Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Heterostructures of SnO2-Decorated Cr2O3 Nanorods for Highly Sensitive H2S Detection

고감도 H2S 감지를 위한 SnO2 장식된 Cr2O3 nanorods 이종구조

  • Jae Han Chung (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • Yun-Haeng Cho (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • Junho Hwang (Department of Materials Science and Engineering, Yonsei University) ;
  • Su hyeong Lee (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • Seunggi Lee (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • See-Hyung Park (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education) ;
  • Sungwoo Sohn (Department of Materials Science and Engineering, Yonsei University) ;
  • Donghwi Cho (Thin Film Materials Research Center, Korea Research Institute of Chemical Technology) ;
  • Kwangjae Lee (Department of Information Security EngineeringSangmyung University) ;
  • Young-Seok Shim (School of Energy, Materials and Chemical Engineering, Korea University of Technology and Education)
  • 정재한 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 조윤행 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 황준호 (연세대학교 신소재공학과) ;
  • 이수형 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 이승기 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 박시형 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 손성우 (연세대학교 신소재공학과) ;
  • 조동휘 (한국화학연구원 박막재료연구센터) ;
  • 이광재 (상명대학교 정보보안공학과) ;
  • 심영석 (한국기술교육대학교 에너지신소재화학공학부)
  • Received : 2024.01.12
  • Accepted : 2024.01.22
  • Published : 2024.01.31
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Abstract

The creation of vertically aligned one-dimensional (1D) nanostructures through the decoration of n-type tin oxide (SnO2) on p-type chromium oxide (Cr2O3) constitutes an effective strategy for enhancing gas sensing performance. These heterostructures are deposited in multiple stages using a glancing angle deposition technique with an electron beam evaporator, resulting in a reduction in the surface porosity of the nanorods as SnO2 is incorporated. In comparison to Cr2O3 films, the bare Cr2O3 nanorods exhibits a response 3.3 times greater to 50 ppm H2S at 300℃, while the SnO2-decorated Cr2O3 nanorods demonstrate an eleven-fold increase in response. Furthermore, when subjected to various gases (CH4, H2S, CO2, H2), a notable selectivity toward H2S is observed. This study paves the way for the development of p-type semiconductor sensors with heightened selectivity and sensitivity towards H2S, thus advancing the prospects of gas sensor technology.

Keywords

Acknowledgement

본 논문은 2023년도 교육부의 재원으로 한국연구재단의 지원을 받아 수행된 지자체-대학 협력기반 지역혁신 사업의 결과입니다.(2021RIS-004) 본 논문은 한국기술교육대학교 산학협력단 공용장비센터의 지원으로 연구되었음

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