• Proceedings of the IEEK Conference
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• 1999.11a
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• pp.625-628
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• 1999

In this paper, we consider the problem of finding the depth of a object in two images taken with cameras. For solving this problem, we introduce a spherical concave mirror model. First, a virtual concave mirror is assumed, and then a scene is obtained by camera at two different position which are on the surface of the mirror. The depth of object is calculated from two scenes by using the spherical-mirror equation. The algorithm has been tested on a real scene containing several objects, and showed that it is more useful for farther object.

• Proceedings of the Optical Society of Korea Conference
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• 1999.08a
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• pp.128-129
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• 1999

Polygon Mirror Scanning(PMS) is composed of LED array, magnifying lens, polygon mirror and motor. It is important to correct the lens aberrations to gain the image we want to show. In this paper, we have simulated the lens aberration correction to reduce the spherical aberration . We have obtained a aspherical lens which is corrected the spherical aberration.

• Proceedings of the Optical Society of Korea Conference
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• 1991.06a
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• pp.88-89
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• 1991

For the micro-lithography using a KrF excimer laser beam(λ=0.248${\mu}{\textrm}{m}$) a mirror system consisting of four spherical surfaces with reduction magnification 5$\times$ is designed. Initially the aplanat condition of the mirror system is considered. And for the further improved performance of the system the distortion free condition and flat field condition within Seidel 3rd order aberrations are added to the above condition. During the process of designing the computer-aided optimization technique is extensively employed. The spherical aberration, coma, field curvature and distortion of the optimized four-spherical mirror system are removed to the diffraction limit, and residual astigmatism and off-axial vignetting are not corrected enough.

• Proceedings of the Optical Society of Korea Conference
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• 1991.06a
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• pp.81-87
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• 1991

A design of a four-mirror optical system for submicron lithography using KrF excimer laser beam(λ=248nm) is presented. By using the third order aberration theory, analytic solutions for a telecentric, flat-field, and anastigmatic four-spherical-mirror system (reduction magnification 5$\times$) are found. Aspherization is carried out to the spherical mirror surfaces in order to reduce the residual higher order aberrations and vignetting effect. Finally we obtain a reflection system useful in submicron lithographic application.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.5 s.236
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• pp.726-733
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• 2005

A spherical surface referenced Shack-Hartmann method is studied for inspecting machining accuracy of large concave mirror This method is so strong to the vibration environment for using as an on-machine inspection system during polishing process of large optics comparing with the interferometry. The measuring uncertainty of the system is shown as less than p-v 150 m. On-machine measured surface profile data with this method is used for feed back control of the polishing time or depth to improve the surface profile accuracy of large concave mirror. Also, the spherical surface referenced Shack-Hartmann method is useful for measuring aspheric such as parabolic or hyperbolic surface profile, comparing that the interferomehy needs a special null lens, which is to be a reference and difficult to fabricate.

• Journal of the Optical Society of Korea
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• v.13 no.2
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• pp.184-192
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• 2009

There are total eight degrees of freedom in designing a three-mirror system. If we correct four kinds of third order aberrations and the system should have the specified effective focal length, the remaining three degrees of freedom can be used for selecting a suitable configuration for a specific application. We suggest an analytic design procedure for a three-mirror telescope system which has a suitably sized secondary mirror and proper separations between mirrors, and is corrected for four kinds of third order aberrations, spherical aberration, coma, astigmatism, and field curvature. Two design examples are shown. One has a compact configuration with off-axial field, the other has relatively long configuration with annular ring field.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.3
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• pp.48-54
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• 2003

This paper deals with mirror grinding of a small-sized aspherical lens by a resin bonded diamond spherical wheel. Up to now, a spherical lens has been used for the lens of the optical communication optical part. However, recently, aspherical optical parts are mainly used in order to attempt the improvement in image quality and miniaturization of the optical device. It is possible to manufacture the aspherical lens which is presently being used in optical instrument through ultra-precision machining technology. Also, to realize compactness, efforts are being made to produce a micro aspherical lens, fur which the development of a high-precision, micro molding die is inevitable. Therefore, extensive research is being done on methods of producing a micro aspherical surface by high-precision grinding. In this paper, the spherical wheel was trued by cup-shaped truer and tool path was calculated by the radius of curvature of the wheel after truing and dressing. Then in the aspherical grinding experiment, WC material which is used as a melding die for the small-sized aspherical lens was ground. The results showed that a form accuracy of 0.1918 $\mu\textrm{m}$ P-V and a surface roughness of 0.064 $\mu\textrm{m}$ Rmax could be achieved.

• Korean Journal of Optics and Photonics
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• v.4 no.4
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• pp.373-380
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• 1993

A five mirror system with a reduction magnification(M=+1/5) is designed for DUV optical lithography. Initially, numerical solutions of all zero 3rd order aberrations and zero 5th order spherical aberration are obtained for the spherical mirror system. Next, by the optimization method, the aspherization is carried out to the two spherical mirrors to obtain a system that has as less residual aberrations, higher NA and improved MTF as possible. We have finally obtained the system of which NA is 0.45 and the resolution is about 500 cycles/mm at the 50% MTF value criterion and the depth of focus of $1.0{\mu}m$ for the nearly incoherent illumination$({\sigma}=1.0)$ and the wavelength of 0.248 m(KrF excimer laser line).

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.82-87
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• 2001

This paper deals with mirror grinding of a small-sized aspherical lens by the resin bonded diamond spherical wheel. Up to now, a spherical lens has been used for the lens of the optical communication optical part. However, recently, the aspherical optical parts are mainly used in order to attempt the improvement in image quality and miniaturization of the optical device. It is possible to manufacture the aspherical lens which is presently being used in optical instrument through ultra-precision machinery technology. Also, to realize compactability, efforts are being made to produce a micro aspherical lens, for which the development of a high-precision, micro molding die is inevitable. Therefore, extensive research is being done on methods of producing an micro aspherical surface by high-precision grinding. In this paper, the spherical wheel was trued by cup-type truer and tool path was calculated by the radius of curvature of wheel after truing and dressing. And then in the aspherical grinding experiment, WC material which is used as a molding die for the small-sized aspherical lens was ground. It results was that a form accuracy of 0.1918${\mu}m$ P-V and a surface roughness of 0.064${\mu}m$ Rmax.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.29-36
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• 2006