• 한국정밀공학회지
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• 제34권2호
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• pp.101-106
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• 2017

The chemical mechanical planarization (CMP) process combines the chemical effect of slurry with the mechanical effect of abrasive (slurry)-wafer-pads The slurry delivery system has a notable effect on polishing results, because the slurry distribution is changed by the supply method. Thus, the investigation of slurry pumps and nozzles with regard to the slurry delivery system becomes important. This paper investigated the effect of a centrifugal slurry pump on a spray nozzle system in terms of uniform slurry supply under a rotating copper (Cu) wafer, based on experimental results and computational fluid dynamics (CFD). In conventional tools, the slurry is unevenly and discontinuously supplied to the pad, due to a pulsed flow caused by the peristaltic pump and distributed in a narrow area by the tube nozzle. Adopting the proposed slurry delivery system provides a higher uniformity and lowered shear stress than usual methods. Therefore, the newly developed slurry delivery system can improve the CMP performance.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.106-106
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• 2004

보일러에서 연소된 후 배출된 가스는 탈황목적으로 설치된 흡수탑 내에 유입되어 Slurry Spray Nozzle에서 분사된 Limestone Slurry에 의해 배기가스중의 SO$_2$를 흡수한 다음 반응조로 떨어지게 되지만 분사된 액적의 일부는 배기가스의 압력에 의하여 같은 유동 방향으로 미세한 Mist의 형태로 배기가스와 함께 흡수탑의 Outlet Duct를 통해 빠져나간다. 이 Mist(액적크기 40 $\mu\textrm{m}$이하)에는 고형 성분이 함유되어 있는데 보통 Chloride농도가 높아 탈황설비 후단 (duct, GGH, Stack)에 plugging, 부식 등의 문제를 유발하므로 Spray Header상부에서 Mist Eliminator를 설치하여 Mist를 제거하도록 한다.(중략)

• 한국분무공학회지
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• 제13권1호
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• pp.42-50
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• 2008

In the present work, atomization characteristics of shear-thinning liquid slurry discharging from fan spray nozzles were studied experimentally for spray painting applications. The effects of solid particle size and concentration on the properties (especially on the viscosity) of suspensions and mean drop size were examined by using model fluids. In the range of low particle concentration (below 3 wt%), the fluid viscosity was primarily determined by the particle size. On the other hand, in the range of high particle concentration (higher than 10 wt%), the agglomeration phenomenon and the oil absorption capability of solid particles played major roles in determining the fluid viscosity. In the high concentration region, which most of the paints belong to, the fluid became more viscous and the shear thinning behavior appeared more prominent as the particle concentration was increased. In this region, mean drop size(SMD) decreased more rapidly with the increase of the injection pressure. Also, SMD became larger with the higher particle concentration and the larger particle size.

• Design & Manufacturing
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• 제13권3호
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• pp.12-18
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• 2019

Fluid jet polishing is a method of jetting a fluid to polish a concave or free-form surface. However, the fluid jet method is difficult to form a stable polishing spot because of the lack of concentration. In order to solve this problem, MR fluid jet polishing system using an abrasive mixed with an MR fluid whose viscosity changes according to the intensity of a magnetic field is under study. MR fluid jet polishing is not easy to formulate for precise optimal conditions and material removal due to numerous fluid compositions and process conditions. Therefore, in this paper, quantitative data on the factors that have significant influence on the machining conditions are presented using various simulations and the correlation studies are conducted. In order to verify applicability of the fabricated MR fluid jet polishing system by nozzle diameter, the flow pattern and velocity distribution of MR fluid and polishing slurry of MR fluid jet polishing were analyzed by flow analysis and shear stress due to magnetic field changes was analyzed. The MR fluid of the MR fluid jet polishing and the flow pattern and velocity distribution of the polishing slurry were analyzed according to the nozzle diameter and the effects of nozzle diameter on the polishing effect were discussed. The analysis showed that the maximum shear stress was 0.45 mm at the diameter of 0.5 mm, 0.73 mm at 1.0 mm, and 1.24 mm at 1.5 mm. The cross-sectional shape is symmetrical and smooth W-shape is generated, which is consistent with typical fluid spray polishing result. Therefore, it was confirmed that the high-quality surface polishing process can be stably performed using the developed system.

• 대한기계학회논문집
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• 제15권2호
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• pp.618-629
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• 1991

The purpose of this experiment is to understand the distribution of coal particles inside CWM droplet which is believed to be a very important factor controlling the flame stability. CWM slurry is atomized by an air assisted twin fluid nozzle. An experimental rig is designed and fabricated. The mean size of coal particle distribution in CWM slurry, atomizing air pressure, coal particle loading in slurry and sampling position inside spray are main experimental variables. The atomized CWM droplets are sampled on the thin white layer of magnesium oxide by the emergency sampling shutter. The sampled coal particles on magnesium oxide layers are collected into test tubes and dispersed completely by Ultra-Sonicator. The size distribution of coal particles inside droplets are measured by Coulter Counter. The presence of coal particle inside the impressions of droplets on magnesium oxide layer are investigated by photo technique. There are quite many droplets which do not have any coal particles. Those are just water droplets, not CWM droplets. The population ratio of droplets without coal particles to toal number of droplets is strongly affected by the mean size of coal particle distribution in slurry and this ration becomes bigger number as the mean size of coal particles be larger. The size distribution of coal particles inside CWM droplets is not even and depends on the size of droplet. Experimental results show that the larger CWM droplets has droplets has bigger mean value of particle size distribution. This trend becomes more evident as the atomizing air pressure is raised and the mean size of coal particles in CWM slurry is bigger. That is, the distribution of coal particles inside CWM dropolets is very much affected by the atomizing air pressure and the mean size of pulverized coal particles in CWM slurry.