• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.114-118
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• 2001

HP Laser Interferometer Measurement System[HP5529A] is one of the most powerful equipment for measurement of the motion accuracy. The straightness measurement system of the HP5529A is composed of wollastone prism and reflector. In this system, straightness error is measured by relative lateral motion between prism and reflector. But rotating motion of prism or reflector as moving optic causes not real straightness error but additive straightness error. Especially unwanted straightness error as this becomes very large when reflector is used as moving optic and an interval between reflector and prism is distant. In this paper, the compensation method is proposed for removing additive error and experiment is carried out for theoretical verification.

• 한국정밀공학회지
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• 제22권9호
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• pp.69-76
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• 2005

The laser interferometer system such as HP5529A is one of the most powerful equipment fur measurement of the straightness error in precision stages. The straightness measurement system, HP5529A is composed of a Wollaston prism and a reflector. In this system, the straightness error is defined as relative lateral motion change between the prism and the reflector and computed from optical path difference of two polarized laser beams between these optics. However, rotating motion of the prism or the reflector used as a moving optic causes unwanted straightness error. In this paper, a compensation method is proposed for removing the unwanted straightness error generated by rotating the moving optic and an experiment is carried out for theoretical verification. The result shows that the unwanted straightness error becomes very large when the reflector is used as the moving optic and the distance between the reflector and the prism is far. Therefore, the prism must be generally used as the moving optic instead of the reflector so as to reduce the measurement error. Nevertheless, the measurement error must be compensated because it's not a negligible error if a rotating angle of the prism is large. In case the reflector must be used as the moving optic, which is unavoidable when the squareness error is measured between two axes, this compensation method can be applied and produces a better result.

• 한국정밀공학회지
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• 제30권6호
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• pp.607-614
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• 2013

In this study, effect of the sensor gain error is theoretically analyzed and simulated when mixed sequential two-prove method(MTPM) is applied for the precision measurement of straightness error of a linear motion table. According to the theoretical analysis, difference of the gain errors between two displacement sensors increases measurement error dramatically and alignment error of the straightedge is also amplified by the sensor gain difference. On the other hand, if the gain errors of the two sensors are identical, most of error terms are cancelled out and the alignment error doesn't give any influence on the measurement error. Also the measurement error of the straightness error is minimized compared with that of the straightedge's form error owing to close relationship between straightness error and angular motion error of the table in the error terms.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2006년도 춘계학술논문 발표대회 제6권1호
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• pp.173-176
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• 2006

The purpose of this study is to investigate the cause of an error of prefounded column straightness and to measure the error during Top-Down construction. There are several causes of an error of prefounded column : (1) The columns are connected by welding or other methods. (2) concrete and aggregates are put in columns. (3) The columns are constructed during the construction. The error of column straightness is different for each column, and the tilting of columns is shown in one or two directions between floors. The additional loads caused by the error of straightness may give damage to buildings.

• 한국건축시공학회지
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• 제6권4호
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• pp.77-83
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• 2006

The purpose of this study is to measure the straightness of prefounded columns during underground construction stages. There are several causes of an error of prefounded column: (1) columns connected by welding or bolting, (2) by placement of concrete and aggregates around columns, (3) movement during construction, and (4) load applied during construction. The error of column straightness is different for each column, and the tilting of columns is shown in one or two directions between floors. The additional loads caused by the error of straightness may give damage to buildings. This paper presents the measurement results of column straightness, and thus providing a basis for further analysis.

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.26-31
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• 2008

A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

• 한국정밀공학회지
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• 제24권3호
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• pp.117-123
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• 2007

This paper describes a three-probe system that can be used to measure the parallelism and straightness of a pair of rails simultaneously. The parallelism is measured using a modified reversal method, while the straightness is measured using a sequential two-point method. The measurement algorithms were analyzed numerically using a pair of functionally defined rails to validate the three-probe system. Tests were also performed on a pair of straightedge rails with a length of 250 mm and a maximum straightness deviation of $0.05{\mu}m$, as certified by the supplier. The experimental results demonstrated that the parallelism-measurement algorithm had a cancellation effect on the probe stage motion error. They also confirmed that the proposed system could measure the slope of a pair of rails about $0.06{\mu}rad$. Therefore, by combining this technique with a sequential differential method to measure the straightness of the rails simultaneously, the surface profiles could be determined accurately and eliminate the stage error. The measured straightness deviation of each straight edge was less than $0.05{\mu}m$, consistent with the certified value.

• 한국정밀공학회지
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• 제17권5호
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.203-206
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• 2001

This paper presents a straightness measurement system for flat and long workpieces. The measurement system consists of a laser optical unit, a CCD camera and processing system, and a carrier system with a stylus. The carrier system accompanies the stylus, which displaces a retroreflector along the surface profile. The optical unit is used to optically amplify the displacement of retroreflector. The CCD camera and processing system finally identifies the vertical displacement of the stylus unit. The developed system is applied to two surfaces: ground surface and LM guide surface. The experimental results show that the developed system can measure the straightness of flat surfaces within sub-micron error.

• 마이크로전자및패키징학회지
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• 제26권1호
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• pp.17-21
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• 2019

본 논문에서는 공작기계 등에서 필요로 하는 진직도 측정시스템을 가시광의 레이저와 CMOS 이미지센서를 사용하여 저가로 구현하였다. CMOS 이미지센서를 이용하여 광이미지를 검출하고 영상처리를 통해 진직도 변화를 계산하였다. 레이저와 이미지센서의 거리를 3m로 하여 실험한 진직도 측정에서 오차가 0.9%로 우수함을 확인하였으며, 제작된 진직도 시스템은 3D 프린터 등 다른 응용분야에서도 사용 할 수 있을 것으로 생각된다.