• Transactions of the Society of Information Storage Systems
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• v.10 no.1
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• pp.1-6
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• 2014

Plasmonic lithography is the latest technique to overcome diffraction limit of previous optical lithography. In the plasmonic lithography, the nano gap between nano metal wave guide and photoresist should be in sub-wavelength region. SIL-based plasmonic lithography is the one of the solutions to maintain small air gap. However, the nano gap control is so sensitive that a little disturbance is able to have a large effect on the nano gap control. So, we analyzed the characteristics of disturbance, and then modified the previous controller to suppress the disturbance. We applied two peak filters which were fixed one and adaptively changeable one. We experimentally confirmed the improvement of the nano gap control, which reduced nano gap error by 30 %. The proposed control will improve the quality of lithography pattern.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.359-360
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.259-260
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• 2009

• Transactions of the Society of Information Storage Systems
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• v.6 no.2
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• pp.79-82
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• 2010

In optical imaging systems, such as microscopes, high resolution exposure systems, and optical storage devices, higher optical resolution is a requirement. One of the promising technologies that is able to satisfy this requirement with relatively simple construction and reliable performance are, solid immersion lens (SIL)-based near-field (NF) optical systems. High NA optical systems using annular apertures have been investigated as one solution to achieve higher resolutions and an extended focal depth. By applying an optimized annular aperture to convention SIL optical head resolution can be increased by approximately 20%. This novel SIL-based near-field optics will be verified through experiments such as measuring focused beam spot profiles and observing the topology of a measurement sample. The studied SIL-based near-field optics can be applicable to not only next generation optical storage device but also high resolution microscopy and pattering technologies.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.874-875
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• 2008

Gap servo NFR (Near Field Recording) system is one of technologies to reduce beam spot size by increasing NA (Numerical Aperture) of lens. To achieve high NA, SIL (Solid Immersion Lens) is used. In case of using a blue LD (405 nm) as the light source the gap distance should be controlled under 100 nm with much tighter margin. To develop NFR disc drive with very small gap distance between SIL bottom and the surface of media, we need to research for the vibration characteristics and design considerations. This paper deals with a study on vibration characteristic of NFR disc drive.

• Transactions of the Society of Information Storage Systems
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• v.2 no.4
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• pp.224-229
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• 2006

There has been studied flow to minimize the spot size to increase data capacity. Optical data storage devices are being developed near practical limits with wavelength and NA of 405nm and 0.85. There has been studied many types of next generation storage devices such as blu-ray multilayer system, probe based data storage and holographic data storage. Among these data storage devices, solid immersion lens(SIL) based near field recording (NFR) has been widely studied. In this system, SIL is the key component that focuses the laser beam with a very small size which enables ultra high data capacity. Therefore, optical performance evaluation system is required for SIL assembly. In this dissertation, a simple and accurate SIL assembly measurement method is proposed with wedge plate lateral shearing interferometer(LSI). Wedge plate LSI is cheaper than commercialized interferometer, robust to the vibration and the moving distance for phase shifting is large that is order of micrometer. We designed the thickness, wedge angle, material, surface quality and wavelength of wedge plate as 1mm, 0.02degree, fused silica, lamda/10(10-5) and 405nm, respectively. Also, we confirmed simulation and experimental results with quantitative analysis. This simple wedge plate LSI can be applied to different types of SIL such as solid immersion mirror(SIM), hemispherical, super-hemispherical and elliptical SIL.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.1031-1032
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• 2007

Gap servo NF (Near Field) system is one of technologies to reduce beam spot size by increasing NA (Numerical Aperture) of lens. To achieve higher NA, SIL (Solid Immersion Lens) is used. In the case of using a blue LD (405 nm) as the light source the gap distance should be controlled under 100 nm with much tighter margin. Because of very small gap distance between SIL bottom and the surface of media, relative tilt tolerance is limited. In this paper, we presented 2-axis tilt mechanism for skew adjustment within small tilt margin.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.4-11
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• 2005

In this paper, we propose novel optics design for media inside near-field recording (NFR) using hemispherical solid immersion lens (HMS). To obtain strong advantage of data protection and high data capacity simultaneously, HMS based near field optics using aplanatic position of super hemisphere is designed. In this design, to improve small optical tolerance of this aplanatic position, additional aspheric lens surface is added on top of the HMS and it is combined with zoom optics which composed of two single lenses having low numerical aperture (NA). Also, to compensate chromatic aberration which happens seriously in optics using blue laser diode, diffractive optical element is used. Using zoom optics, additional aspheric lens surface, and diffractive optical element together, wavefront aberration and chromatic aberration are effectively reduced in broad range of cover layer thickness and wavelength variation. In addition, In this paper, effect of gap induced aberration is investigated by analyzing different behavior of each TM and TE wave for designed media inside dual-layer NFR optics.

• Transactions of the Society of Information Storage Systems
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• v.2 no.1
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• pp.13-20
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• 2006

In this paper, we propose novel optics design for media inside near-field recording(NFR) using hemispherical solid immersion lens(HMS). To obtain strong advantage of data protection and high data capacity simultaneously, HMS based near field optics using aplanatic position of super hemisphere is designed. In this design, to improve small optical tolerance of this aplanatic position, additional aspheric lens surface is added on top of the HMS and it is combined with zoom optics which composed of two single lenses having low numerical aperture(NA). Also, to compensate chromatic aberration which happens seriously in optics using blue laser diode, diffractive optical element is used. Using zoom optics, additional aspheric lens surface, and diffractive optical element together, wavefront aberration and chromatic aberration are effectively reduced in broad range of cover layer thickness and wavelength variation. In addition, in this paper, effect of gap induced aberration is investigated by analyzing different behavior of each TM and TE wave for designed media inside dual-layer NFR optics.

• Transactions of the Society of Information Storage Systems
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• v.4 no.1
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• pp.1-5
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• 2008

Super-resolution near-field structure (super-RENS) technology and solid immersion lens (SIL) based near-field (NF) technology have been expected as promising approaches to increase data capacity or areal density of optical disc. Super-RENS technology has been studied until now using mainly numerical aperture (NA) of 0.85 far-field optical system and possibility of tangential data density increment have been presented. NF technology has been studied with NA over 1 and presented demonstration of removable performance. To achieve much higher density, approach to increase NA of super-RENS by NF technology (Near-Field Super-Resolution, NFSR) can be a candidate and we think this technology would be advantageous compared to wavelength reduction or much higher NA increment of NF technology or much smaller effective optical spot size reduction of far-field super-resolution technology. In this paper we present readout result of ROM media having monotone pits using NF optical system with wavelength of 405nm and NA of 1.84 surface type SIL. GeSbTe material was used for super resolution active layer and pit length is 37.5nm which is shorter than resolution limit 55nm. We present the feasibility of NFSR technology by confirming the CNR threshold according to readout power (Pr) and CNR 33dB over threshold Pr.