• 제목/요약/키워드: Spacing loss

검색결과 112건 처리시간 0.022초

Effect of slurries on the dishing of Shallow Trench Isolation structure during CMP process

  • Lee, Hoon;Lim, Dae-Soon;Lee, Sang-Ick
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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    • pp.443-444
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    • 2002
  • The uniformity of field oxide is critical to isolation property of device in STI, so the control of field oxide thickness in STI-CMP becomes enormously important. The loss of field oxide in shallow trench isolation comes mainly from dishing and erosion in STI-CMP. In this paper, the effect of slurries on the dishing was investigated with both blanket and patterned wafers were selected to measure the removal rate, selectivity and dishing amount. Dishing was a strong function of pattern spacing and types of slurries. Dishing was significantly decreased with decreasing pattern spacing for both slurries. Significantly lower dishing with ceria based slurry than with silica based slurry were achieved when narrow pattern spacing were used. Possible dishing mechanism with two different slurries were discussed based on the observed experimental results.

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Novel Raman Fiber Laser and Fiber-Optic Sensors Using Multi-Channel Fiber Gratings

  • Han, Young-Geun;Kim, Sang-Hyuck;Lee, Sang-Bae;Kim, Chang-Seok;Kang, Jin-U.;Paek, Un-Chul;Chung, Young-Joo
    • Journal of the Optical Society of Korea
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    • 제7권2호
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    • pp.97-101
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    • 2003
  • The transmission characteristics of multi-channel long period fiber gratings (LPFGs) in terms of the physical parameters like the separation distance, grating length and number of gratings will be discussed. Their transmission characteristics such as channel spacing, number of channels, loss peak depth, and channel bandwidth can be easily controlled by physical parameters. Based on the experimental results, their applications to optical multiwavelength Raman lasers and optical sensors will be investigated. A multiwavelength Raman fiber ring laser with 9 WDM channels with 100 ㎓ spacing and 19 channels with 50 ㎓ spacing using tunable multi-channel LPFGs will be experimentally demonstrated. The fiber-optic sensing applications with high resolution and sensitivity based on multi-channel LPFGs will be also presented.

다중모드 간섭결합기와 광도파로열로 구성된 저손실 NxN광도파로 격자 파장 라우터의 설계 (Design of a low loss NxN waveguide grating router composed of multimode interference couplers and arrayed waveguide grating)

  • 문성욱;정영철
    • 전자공학회논문지D
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    • 제34D권7호
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    • pp.79-87
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    • 1997
  • Untill now, the most well-known cofiguration for waveguide grating router(WGR) is composed of radiative star couplers and arrayed waveguide grating(AWG), which usually suffer form the rdiation loss of around 3dB or more. Therefore, te improved design of WGRs is needed to reduce the loss. In ths paper, we propose a novel WGR composed of multimode interference couplers which have good unifiormity, fabrication tolerance, and very low excess loss, and suggest the efficient algorithm to find the proper path length differences of AWG for given channel spacing and channel assignment to each output prot. The simulated spectral responses of the proposed WGR using the finite difference beam propagation method (BPM) show that the excess loss is less than 0.3dB and the crosstalk less than -25dB in case of 4x4 WGR, and the excess loss less than 0.4dB and the crosstalk less than -25dB in case of 8x8 WGR for all the channel wavelengths.

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고효율, 저가화 태양전지에 적합한 Ni/Cu 금속 전극 간격에 따른 특성 평가 (Investigation of the Ni/Cu metal grid space for high-effiency, low cost crystlline silicon solar cells)

  • 김민정;이지훈;조경연;이수홍
    • 한국태양에너지학회:학술대회논문집
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    • 한국태양에너지학회 2009년도 춘계학술발표대회 논문집
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    • pp.225-229
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    • 2009
  • The front metal contact is one of the most important element influences in efficiency in the silicon solar cell. First of all selective of the material and formation method is important in metal contacts. Commercial solar cells with screen-printed contacts formed by using Ag paste process is simple relatively and mass production is easy. But it suffer from a low fill factor and a high shading loss because of high contact resistance. Besides Ag paste too expensive. because of depends income. This paper applied for Ni/Cu metallization replace for paste of screen printing front metal contact. Low cost Ni and Cu metal contacts have been formed by using electroless plating and electroplating techniques to replace the screen-printed Ag contacts. Ni has been proposed as a suitable silicide for the salicidation process and is expected to replace conventional silicides. Copper is a promising material for the electrical contacts in solar cells in terms of conductivity and cost. In experiments Ni/Cu metal contact applied same grid formation of screen-printed solar cell. And it has variation of different grid spacing. It was verified that the wide spacing of grid finger could increase the series resistance also the narrow spacing of grid finger also implies a grid with a higher density of grid fingers. Through different grid spacing found alteration of efficiency.

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축류 홴의 공력-음향학적 성능 예측방법 및 매개변수 연구 (Aero-acoustic Performance Pprediction Method and Parametric Studies of Axial Flow Fan)

  • 이찬
    • 소음진동
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    • 제6권5호
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    • pp.661-669
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    • 1996
  • Proposed is an aero-acoustic performance prediction method of axial fan. The fan aerodynamic performance is predicted by combining pitch-averaged quasi 3-D flow analysis with pressure loss models for blade boundary layer and wake, secondary flow, endwall boundary layer and tip leakage flows. Fan noise is assumed to be radiated as dipole distribution type, and its generation is assumed to be mainly due to the vortex street shed from blade trailing edge. The fluctuating pressure and lift on the blade surface are analyzed by incorporating the wake vortex stree shed from blade trailing edge. The fluctuating pressure and lift on the blade surface are analyzed by incorporating the wake vortex street model with thin airfoil theory. The aero-acoustic performance prediction results by the present method are in good agreement with the measured results of several axial fans. With the present prediction method, parametric studies are carried out to investigate the effects of blade chord length and spacing on the efficiency and the noise level of fan. In the case of lightly loaded fan, both efficiency improvement and noise reduction can be achieved by decreasing chord length or by increasing blade specing. However, when fan is designed at highly loaded condition, the noise reduction by increasing blade spacing penalizes the attaninable efficiency of fan.

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배플수에 따른 원통다관형 열교환기 성능에 관한 실험 적 연구 (An Experimental Study of Shell and Tube Heat Exchanger Performance with Baffle Spacing)

  • 이육형;김순영;박명관
    • 대한기계학회논문집B
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    • 제25권12호
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    • pp.1748-1755
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    • 2001
  • The shell and tube heat exchangers were introduced to apply to a big capacity condenser and a high pressure feed water heater for power plant in the beginning of 1990s. Design and manufacturing technology fur shell and tube heat exchangers have been developed until now. But it is very difficult to calculate the expected performance characteristics of the shell and tube heat exchanger, because there are many design parameters to be considered according to internal structure and the shell side heat transfer mechanism complicately related to the design parameters. Design parameters to be considered in the design stage of shell and tube heat exchanger are shell and tube side fluids, flow rate, inlet and outlet temperature, physical properties, type of heat exchanger, outer diameter, thickness, length of tube, tube arrangement, tube pitch, permissive pressure loss on both sides, type of baffle plate, baffle cutting ratio. The propose of study is an analysis TEMA(Tubular Exchanger Manufacturers Association) E shell and tube heat exchanger performance with changing a number of baffles(3, 5, 7, 9, 11) and tubes(16, 20) and determined optimal baffle spacing.

결정질 실리콘 태양전지의 전면 전극 최적화 설계에 대한 연구

  • 유경열;백경현;백승신;이준신
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.407-407
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    • 2011
  • 태양전지에서 Fill Factor를 저하시키는 직렬저항의 성분들은 베이스저항, 에미터 저항, contact 저항, finger 저항, busbar 저항 등이 있다. 각각의 저항 성분은 전극의 width및 height, 그리고 전극과 전극 사이의 spacing을 가변함에 따라 각기 다른 값을 나타내는데, 낮은 직렬저항 값을 달성하기 위해 전극의 면적을 크게 하는 것이 바람직하지만, 이는 cell의 shading loss를 증가시켜 cell의 JSC를 저하시킨다. 그러므로 cell의 면적과 전면 에미터의 면저항을 고려하여 shading loss와 직렬저항을 최소화 하는 최적의 전면 전극의 설계가 중요하다. 본 논문에서는 시뮬레이션을 통해 전면 전극의 height, spacing 및 width를 가변하여 1 by 1, 2 by 2, 3 by 3의 cell 면적에서의 전면 전극의 설계를 최적화 하였다. 시뮬레이션 결과 각각의 cell면적에서 단위면적당 저항 값이 500 $m{\Omega}$ 이하, shading loss가 4% 미만인 전극을 설계하였다.

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성형결합기로 구성된 광도파로 격자 라우터의 설계방법에 관한 연구 (A study on design method of waveguide grating router composed of star couplers)

  • 문성욱;정영철
    • 한국통신학회논문지
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    • 제21권9호
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    • pp.2526-2532
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    • 1996
  • In this paper, the efficient algorithm for design of waveguide grating router(WGR) composed of star couplers is proposed. It is well demostrated that a star coupler design can be easily adjusted to the optimumstate using the proposed design method, which analyzes relations between various parameters. This method enables designers to estimate the spectral properties of waveguide grating router at the initial design level of the star coupler. A 5*5 WGR with 2.75nm(343GHz) channel spacing is designed using the proposed scheme. The BPM(Beam Propagation Method) simulation results show that the channel spacing of the WGR agrees very well with the design, the excess loss is smaller than 2.5dB, and the crosstalk is less than -21dB.

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차음시트의 음향투과손실 측정에 관한 연구 (A Study on the Sound Transmission Loss Measurement of Sound Isolation Sheets)

  • 이동훈;강문;이주원;정갑철;권영필
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2000년도 추계학술대회논문집
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    • pp.409-414
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    • 2000
  • A new impedance tube method is presented for the measurement of transmission loss of sound isolation sheets. The two-microphone method based on the sound decomposition theory proposed by Seybert and Ross is reviewed in this impedance tube method, which has been used for the determination of absorption coefficient of absorptive materials as well as transmission loss of automotive mufflers. Sound transmission losses for rubber, polyvinyl and asphalt sheets are measured in an impedance tube and reverberation room facility, respectively. By comparing two measurement methods, the reliability of impedance tube method used in this study is validated. From the experimental results, it is shown that the accuracy of sound isolation capability obtained by the impedance tube method depends upon the microphone spacing and the distance of the first microphone from the test sample surface.

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