• Title/Summary/Keyword: Stability of $O_3$

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Effects of Synthetic Temperature and Suspension Stability of CeO2 Abrasive on CMP Characteristics (CeO2 연마입자의 합성온도와 수계안정성이 CMP 특성에 미치는 영향)

  • 임건자;김태은;이종호;김주선;이해원;현상훈
    • Journal of the Korean Ceramic Society
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    • v.40 no.2
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    • pp.167-171
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    • 2003
  • CMP(Chemical Mechanical Planarization) slurry for STI process is made by mechanically synthesized$CeO_2$as abrasive. The abrasive can be stabilized by electrostatic or steric stabilization in aqueous slurry and steric stabilization is more effective for long-term stability. Blanket-type$SiO_2$and $Si_3N_4$ wafers are polished with CMP slurry containing$CeO_2$synthesized in 50$0^{\circ}C$ or $700^{\circ}C$. Removal rate and surface uniformity of$SiO_2$and$Si_3N_4$wafer and selectivity are influenced by synthetic condition of abrasive, suspension stability and pH of slurries.

Coloration and Chemical Stability of SiO2 and SnO2 Coated Blue CoAl2O4 Pigment (SiO2, SnO2 코팅된 청색 CoAl2O4 안료의 색상, 물성 평가 연구)

  • Yun, JiYeon;Yu, Ri;Pee, Jae-Hwan;Kim, YooJin
    • Journal of Powder Materials
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    • v.21 no.5
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    • pp.377-381
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    • 2014
  • This work describes the coloration, chemical stability of $SiO_2$ and $SnO_2$-coated blue $CoAl_2O_4$ pigment. The $CoAl_2O_4$, raw materials, were synthesized by a co-precipitation method and coated with silica ($SiO_2$) and tin oxide ($SnO_2$) using sol-gel method, respectively. To study phase and coloration of $CoAl_2O_4$, we prepared nano sized $CoAl_2O_4$ pigments which were coated $SiO_2$ and $SnO_2$ using tetraethylorthosilicate, $Na_2SiO_3$ and $Na_2SiO_3$ as a coating material. To determine the stability of the coated samples and their colloidal solutions under acidic and basic conditions, colloidal nanoparticle solutions with various pH values were prepared and monitored over time. Blue $CoAl_2O_4$ solutions were tuned yellow color under all acidic/basic conditions. On the other hand, the chemical stability of $SiO_2$ and $SnO_2$-coated $CoAl_2O_4$ solution were improved when all samples pH values, respectively. Phase stability under acidic/basic condition of the core-shell type $CoAl_2O_4$ powders were characterized by transmission electron microscope, X-ray diffraction, CIE $L^*a^*b^*$ color parameter measurements.

Effect of Sintering Temperature on Electrical and Dielectric Behavior of Pr6O1-Based ZnO Varistors with DC Accelerated Aging Stress (Pr6O1계 ZnO 바리스터의 DC 가속열화 스트레스에 따른 전기적, 유전적 거동에 미치는 소결온도의 영향)

  • 남춘우;정영철;김향숙
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.3
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    • pp.244-252
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    • 2002
  • The electrical and dielectric behavior fort DC accelerated aging stress of P $r_{6}$ $O_{11}$-based Zno varistors cnsisting of ZnO-P $r_{6}$ $O_{11}$-CoO-C $r_2$ $O_3$-E $r_2$ $O_3$ were investigated with sintering temperature in the range of 1325~1345$^{\circ}C$. The varistor ceramics with increasing sintering temperature were more densified. A more densified varistors leaded to high stability for DC accelerated aging stress. Furthermore, the stability for DC accelerated aging stress was increased with the leakage current and dtan $\delta$/dV decreasing in order of 1325longrightarrow1335longrightarrow1345longrightarrow134$0^{\circ}C$ in sintering temperature. It was found that the stability for DC stress is affected more greatly by the leakage current and dtan $\delta$/dV than the densification. It is considered that the stability of varistors for DC stress can be estimated by considering the factors, such as the densification, leakage current, and dtan $\delta$/dV. As a result, the varistor sintered at 134$0^{\circ}C$ exhibited the highest stability, with %$\Delta$ $V_{lmA}$=-1.54%, %$\Delta$$\alpha$=-2.49%, %$\Delta$ $I_{\ell}$=+240.68%, 5%$\Delta$tan$\delta$=+29.96%.96%.96%.%.

Effect of Dispersion Stability of Particles on Detergency of Particulate Soil(Part 1) - The Dispersion Stability of α-Fe2O3 Particles in the Nonyl Phenol Polyoxyethylene Ether Solution - (입자의 분산안정성이 고형오구의 세척성에 미치는 영향(제1보) - Nonyl Phenol Polyoxyethylene Ether 용액 내에서 α-Fe2O3 입자의 분산안정성 -)

  • Kang, In-Sook
    • Fashion & Textile Research Journal
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    • v.4 no.1
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    • pp.86-91
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    • 2002
  • To estimate dispersion stability of particles, suspending power and particle size were examined as functions of pHs, surfactants, electrolytes and ionic strengths using ${\alpha}-Fe_2O_3$ particle as the model of particulate soil. Suspending power and particle size were determined by UV-Vis spectrumeter and by light scattering using the polarization ratio method, respectively. The suspending power was relatively high with polyanion electrolytes and was low with neutral salts. The suspending power was biphasis, minimum pH 6~7, and the effect of surfactant on the suspending power was insignificant. Generally suspending power increased with decreasing the particle size governed aggregation of dispersed particles regardless of solution conditions. Hence the suspending power was inversely related to the particle size.

Effect of Al2O3 Inter-Layer Grown on FeCrAl Alloy Foam to Improve the Dispersion and Stability of NiO Catalysts (NiO 촉매의 분산성 및 안정성 향상을 위하여 FeCrAl 합금 폼 위에 성장된 Al2O3 Inter-Layer 효과)

  • Lee, Yu-Jin;Koo, Bon-Ryul;Baek, Seong-Ho;Park, Man-Ho;Ahn, Hyo-Jin
    • Korean Journal of Materials Research
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    • v.25 no.8
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    • pp.391-397
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    • 2015
  • NiO catalysts/$Al_2O_3$/FeCrAl alloy foam for hydrogen production was prepared using atomic layer deposition (ALD) and subsequent dip-coating methods. FeCrAl alloy foam and $Al_2O_3$ inter-layer were used as catalyst supports. To improve the dispersion and stability of NiO catalysts, an $Al_2O_3$ inter-layer was introduced and their thickness was systematically controlled to 0, 20, 50 and 80 nm using an ALD technique. The structural, chemical bonding and morphological properties (including dispersion) of the NiO catalysts/$Al_2O_3$/FeCrAl alloy foam were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, field-emission scanning electron microscopy and scanning electron microscopy-energy dispersive spectroscopy. In particular, to evaluate the stability of the NiO catalysts grown on $Al_2O_3$/FeCrAl alloy foam, chronoamperometry tests were performed and then the ingredient amounts of electrolytes were analyzed via inductively coupled plasma spectrometer. We found that the introduction of $Al_2O_3$ inter-layer improved the dispersion and stability of the NiO catalysts on the supports. Thus, when an $Al_2O_3$ inter-layer with a 80 nm thickness was grown between the FeCrAl alloy foam and the NiO catalysts, it indicated improved dispersion and stability of the NiO catalysts compared to the other samples. The performance improvement can be explained by optimum thickness of $Al_2O_3$ inter-layer resulting from the role of a passivation layer.

Effect of EuO$_3$addition on hydrothermal stability of t-ZrO$_2$/Al$_2$O$_3$composites (t-ZrO$_2$/Al$_2$O$_3$복합체 상 안정성에 대한 Eu$_2$O$_3$첨가 효과)

  • 이득용;김대준;최성갑;이명현
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.10 no.3
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    • pp.233-238
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    • 2000
  • t-$ZrO_2/Al_2O_3$composites having a superior biocompatability and phase stability were prepared by adding 0~4 mol% of $Eu_2O_3$and sintered for 1 h at $1600^{\circ}C$ to evaluate phase stability, chromaticity and mechanical properties of the composites. No tetragonal to monoclinic phase transformation was observed for the composites containing $Eu_2O_3$after heat treatment for 20 h at $180^{\circ}C$ under 3.5 MPa water vapor pressure condition. As $Eu_2O_3$content increased, the color of the composites was changed from a slight white ivory to a light pink. The strength and the fracture toughness of the composites containing $Eu_2O_3$were above 620 MPa and 7.6 MPa.$m^{1/2}$, respectively, when $Eu_2O_3$was added up to 3 mol%.

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Stability of Oxidizer $H_2O_2$ for Copper CMP Slurry (구리 CMP 슬러리를 위한 산화제 $H_2O_2$의 안정성)

  • Lee, Do-Won;Kim, In-Pyo;Kim, Nam-Hoon;Kim, Sang-Yong;Seo, Yong-Jin;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.382-385
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    • 2003
  • Chemical mechanical polishing(CMP) is an essential process in the production of copper-based chips. On this work, the stability of Hydrogen Peroxide($H_2O_2$) as oxidizer of Cu CMP slurry has been investigated. $H_2O_2$ is known as the most common oxidizer in Cu CMP slurry. Copper slowly dissolves in $H_2O_2$ solutions and the interaction of $H_2O_2$ with copper surface had been studied in the literature. Because hydrogen peroxide is a weak acid in aqueous solutions, a passivation-type slurry chemistry could be achieved only with pH buffered solution.[1] Moreover, $H_2O_2$ is so unstable that its stabilization is needed using as oxidizer. As adding KOH as pH buffering agent, stability of $H_2O_2$ decreased. However, stability went up with putting in small amount of BTA as film forming agent. There was no difference of $H_2O_2$ stability between KOH and TMAH at same pH. On the other hand, $H_2O_2$ dispersion of TMAH is lower than that of KOH. Furthermore, adding $H_2O_2$ in slurry in advance of bead milling lead to better stability than adding after bead milling. Generally, various solutions of phosphoric acids result in a higher stability. Using Alumina C as abrasive was good at stabilizing for $H_2O_2$; moreover, better stability was gotten by adding $H_3PO_4$.

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Chemical Stability Evaluation of Ceramic Materials for Liquid Cadmium Cathode (액체카드뮴음금용 세라믹 소재의 화학적 안정성 평가)

  • Ku, Kwang-Mo;Ryu, Hong-Youl;Kim, Seung-Hyun;Kim, Dae-Young;Hwang, Il-Soon;Sim, Jun-Bo;Lee, Jong-Hyeon
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.11 no.1
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    • pp.23-29
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    • 2013
  • LCC (Liquid cadmium cathode) is used for electrowinning in pyroprocessing to recover uranium and transuranic elements simultaneously. It is one of the core technologies in pyroprocessing with higher proliferation resistance than a wet reprocessing because LCC-cell does not separate TRU from uranium. The crucible which holds the LCC is technically important because it should be nonconducting material to prevent deposition of metallic elements on the crucible outer surface. The chemical stability is also crucial factor to choose crucible material due to the strong reactivities of TRU and possible incorporation of Li metal during the operation. In this study, the chemical stabilities of four kinds of representative ceramic materials such as $Al_2O_3$, MgO, $Yl_2O_3$ and BeO were thermodynamically and experimentally evaluated at $500^{\circ}C$ with simulated LCC. The contact angle of LCC on ceramic materials was measured as function of time to predict chemical reactivity. $All_2O_3$ showed poorest chemical stability and the pores in BeO contributed to a decreases in contact angle. MgO and $Y_2O_3$ have superior chemical stability among the materials.

The Electrical Properties and Stability of $Pr_6$$O_{11}$-Based ZnO Varistors Doped with $Dy_2$$O_3$ ($Dy_2$$O_3$가 첨가된 $Pr_6$$O_{11}$계 ZnO 바리스터의 전기적 성질 및 안정성)

  • 남춘우;윤한수
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.5
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    • pp.402-410
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    • 2000
  • The electrical properties and stability of Pr$_{6}$/O$_{11}$-based ZnO wvaristors consisting of ZnO-Pr$_{6}$/O$_{11}$-CoO-Dy$_{2}$/O$_{3}$ based ceramics were investigated in the Dy$_{2}$/O$_{3}$ additive content range o 0.0 to 2.0 mol%. The density was nearly constant 5.62 g/cm$^3$corresponding to 97% of theoretical density as Dy$_{2}$/O$_{3}$ additive content increases up to 0.5 mol%. However the density decreased as Dy$_{2}$/O sub 3/ additive content is further additive content. Pr$_{6}$/O$_{11}$-based ZnO varistors doped with 0.5mol% Dy$_{2}$/O$_{3}$ exhibited a good nonlinearity, which is 37.76 in the nonlinear exponent and 5.36 $mutextrm{A}$ in the leakage current. And they exhibited very stress (0.80 V$_{1mA}$/9$0^{\circ}C$/12h)+(0.85 V$_{1mA}$/115$^{\circ}C$/12h)+(0.95 V$_{1mA}$/1$25^{\circ}C$/12h). Consequently it was estimated that ZnO-0.5 mol% Pr$_{6}$/O$_{11}$-1.0 mol% CoO-0.5 mol% Dy$_{2}$/O$_{3}$ based ceramics will be sufficiently used as a basic composition to develop the advanced Pr$_{6}$/O$_{11}$-based ZnO varistors in the future.he future.uture.he future.

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Thermal Stability of $MnOx-WO_3-TiO_2$ Catalysts Prepared by the Sol-gel Method for Low-temperature Selective Catalytic Reduction

  • Sin, Byeong-Gil;Lee, Hui-Su
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.10a
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    • pp.28.2-28.2
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    • 2011
  • The selective catalytic reduction (SCR) of NOx by $NH_3$ is well known as one of the most convenient, efficient, and economical method to prevent NOx emission in flue gas from stationary sources. The degradation of the reactivity is the obstacle for its real application, since high concentrations of sulfur dioxide and thermal factor would deactivate the catalyst. It is necessary to develop high stability of catalysts for low-temperature SCR. Among the transition metal oxides, $WO_3$ is known to exhibit high SCR activity and good thermal stability. The $MnOx-WO_3-TiO_2$ catalysts prepared by sol-gel method with various $WO_3$ contents were investigated for low-temperature SCR. These catalysts were observed in terms of micro-structure and spectroscopy analyses. The $WO_3$ catalyst as a promoter is used to enhance the thermal stability of catalyst since it increases the phase transition temperature of $TiO_2$ support. It was found that the addition of tungsten oxides not only maintained the temperature window of NO conversion but also increased the acid sites of catalyst.

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