The effect of $O_2$ flow rate on die characteristics of ATO Thin Films by RF Magnetron Sputtering
(RF Magnetron Sputtering을 이용한 ATO 박막의 산소 유량에 따른 특성 변화)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2007.11a
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- pp.336-337
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- 2007