• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.148-148
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• 2011

Recently, there have been many research activities to develop the large-area plasma source, which is able to generate the high-density plasma with relatively good uniformity, for the plasma processing in the thin-film solar cell and display panel industries. The large-area CCP sources have been applied to the PECVD process as well as the etching. Especially, the PECVD processes for the depositions of various films such as a-Si:H, ${\mu}c$-Si:H, Si3N4, and SiO2 take a significant portion of processes. In order to achieve higher deposition rate (DR), good uniformity in large-area reactor, and good film quality (low defect density, high film strength, etc.), the application of VHF (>40 MHz) CCP is indispensible. However, the electromagnetic wave effect in the VHF CCP becomes an issue to resolve for the achievement of good uniformity of plasma and film. Here, we propose a new electrode as part of a method to resolve the standing wave effect in the large-area VHF CCP. The electrode is split up a series of strip-type electrodes and the strip-type electrodes and the ground ones are arranged by turns. The standing wave effect in the longitudinal direction of the strip-type electrode is reduced by using the multi-feeding method of VHF power and the uniformity in the transverse direction of the electrodes is achieved by controlling the gas flow and the gap length between the powered electrodes and the substrate. Also, we provide the process results for the growths of the a-Si:H and the ${\mu}c$-Si:H films. The high DR (2.4 nm/s for a-Si:H film and 1.5 nm/s for the ${\mu}c$-Si:H film), the controllable crystallinity (~70%) for the ${\mu}c$-Si:H film, and the relatively good uniformity (1% for a-Si:H film and 7% for the ${\mu}c$-Si:H film) can be obtained at the high frequency of 40 MHz in the large-area discharge (280 mm${\times}$540 mm). Finally, we will discuss the issues in expanding the multi-electrode to the 8G class large-area plasma processing (2.2 m${\times}$2.4 m) and in improving the process efficiency.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.3
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• pp.556-563
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• 2020

Most of a BIPVS (Building Integrated Photovoltaic System) is installed on the rooftop or wall of a building. Therefore, the main factor to consider for selecting the installation site is the shadow effects produced by the surrounding buildings. On the other hand, when the photovoltaic was installed on soundproof walls, shadow effects were produced by not only surrounding buildings but also the surrounding trees. Therefore, a different data model and algorithm with the BIPVS case are essential for proper installation sites selection of a SIPVS (Soundproof wall Integrated Photovoltaic System). This paper deals with the DSM (Digital Surface Model)-based proper installation site analysis for SIPVS. First, the solar incident and altitude angles of the installation candidate sites (solar panel) during the year were calculated. Second, the shadow effects (shadowed or unshadowed) were determined for the candidate sites at each time with the DSM. Third, the amount of solar radiation was calculated with the incident angle for the candidate sites at an unshadowed period. The proper installation site of the SIPVS could then be selected by comparing the accumulated annual solar radiation for each candidate. The proposed algorithm was implemented as a prototype (Java program). From the experiment, the order of the installation suitability was determined among the nine candidates. The proposed algorithm could be used for proper BIPVS installation site analysis aimed at the lower part of a building and calculation of the expected power production.

• Journal of Advanced Navigation Technology
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• v.21 no.1
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• pp.99-106
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• 2017

In this paper, an energy harvesting and profiling system is designed for smart video devices in internet of things environments without dedicated power source. The energy harvesting module provides the harvested energy from solar panel to the smart video device. The energy profiling module measures the battery outflow current and the battery voltage of the smart video device and the consumed energy of processes, and calculate the harvested energy from the energy harvesting module to the smart video device and the total energy consumption of the smart video device. The accuracy of the harvested energy measured by the device energy profiling module is validated by comparing with the calculated energy using the regional solar radiation provided by Korea Meteorological Administration. Energy harvesting data from the designed energy harvesting and profiling system can be used to design the perpetual operation of smart video devices or Internet of Things sensors.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.28 no.10
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• pp.387-393
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• 2016

A ground source heat pump system maintains a constant efficiency due to its stable heat source and radiant heat temperature which provide a more effective thermal performance than that of the air source heat pump system. As an eco-friendly renewable energy source, it can reduce electric power and carbon dioxide. In this study, we analyzed one year of data from a web based remote monitoring system to estimate the thermal performance of GSHP with the capacity of 3RT, which is installed in a low energy house located in Daejeon, Korea. This GSHP system is a hybrid system connected to a solar hot water system. Cold and hot water stored in a buffer tank is supplied to six ceiling cassette type fan coil units and a floor panel heating system installed in each room. The results are as follows. First, the GSHP system was operated for ten minutes intermittently in summer in order to decrease the heat load caused by super-insulation. Second, the energy consumption in winter where the system was operated throughout the entire day was 7.5 times higher than that in summer. Moreover, the annual COP of the heating and cooling system was 4.1 in summer and 4.2 in winter, showing little difference. Third, the outlet temperature of the ground heat exchanger in winter decreased from $13^{\circ}C$ in November to $9^{\circ}C$ in February, while that in summer increased from $14^{\circ}C$ to $17^{\circ}C$ showing that the temperature change in winter is greater than that in summer.

• International Journal of Aeronautical and Space Sciences
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• v.3 no.1
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• pp.61-73
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• 2002

This paper addresses the conceptual design results of the HAUSAT-1 (Hankuk Aviation University SATellite-1), developed by Space System Research Lab. of Hankuk Aviation Univ., which is a new generation picosatellite. This project has been funded by Korean Government for the purpose of developing the space core technology. This is the first attempt at the level of university in Korea to develop the satellite weighing less than 1kg and accelerates opportunities with low construction, low launch cost space experiment platforms. The purpose of the HAUSAT-1 project is to offer graduate and undergraduate students great opportunities to be able to understand the design process of satellite development as a team member. Its mission objectives are to track its position by the GPS receiver system, to deploy the thin film solar cell panel to generate extra power, and to measure plasma density and temperature with the plasma sensor. The HAUSAT-1 will orbit at the altitude of 650 km with 65 degree inclination angle with 12 months of design mission life. It is planned to be launched on November 2003 by Russian launch vehicle "Dnepr".

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.143-146
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• 2003

Al doped Zinc Oxide(ZnO:Al) films, which is widely used as a transparent conductor in optoelectronic devices such as solar cell, liquid crystal display, plasma display panel, thermal heater, and other sensors, were prepared by using the capacitively coupled DC magnetron sputtering method. The influence of the substrate temperature, working gas pressure and discharge power on the electrical, optical and morphological properties were investigated experimentally. The consideration on the effect of doping amounts of Al on the electrical and optical properties of ZnO thin film were also carried out. ZnO:Al films with the optimum growth conditions showed resistivity of $9.42{\times}10^{-4}\;{\Omeg}-cm$ and transmittance of 90.88% for 840nm in film thickness in the wavelength range of the visible spectrum.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.425-425
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• 2008

The transparent conducting oxides(TCOs) are widely used as electrodes for most flat panel display devices(FPDs), electrodes in solar cells and organic light emitting diodes(OLED). Among them, indium oxide materials are mostly used due to its high electrical conductivity and a high transmittance in the visible spectrum. The present study reports on a study of the electrical and optical properties of IGZO thin films prepared on glass and PET substrates by the combinational magnetron sputtering. We use the targets of IZO and Ga2O3 for the deposition process. In some case the deposition process is coupled with the End-Hall ion-beam treatment onto the substrates before the sputtering. In addition we control the deposition rate to optimize the film quality and to minimize the surface roughness. Then we investigate the effects of the Ar gas pressure and RF power during the sputtering process upon the electrical, optical and morphological properties of thin films. The properties of prepared IGZO thin films have been analyzed by using the XRD, AFM, a-step, 4-point probe, and UV spectrophotometer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.408-411
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• 2003

Al doped Zinc Oxide(ZnO:Al) films, which is widely used as a transparent conductor in optoelectronic devices such as solar cell, liquid crystal display, plasma display panel, thermal heater, and other sensors, were prepared by using the capacitively coupled DC magnetron sputtering method. The influence of the substrate temperature, working gas pressure, discharge power and doping amounts of Al on the electrical, optical and morphological properties were investigated experimentally. The effect of bias voltage on the electrical properties of ZnO thin film were also studied. Films with lowest resistivity of $5.4{\times}10^{-4}\;{\Omega}-cm$ have been achieved in case of films deposited at 1mtorr, $400^{\circ}C$ with a substrate bias of +10V for 840nm in film thickness.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.146-147
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• 2011

Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.

• Journal of Bio-Environment Control
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• v.26 no.4
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• pp.353-360
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• 2017

In this study, the design and performance test of the air to water heat pump capable of producing hot water for greenhouse heating by using the surplus solar heat inside the greenhouse and the air heat outside greenhouse as the selective heat source were conducted. The heat storage operations using the surplus solar heat and the outside air heat were designed to be switched according to the setting temperature of the greenhouse in consideration of the optimum temperature range of the crop. In the developed system, it was possible to automatically control the switching of heat storage operation, heating and ventilation by setting 12 reference temperatures on the control panel. In the selective heat storage operation with the surplus solar heat and outside air heat, the temperature of thermal storage tank was controlled variably from $35^{\circ}C$ to $52^{\circ}C$ according to the heat storage rate and heating load. The heat storage operation times using the surplus solar heat and outside air heat were 23.1% and 30.7% of the experimental time respectively and the heat pump pause time was 46.2%. COP(coefficient of performance) of the heat pump of the heat storage operation using the surplus solar heat and outside air heat were 3.83 and 2.77 respectively and was 3.24 for whole selective heat storage operation. For the comparative experiment, the heat storage operation using the outside air heat only was performed under the condition that the temperature of the thermal storage tank was controlled constantly from 50 to $52^{\circ}C$, and COP was analyzed to be 2.33. As a result, it was confirmed that the COP of the heat storage operation using the surplus solar heat and outside air heat as selective heat source and the variable temperature control of the thermal storage tank was 39% higher than that of the general heat storage operation using the outside air heat only and the constant temperature control of the thermal storage tank.