• Title/Summary/Keyword: Spin on-Glass

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Fabrication of refractive PMMA microlens array using transparent acrylic resin (투명 아크릴 레진을 이용한 초소형 PMMA 렌즈 배열의 제작)

  • Ahn, Si-Hong;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • 1999.07g
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    • pp.3316-3318
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    • 1999
  • PMMA(poly-methyl methacrylate) microlens array is fabricated using transparent acrylic resin. PMMA is commonly used material for plastic lens due to its excellent visibility larger than 90% and other optical characteristics so much close to those of glass. Orthodontic resin (DENTSPLY International Inc.), commonly used in dentistry, is an transparent acrylic resin kit including MMA liquid and polymerization powder. Their mixture results in PMMA through polymerization. Using the resin PMMA layer is formed on the substrate through spin-coating. Designed pattern of lens structure is transferred to PMMA layer by RIE (Reactive Ion Etching) with oxygen plasma. Final lens shape is formed by thermal treatment that causes PMMA to reflow, The thickness of PMMA spun on the substrate is $17{\mu}m$ that is also final sag of microlens, Designed diameters of the microlenses are $200{\mu}m$, $300{\mu}m$,and $500{\mu}m$, respectively.

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The Study on the Improved Quantum Efficiency of the PVK:Bu-PBD:C6 Single Layer Green Light Emitting Devices (PVK:Bu-PBD:C6 단일층 녹색발광소자의 양자효율 개선에 관한 연구)

  • 조재영;노병규;오환술
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.11
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    • pp.922-927
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    • 2001
  • Single-layer green ELs was fabricated with using molecularly-dispersed Bu-PBD into poly-N-vinylcarbazole(PVK) which has low operating voltage and high quantum efficiency. A EL cell structure of glass substrate/indium-tin-oxide/PVK:Bu-PBD:C6(∼ 100nm)/Ca(20nm)/Al(20nm) was employed with variable doping concentration. The keys to obtain high quantum efficiency was excellent film forming capability of molecularly dispersed into PVK and appropriate combination of cathode for avoiding exciplex. We obtained the turn-on voltage of 4.2V and quantum efficiency of 0.52% at 0.lmol% of C6 concentration which has been improved about a factor of 50 in comparison with the undoped cell. The PL peak wavelengths wouldn\`t be turned by changing the concentration of the C6 dopant. Green EL emission peak and FWHM were 520nm and 70nm respectively. PL emission peak was obtained at 495nm.

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CONDUCTIVE SnO$_2$ THIN FILM FABRICATION BY SOL-GEL METHOD

  • Lee, Seung-Chul;Lee, Jae-Ho;Kim, Young-Hwan
    • Journal of the Korean institute of surface engineering
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    • v.32 no.3
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    • pp.456-460
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    • 1999
  • Transparent conducting tin (IV) oxide thin films have been studies and developed for the electrode materials of solar cell substrate. Fabrication of tin oxide thin films by sol-gel method is process development of lower cost photovoltaic solar cell system. The research is focused on the establishment of process condition and development of precursor. The precursor solution was made of tin isopropoxide dissolved in isopropyl alcohol. The hydrolysis rate was controlled by addition of triethanolamine. Dip and spin coating technique were applied to coat tin oxide on borosilicate glass. The resistivity of the thin film was lower than 0.1Ω-cm and the transmittance is higher than 90% in a visible range.

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INVESTIGATION ON FERROMAGNETIC $Mn_{1-x}Co_{x}Pt_{3}$ ORDERED ALLOYS

  • Kaneko, T.;Fujimori, H.;Yoshida, H.;Watanabe, K.;Abe, S.;Matsumoto, M.;Yoshida, T.;Kanomata, T.
    • Journal of the Korean Magnetics Society
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    • v.5 no.5
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    • pp.758-761
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    • 1995
  • The magnetization of $Mn_{1-x}Co_{x}Pt_{3}$ ordered alloys was measured at various temperatures and the pressure effect on $T_{c}$ for X=0.25, 0.5 and 0.6 was examined. The X dependence of $T_{c}$ determined by Arott plot has a minimum near X=0.6. The field-cooling effect measurement for X=0.5 shows a reentrant spin glass behavior. It is found that there is a concentration showing no pressure dependence of $T_{c}$ between X=0.25 and 0.5. These magnetic properties are discussed with a rigid band model.

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A Study on BST Thin Films by MOD Process (MOD법에 의한 BST 박막의 특성에 대한 연구)

  • 송재훈
    • Journal of the Microelectronics and Packaging Society
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    • v.3 no.1
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    • pp.33-40
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    • 1996
  • MOD법에 의해 BST박막을 제조하고 전기적 특성을 측정함으로써 마이크로 회로에 적용가능성을 타진하였다. MOD 공정의 선구물질로서 barium neodecanoate, strontium 2-ethylhexanoate 및 titanium dimethoxy 야-2-ethylheanoate를 합성하였다, 합성된 선구물 질들을 Ba0.5Sr0.5TiO3가 되도록 화학양론적으로 혼합하여 공통용매인 p-xylene에 녹인다음 기판위에 spin coating 방법으로 박막을 형성하여 건조하고 소성하였다. 사용된 기판은 ITO/glass, Pt/SiO2/Si, Pt/Ti/SiO2/Si 및 Pt foil을 사용하였다. 소성 속도를 빨리했을 경우 소성속도를 느리게 했을때에 비하여 훨씬 균일하고 치밀한 박막을 얻을수 있었다, 여러 가 지 제조조건의 변화에 따른 유전상수 I-V 특성 및 C-V 측성 등의 전기적 특성을 측정하고 고찰하였다.

Optical Waveguiding in the Polymerized Organic Films (유기물 박막에서의 광도파 현상)

  • 박홍준;권영세
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.19 no.5
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    • pp.5-11
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    • 1982
  • The dielectric slab waveguide is fabricated on the slide glass or oxidized silicon wafer, by spin coating polyurethane, epoxy or photoresist, and the phenomenon of dielectric waveguiding is oboerved. Using the fact that the refractive index of K.P.R. is larger than that of polyurethane, thin film prism with two layered structure is fabricated, and the refraction of light is observed.

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Development of High Aperature TFT LCD Process by Organic Insulator (유기절연막을 이용한 고개구율 TFT-LCD의 공정개발)

  • 이정호;노수귀;남효락;김치우;석준형
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.04a
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    • pp.86-90
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    • 1997
  • We were evaluated from organic insulator of low dielectric constants, This organic insulator material is not only conservate TFT chanel but also used to insulator material to data line and pixel ITO electrod. This organic insulator material is possessed high platness and we can coat by Spin-On-Glass type. And we can make high aperature device because minimized black matrix width from coupling cap to data line and pixel ITO electrod, This evaluation with acryl over coat and PFCB(perflorecyclobutine) and we got good results.

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Electrical and Optical Characteristics of PLZT Thin Films in AFE region (AFE 영역 PLZT 박막의 전기 및 광학 특성)

  • 류완균;최형욱;장낙원;강종윤;백동수;박창엽
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.11a
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    • pp.1.1-4
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    • 1995
  • In this study, PLZT thin films in AFE region prepared by sol-gel processing were investigated. And PLZT stock solutions were spin-coated on ITO-glass. The PLZT thin films were annealed by RTA. Hysteresis curves, dielectric characteristics and optical transmittances were measured in order to investigates the characteristics far the thin films. The PLZT thin films were crystallized at 750$^{\circ}C$ for 5 mimutes by RTA and the rosette structure composed of perovskite observed in the thin films. In case La content was 2/90/10 antiferroelectric-ferroelectric phase boundary was 2/90/10 PLZT thin film, and its hysteresis curve was good for application of optical information storage.

Electrical and optical properties of ZnO:Ga, Al thin films prepared by sol-gel method (Sol-gel법에 의한 ZnO:Ga, Al 박막의 투명 전도막 제작과 전기 광학적 특성)

  • Nam, Gil-Mo;Kwon, Myoung-Seok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.305-306
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    • 2006
  • Ga-doped and Al-doped ZnO thin films were fabricated via a sol-gel technique and electrical and optical properties of the films were investigated. Film deposition was performed by spin coating at 4000 rpm for 30 s on $SiO_2$ glass substrate FE-SEM was used to obtain the surface morphology images and the film thickness Four-point probe and UV-VIS spectrophotometer were used to measure the sheet resistance and the optical transparency, respectively.

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The Stability and Indium Diffusion from ITO to PPV Layer of Polymer Light Emitting Devices with/without PI Blocking Layer

  • Seongjin Cho;Park, Dongkyu;Taewoo Kwon;Dongsun Yoo;Kim, Ilgon
    • Journal of Korean Vacuum Science & Technology
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    • v.6 no.1
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    • pp.51-54
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    • 2002
  • Polymer EL devices of glass/ITO/PI/MEH-PPV/Al structure were fabricated using spin coating and the Ionized Cluster Beam deposition technique. PMDA-ODA type thin polyimide films which can be used as a impurity blocking layer of EL device were deposited by ICB. According to our previous results, the packing densities of polyimide films were subject to change and depend on their deposition condition. By inserting a Pl layer with various thickness and packing density, I-V characteristics and life time of the devices were investigated to determine the role of a interlayer. The blocking of impurity diffusion from ITO to luminescent layer were confirmed by XPS.

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