Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.11a
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- Pages.305-306
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- 2006
Electrical and optical properties of ZnO:Ga, Al thin films prepared by sol-gel method
Sol-gel법에 의한 ZnO:Ga, Al 박막의 투명 전도막 제작과 전기 광학적 특성
- Nam, Gil-Mo (Department of Materials Science and Engineering, University of Seoul) ;
- Kwon, Myoung-Seok (Department of Materials Science and Engineering, University of Seoul)
- Published : 2006.11.09
Abstract
Ga-doped and Al-doped ZnO thin films were fabricated via a sol-gel technique and electrical and optical properties of the films were investigated. Film deposition was performed by spin coating at 4000 rpm for 30 s on