그리드보다 크게 나타나나, 이들 보강재와 변형 패턴이 유사하고, 16개월 동안 정상적으로 작동하는 것으로 나타났다. 따라서, 본 연구에서 제안한 스트레인 게이지에 의한 부직포의 변형계측방법은 매우 유용한 것으로 판단된다.

• 제어로봇시스템학회논문지
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• 제17권2호
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• pp.131-134
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• 2011

In this study, we propose an optimal design and new fabrication method for a slim tactile sensor. Slim tactile sensor can detect 3-axial forces and has suitable flexibility for intelligent robot fingers. To amplify the contact signal, a unique table-shaped structure was attempted. A new layer-by-layer fabrication process for polymer micromachining that can make a 3D structure by using a sacrificial layer was proposed. A table-shaped epoxy sensing plate with four legs was built on top of a flexible polymer substrate. The plate can convert an applied force to a concentrated stress. Normal and shear forces can be detected by combining responses from metal strain gauges embedded in the polymer substrate. The optimal positions of the strain gauges are determined using the strain distribution obtained from finite element analysis.