• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.25 no.5
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• pp.233-239
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• 2013

The Thermophysical properties of thermal conductivity, viscosity, and heat capacity for $CO_2$ slurry ($CO_2$ gas and $CO_2$-hydrate mixture) having a high gas phase volume fraction were predicted using the conventional mixture models and the TRAPP model under hydrate formation conditions. Based on the calculated thermophysical properties, the heat transfer coefficient and pressure drop of the $CO_2$ slurry in the tube were predicted. The thermal conductivity of $CO_2$ slurry ranged from 0.02 to 0.2 W/m-K, and the mixture viscosity was larger than that of pure $CO_2$ by 1.9~2.7 times. The heat capacity of $CO_2$ slurry ranged from 63 to 68% of that for pure $CO_2$. The predicted heat transfer coefficient of $CO_2$ slurry was 6 times higher than that of pure $CO_2$. In the separate model, the estimated pressure drop increased with an increase of $CO_2$-hydrate mole fraction, and was 60% of that of pure $CO_2$.

• Journal of Korea Foundry Society
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• v.27 no.1
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• pp.31-35
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• 2007

In order to develop the semi-solid forming technology for magnesium alloy the rheological and thixotropic behavior of Mg alloy slurry with varying shear rates and cooling rates was investigated and simulated with considering the viscosity based on microstructures and processing variables. The viscosity of slurry of Mg alloy (AZ91D) in semi-solid region was exponentially increased with a solid fraction, and was decreased with increasing a shear rate. In order to analyze precisely the rheological behavior, the ANYCAST program modified with the Carreau model and the different heat transfer coefficient between the cast and mold was used to simulate the flow behavior of Mg semi-solid slurry during the injection into a casting mold in a high pressure diecasting machine. The simulated rheological behavior of Mg alloy slurry was matched well with the experimental results.

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.6
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• pp.962-971
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• 2004

This paper has dealt with thermo-physical properties of microencapsulated phase change material slurry as a latent heat storage material having a low melting point. The measured results of the thermo-physical properties of the test microencapsulated phase change material slurry, those are, density, specific heat, thermal conductivity and viscosity, were discussed for the temperature region of solid and liquid phases of the dispersion material (paraffin). The measurements of these properties of microencapsulated phase change material slurry have been carried out by using a specific-gravity meter, a water calorimeter, a differential scanning calorimeter(DSC), a transient hot wire method and rotating type viscometer, respectively. It was clarified that the additional properties law could be applied to the estimation of the density and specific heat of microencapsulated phase change material slurry and also the Euckens equation could be applied to the estimation of the thermal conductivity of this slurry.

• Journal of the Korean Ceramic Society
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• v.53 no.5
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• pp.557-562
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• 2016

Pyrophyllite granule powders for thermal spray coating were successfully prepared through spray drying process. To produce a stable slurry, commercial pyrophyllite powder of $45{\mu}m$ in size was ball-milled for reduction of the size to $2{\sim}3{\mu}m$ and a dispersant was added to control the viscosity. Dense and spherical granules (average granule size : $59{\mu}m$) were prepared under conditions of 12,500 rpm for rotation velocity of the atomizer and 100 cps for slurry viscosity. The granules were then heat treated at $1,200^{\circ}C$ for proper handling strength and flow properties. The final granules had an apparent density of $0.725g/cm^3$ and a flow rate of 2.5 g/sec, which represent excellent properties to be used as the granule powder for thermal spray coatings.

• Transactions of Materials Processing
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• v.31 no.5
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• pp.290-295
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• 2022

Recently, the use of high-tech ceramic parts in functional electronic parts, automobile parts and semiconductor equipment parts is increasing. These ceramics materials are required to have high reproducibility, reliability, large size and complex shapes. The researchers initiated the work to develop a new shaping method called gel casting, which allows high performance ceramic materials with a complex shape to be produced. The manufacturing process parameters of gel casting include uniform mixing of the initiator, bubble removal, and slip injection. In this study, we analyzed the dispersion and gelation characteristics according to the change in the additive content of the alumina slurry in the gel casting process. The alumina slurry for gel casting was prepared by mixing a solvent, a monomer and a dispersant through a ball mill. Alumina powder and a gelation initiator were added to the mixed solution, and ball milling was performed for 24 hours. A viscosity of 6,435 cps and a stable zeta potential value were obtained under the conditions of alumina powder content of 55 vol% and dispersant 2.0 wt%. After curing for 12 hours by adding aps 0.1wt%, TEMED 0.2wt%, and Monomer 3, 5wt%, it was possible to separate from the molding cup, confirming that the gelation was completed.

• Clean Technology
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• v.12 no.4
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• pp.232-237
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• 2006

The zinc-based desulfurization sorbents for a fluidized-bed system were prepared by a spray drying method and the effects of the pH and viscosity of the slurry on the attrition resistance of the prepared sorbents were investigated in this work. In order to improve the attrition resistance, alumina sol was used for an inorganic binder and pH of the slurry was changed for its better dispersion in slurry. The attrition resistance of the prepared sorbents decreased due to the phase transition of alumina sol to gel as the slurry pH increased to its basicity. The optimum pH condition for the good attrition resistance of the sorbents was about 6.0 in this study. It was confirmed that the attrition property of the sorbents were varied with the viscosity of the slurry. The attrition resistance of the sorbents prepared by the spray drying method increased as their bulk density increased, while it decreased as the surface area and porosity of the sorbents. The optimum viscosity for the high attrition was in the range 400-500 cP.

• Korean Chemical Engineering Research
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• v.49 no.1
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• pp.83-88
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• 2011

Holdup characteristics of small bubbles were investigated in a viscous slurry bubble column. The phase holdup of small bubbles was obtained from the knowledge of total bubble(gas) holdup and large bubble holdup, which were measured by mean of static pressure drop method and dual resistivity probe method, respectively. Effects of gas velocity, viscosity of continuous liquid phase and solid fraction in the slurry phase on the small bubble holdup as well as holdups of total bubble(gas) and large bubble in a viscous slurry bubble column. The small bubble holdup increased with increasing gas velocity but decreased with increasing liquid viscosity or solid fraction in the slurry phase. In addition the fraction of small bubble in the total bubble(gas) holdup increased with increasing gas velocity but decreased with increasing liquid viscosity or solid fraction in the slurry phase. It was revealed that the rising velocity of large bubble did not related to the holdup of small bubble in a viscous slurry bubble column.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.120-124
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• 2004

본 연구는 Diluted Ceria 입자를 사용한 $SiO_2$(Oxide) CMP 현상에 대한 내용이다. Ceria Slurry의 경우 Silica Slurry와 비교하였을 때 Oxide Wafer 표면과 축합 화학반응을 일으키며 Chemistry Dominant한 CMP Mechanism을 따르고, Wafer Center Removal Rate(RR) Fast 의 특성을 가진다. Ceria Slurry의 문제점인 연마 불균일도를 해결하기 위해 Tribological System을 이용하였다. CMP Tribology는 Pad-Slurry 유막-Wafer의 System을 가지며 윤활막에 작용하는 마찰계수(COF)가 주요 인자이다. Tribology에 적용되는 Stribeck Curve를 통해 Slurry 윤활막의 두께(h) 정도를 예상할 수 있으며, 이 윤활막의 두께를 조절함으로써 Uniformity 향상이 가능하다. 이 Ceria Slurry CMP의 연마 불균일도를 향상시킬 수 있는 방법으로 pH 조절 및 점도 증가가 있다. Ceria 입자 CMP는 분산액의 pH 변화에 강한 작용을 받게 되며 PH5 근방에서 최적화된 Uniformity가 가능하다. 점도를 증가시키는 경우 유막 h가 증가하게 되어 Ceria Slurry의 유동이 균일 분포 상태에 가까워지며 Wafer Uniformity 향상이 가능하다.

• Journal of Korean Tunnelling and Underground Space Association
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• v.20 no.5
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• pp.773-786
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• 2018

In this paper, viscosity features of sealant (bentonite-cement slurry), which is used for umbrella arch method in tunnel, were studied. The sealant must secure optimal strength and capacity for the waterproof and stabilization of borehole as well as to satisfy groutability. In this study, the variation of viscosity was measured with different mixing processes. With an increase of initial mixing period with water and bentonite mixture, the required time for the rapid increase of viscosity of the sealant is shorten. With increase of mixing period, the possibility of swelling of bentonite will increases and this can lead increase of the viscosity of the mixture. In addition, the behaviors of sealant vary with a drastic increase of the viscosity: thixotropy and rheopexy. Furthermore, the bentonite/water mixing period influences on the bleeding features of the sealant. Further study is required to introduce the guideline, which can be applicable in the field in the aspect of required capacity of the sealants and mixing processes of the ingredients.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.37.2-37.2
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• 2011

반도체공정에서 Photo-lithography는 특정 광원을 사용하여 구현하고자 하는 패턴을 기판상에 형성하는 기술이다. 이러한 Photo-lithography 공정에서는 패턴이 형성되어 있는 마스크가 핵심적인 역할을 하며 반도체소자의 전체적인 성능을 결정한다. 이에 따라 Photo-lithography용 마스크에 사용되는 Blank 마스크는 Defect의 최소화 및 우수한 평탄도 등의 조건들이 요구되고 있다. 이러한 Blank 마스크 재료로 광원을 효율적으로 투과시키는 성질이 우수하고 다른 재료에 비해 열팽창계수가 작은 석영기판이 사용되고 있다. 석영 기반의 마스크는 UV Lithography에서 주로 사용되고 있으며 그 밖에 UV-NIL (Nano Imrpint Lithography), EUVL (Extreme Ultra Violet Lithography) 등에도 이용되고 있다. 석영기판을 가공하여 Blank 마스크로 제작하기 위해 석영기판의 Lapping/Polishing 등이 핵심기술이며 현재 일본에서 전량 수입에 의존하고 있어, 이에 대한 연구의 필요성이 절실한 상황이다. 본 연구에서는 Blank 마스크제작을 위한 석영기판의 Polishing 공정에 사용되는 Ceria Slurry의 특성 연구 및 이에 따른 연마평가를 실시하였으며 첨가제의 조건에 따른 pH/Viscosity/Stability 등의 물리적인 특성을 관찰하여 석영기판 Polishing에 효율적인 Ceria slurry의 최적조건을 도출했다. 또한, 조건에 따른 Slurry의 정확한 분석을 위해 Zeta Potential Analyzer를 이용하여 연마입자의 크기 및 Zeta Potential에 대한 평가를 실시한 후 연마제와 석영기판의 Interaction force를 측정하였다. 상기 실험에 의해 얻어진 최적화된 연마 공정 조건하에서 Ceria slurry를 사용하여 연마평가를 실시함으로써 Removal Rate/Roughness 등의 결과를 관찰하였다. 본 연구를 통해 반도체 photo mask 제작을 위한 Ceria slurry의 주요특성을 파악하고 석영기판의 Polishing에 효율적인 조건을 도출함으로써 Lithography 마스크를 효율적으로 제작할 수 있을 것으로 예상된다.