Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)

  • 2007.11a
  • /
  • Pages.1031-1032
  • /
  • 2007
  • /
  • 1598-2548(pISSN)
The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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2-axis deck mechanism for gap servo NFR system

근접장 시스템의 2 축 deck mechanism

  • 정미현 (LG 전자 디지털스토리지 연구소) ;
  • 박홍수 (LG 전자 디지털스토리지 연구소) ;
  • 이성훈 (LG 전자 디지털스토리지 연구소) ;
  • 서정교 (LG 전자 디지털스토리지 연구소) ;
  • 최인호 (LG 전자 디지털스토리지 연구소) ;
  • 민병훈 (LG 전자 디지털스토리지 연구소)
  • Published : 2007.11.15
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Abstract

Gap servo NF (Near Field) system is one of technologies to reduce beam spot size by increasing NA (Numerical Aperture) of lens. To achieve higher NA, SIL (Solid Immersion Lens) is used. In the case of using a blue LD (405 nm) as the light source the gap distance should be controlled under 100 nm with much tighter margin. Because of very small gap distance between SIL bottom and the surface of media, relative tilt tolerance is limited. In this paper, we presented 2-axis tilt mechanism for skew adjustment within small tilt margin.

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