• Korean Chemical Engineering Research
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• v.45 no.5
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• pp.466-472
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• 2007

A technology platform for wafer-level three-dimensional integration circuits (3D-ICs) is presented, and that uses wafer bonding with low-k polymeric adhesives and Cu damascene inter-wafer interconnects. In this work, one of such technical platforms is explained and characterized using a test vehicle of inter-wafer 3D via-chain structures. Electrical and mechanical characterizations of the structure are performed using continuously connected 3D via-chains. Evaluation results of the wafer bonding, which is a necessary process for stacking the wafers and uses low-k dielectrics as polymeric adhesive, are also presented through the wafer bonding between a glass wafer and a silicon wafer. After wafer bonding, three evaluations are conducted; (1) the fraction of bonded area is measured through the optical inspection, (2) the qualitative bond strength test to inspect the separation of the bonded wafers is taken by a razor blade, and (3) the quantitative bond strength is measured by a four point bending. To date, benzocyclobutene (BCB), $Flare^{TM}$, methylsilsesquioxane (MSSQ) and parylene-N were considered as bonding adhesives. Of the candidates, BCB and $Flare^{TM}$ were determined as adhesives after screening tests. By comparing BCB and $Flare^{TM}$, it was deduced that BCB is better as a baseline adhesive. It was because although wafer pairs bonded using $Flare^{TM}$ has a higher bond strength than those using BCB, wafer pairs bonded using BCB is still higher than that at the interface between Cu and porous low-k interlevel dielectrics (ILD), indicating almost 100% of bonded area routinely.

• Korean Journal of Environment and Ecology
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• v.24 no.6
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• pp.723-734
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• 2010

This study aims to analyze the change in vegetation for 10 years after the construction, targeting Suwoncheon, the first domestic ecological stream construction project. As for the section for the study, the section from Gyeonggi bridge to Youngyeon bridge, the first restoration project section, was targeted. The research districts consisted of 3 districts depending on topographical structure. Investigation check cosisted of cross-sectional topographical structure, vegetation status and the structure of herbaceous plant community. As for the cross-sectional topographical structure of the stream, the width of entire stream was 26.5~28.0m and water channel is 10~20m. The area for hydrophilic space was securing spacious riverside. Upper stream of reservoir beam was shallow and slow in reservoir area above weir. Lower stream of reservoir beam, the width of water channel was narrow and ripples were formed. Among species, 9 plants were planted and 6 species plants including Salix gracilistyla, Phragmites communis and Zoysia japonica were planted at the time of construction. In the water side, there were 2 species, such as Zoysia japonica and Trifolium repens, etc, still remained after seeding at the time of constrcution. The planted plants which were observed through this investigation, were 2 species such as Festuca arundinacea and Dactylis glomerata. Apart from the planted plants, arid climate herbaceous plant such as Setaria viridis and Artemisia princeps var. orientalis formed power and the naturalized species variously emerged in 15 species. For revetment, natural stone stacking method was condicted and Salix gracilistyla, Aceriphyllum rossii, etc were planted. But all the planted plants disappeared and now it was covered with Equisetum arvense and Humulus japonicus. It was because that the base for growth and development of the plants was not constructed at the time of restoration in a way of attaching natural stones onto the concrete base. In the water channel, various wetland species including Typha orientalis, Acorus calamus var. angustatus and Phragmites communis, etc, were planted but only Salix gracilistyla, Phragmites communis and Zizania latifolia remained. As for species of the autochthons, Persicaria thunbergii was dominant. In the lower stream of reservoir beam, Humulus japonicus formed forces. In the hydrophilic space, it was necessary to direct the landscape of in-stream vegetation in cosideration of users. For this, planting Miscanthus sacchariflorus in a community was proposed. In the upper stream of reservoir beam, suplementary screen seeding was necessary so that Zizania latifolia, Typha orientalis and Phragmites communis can fit the depth of water. In the Lower stream of reservoir beam, it was necessary to constantly manage Humulus japonicus so that the wetland autochthons species, such as Phragmites communis and Persicaria thunbergii can establish power more stably.

• Journal of the Mineralogical Society of Korea
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• v.16 no.2
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• pp.135-149
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• 2003

Domestic zeolite ores are mostly composed of Ca-type clinoptilolite, accompanying a little amounts of mordenite. However, other types of zeolite ores rich in ferrierite, heulandite, or mordenite are less commonly found. Based on the quantitative XRD analysis, zeolite contents are determined to be nearly 50∼90 wt%. Impurities (mostly ＞ 10 wt%) in the zeolite ores chiefly consist of quartz, feldspar, smectite, and opal-CT. The determined CEC values ($CEC_{AA}$ ) of powdery samples (grain size: < 125 $\mu\textrm{m}$) of zeolite ores by the Ammonium Acetate method are mostly higher than 100 meq/100 g. Some zeolites from the Guryongpo area, corresponding to the clinoptilolite ore, are measured to be dominantly high in CEC values ranging 170∼190 meq/100 g. Cation exchange property of the zeolite ores varies greatly depending on the types or zeolite species present in the ores. Despite of the lower grade in zeolite content, the $CEC_{AA}$ of ferrierite ore is comparatively high. Compared to this, the $CEC_{AA }$ of heulandite ore is very low, though the zeolite ore exhibits the highest grade ranging up to about 90 wt%. In addition, the CEC values calculated theoretically from the framework composition of clinoptilolite-heulandite series are not consistent with those determined by the cation exchage experiment. The measured $CEC_{AA}$ of clinoptilolite ores are generally higher than those of heulandite ores. This may be due to the higher Ca abundance in exchangeable cation composition and the presence of probable stacking faults in heulandite. The variation of $CEC_{CEC}$ is roughly proportional, though not strictly compatible, to the zeolite contents in clinoptilolite ores. It seems to be caused by the fact that the $CEC_{AA}$ of clinoptilolite locally varies depending on crystal-chemical diversity, i. e., the variation in framework composition (Si/Al) and exchangeable cation composition (especially, the contents of Ca and K). In addition, the determined CEC values ($CEC_{MB}$ ) of zeolite ores by the Methylene Blue method are much higher than those calculated from smectite contents. It suggests a probable reaction of Methylene Blue ion ($C_{16}$ $H_{18}$ $N_3$S+) with larger-pore zeolites than clinoptlolite-heulandite series, i.e., ferrierite and mordenite as well as with smectite. This can be supported by the fact that the ferrierite ore accompanying little amount of smectite has the highest value in CE $C_{MB}$ .

• 한국지구물리탐사학회:학술대회논문집
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• 2002.09a
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• pp.24-45
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• 2002

For the last several decades, high-resolution shallow marine seismic technique has been used for various resources, engineering and geological surveys. Even though the multichannel method is powerful to image subsurface structures, single channel analog survey has been more frequently employed in shallow water exploration, because it is more expedient and economical. To improve the quality of the high-resolution seismic data economically, we acquired digital seismic data using a small air gun, 6 channel streamer and PC-based system, performed data processing and produced high-resolution seismic sections. For many years, such test acquisitions were performed with other studies which have different purposes in the area of off Pohang, Yellow Sea and Gyeonggi-bay. Basic data processing was applied to the acquired data and the processing sequence included gain recovery, deconvolution, filtering, normal moveout, static corrections, CMP gathering and stacking. Examples of digitally processed sections were shown and compared with analog sections. Digital seismic sections have a much higher resolution after data processing. The results of acquisition and processing show that the high-resolution shallow marine seismic surveys using a small air gun, 6 channel streamer and PC-based system may be an effective way to image shallow subsurface structures precisely.