• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.3
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• pp.175-184
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• 2001

In this study, the improved throughput and stability in device fabrication could be obtained by applying CMP process to STi structue in 0.18 um semiconductor device. To employ the CMP process in STI structure, the Reverse Moat Process used to be added after STI Fill, as a result, the process became more complex and the defect were seriously increased than they had been,. Removal rate of each thin film in STI CMP was not uniform, so, the device must have been affected. That is, in case of excessive CMP, the damage on the active area was occurred, and in the case of insufficient CMP nitride remaining was happened on that area. Both of them deteriorated device characteristics. As a solution to these problems, the development of slurry having high removal rate and high oxide to nitride selectivity has been studied. The process using this slurry afford low defect levels, improved yield, and a simplified process flow. In this study, we evaluated the 'High Selectivity Slurry' to do a global planarization without reverse moat step, and also we evaluated EPD(Eend Point Detection) system with which 'in-situ end point detection' is possible.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.2
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• pp.142-149
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• 2004

Recently, the government introduced the thermal storage system for reducing the electric power load. Especially, the ice slurry type has gained lots of interest due to its good heat transfer and flowing characteristics. This study was peformed to understand the effects of transporting ice slurry through elbows of various angle. Propylene glycol water solution was used and about 2 mm ice particles were circulated. The experiments were carried out under various conditions, such as concentration and velocity of water solution ranging between 0∼20 wt％, 1.5∼2.5 m/s, respectively. And elbows with 4 different angles of 30$^{\circ}$, 45$^{\circ}$, 90$^{\circ}$, 180$^{\circ}$. The differential pressure and IPF (ice packing factor) between the pipe entry and exit were measured. The tendency of pressure loss and outlet IPF in elbow is that the pressure loss was reduced as concentration and flow velocity of water solution is increased, and low value appeared at 10 wt％ and 2.5 m/s. The variation of outlet IPF was compared with the inlet IPF in the range of $\pm$20％.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.19 no.9
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• pp.647-653
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• 2007

In dynamic ice storage system(DISS), ice slurry is formed not only from solution freezing by mechanical removing parts but also supercooled solution. However, in order to perform continuous ice formation in the system without mechanical moving parts, supercooled aqueous solution should be formed stable through cooling heat exchanger and be dissolved uniformly in storage tank. In previous study, the time of ice slurry increased as the pressure of the cooling heat exchanger(PHX) increased. In this study, a cooling experiment of an ethylene glycol 7mass% solution was performed with various inlet temperature of the PHX, which has constant brine inlet temperature of $-7^{\circ}C$. The temperature in the storage tank maintained to freezing point of the solution. At results, the time of ice slurry formation increased as the supercooling degree decreased and the cooling rate increased.

• Journal of Navigation and Port Research
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• v.34 no.1
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• pp.71-75
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• 2010

This study is experimented to observe an influence of experimental conditions on production characteristics of slurry ice by injection operating water to cooling plate. And at this experiment it used ethylene glycol-water solution and the concentration is 10 to 20wt%. The experimental apparatus was constructed of ethylene glycol-water solution and slurry ice storage tank, brine tank, pumps for ethylene glycol-water solution and brine circulating, a mass flow-meter, data logger for fluid temperature measuring and a vertical circular tube with single copper plate as test section. The experiments were carried out under various conditions, with mean velocity of fluid at the entry ranging from 1.0 to 2.0m/s and the cooling temperature of $-17^{\circ}C$ to $-10^{\circ}C$.

• Journal of Animal Environmental Science
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• v.19 no.1
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• pp.47-54
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• 2013

Two types of reactors were set to investigate the change of characteristics of pig slurry by aeration during fertilization period. One system was equipped with air diffuser to supply oxygen to pig slurry for liquid fertilization, but there was no air diffuser in the other system. Air supply to the experimental systems was regulated by air flow meter. The reactors were set up in the laboratory to protect the pig slurry from external condition such as temperature and humidity changes. Maintaining optimal pH range in the experimental reactors is an important factor for liquid fertilization of pig slurry. In this study, pH ranges of aerobic reactor and anoxic reactor was 7.04~7.19 and 7.34~7.81, respectively. The temperature of aerobic reactors was $2{\sim}3^{\circ}C$ higher then indoor temperature. The amount of sludge accumulated at the bottom layer of non-aerated reactors was 4~5 times more than that of aerated reactors.

• 한국지구물리탐사학회:학술대회논문집
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• 2003.11a
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• pp.142-149
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• 2003

Blind hydraulic backfilling is a commonly used technique for subsidence control of the strata over unapproachable waterlogged underground excavations. In this investigation model studies on all the three variants of this technique, namely, hydro-pneumatic or air-assisted gravity backfilling, pumped-slurry backfilling and simple gravity backfilling, have been carried out in fully transparent models of the underground excavations. On examination of the filling process, it was revealed that in all the three cases, the basic process of filling occurs by sand transport along one or more meandering channels. The relative influence of sand, water and air flow rates on the area of filling from a single inlet point and the hydraulic pressure loss per unit length were studied in details. In hydro-pneumatic backfilling process, the air bubbles while moving upward through the meandering channels provide an additional buoyant force over and above the available hydraulic head. In this way the area of filling from a single borehole may be quite large even at small flow rates of water. During actual field implementation the injected air, if not released completely from the rise side holes, may cause troubles by way of creating potholes on the surface. The pumped-slurry technique has shown its capability of filling a relatively larger area at faster rate, especially when high-volume, low-pressure method was selected. But simple gravity filling was also found to be equally effective method as slurry pumping, especially when flow rates were high. In the second and third method discussed above, examination of variations of injection pressure was also done and its relation with physical phenomenon was also attempted. Some empirical relationships were also developed using multivariate regression with a view to help the practicing engineers.

• Journal of Korean Tunnelling and Underground Space Association
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• v.13 no.4
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• pp.347-370
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• 2011

Slurry type shield would be very effective for the tunnelling in a sandy ground, when the slurry pressure would be properly adjusted. Low slurry pressure could cause a tunnel face failure or a ground settlement in front of the tunnel face. Thus, the stability of tunnel face could be maintained by applying an excess slurry pressure that is larger than the active earth pressure. However, the slurry pressure should increase properly because an excessively high slurry pressure could cause the slurry flow out or the passive failure of the frontal ground. It is possible to apply the high slurry pressure without passive failure if a horizontal impermeable layer is located in the ground in front of the tunnel face, but its location, size, and effects are not clearly known yet. In this research, two-dimensional model tests were carried out in order to find out the effect of a horizontal impermeable layer for the slurry shield tunnelling in a saturated sandy ground. In tests slurry pressure was increased until the slurry flowed out of the ground surface or the ground fails. Location and dimension of the impermeable layer were varied. As results, the maximum and the excess slurry pressure in sandy ground were linearly proportional to the cover depth. Larger slurry pressure could be applied to increase the stability of the tunnel face when the impermeable layer was located in the ground above the crown in front of the tunnel face. The most effective length of the impermeable grouting layer was 1.0 ~ 1.5D, and the location was 1.0D above the crown level. The safety factor could be suggested as the ratio of the maximum slurry pressure to the active earth pressure at the tunnel face. It could also be suggested that the slurry pressure in the magnitude of 3.5 ~4.0 times larger than the active earth pressure at the initial tunnel face could be applied if the impermeable layer was constructed at the optimal location.

• New & Renewable Energy
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• v.9 no.3
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• pp.20-28
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• 2013

The gasification process has developed to convert coal into the more useful energy and material since decades. Despite the numberous design of ones, entrained flow gasifier of the major companies has had an advantage on the market. Because it has a merit of full-scale and high performance plant. In this paper, the gasification technologies of GE energy, Phillips, Siemens and Shell have been reviewed to compare their characteristics and a high performance gasification process was suggested. And the simulation model of gasifiers using Aspen Plus offered the quantitative comparison data for difference designs. The simulation results revealed the poor performance of the slurry feed than dry design. The corresponding cold gas efficiency of 77% is much lower than the 80.3% for the dry feed cases. The exergy analysis of the difference syngas quenching system showed that chemical quenching is superior to another. The results of analysis recommend the two stage gasifier with dry multi-feeder as the energy effective design.

• Journal of Soil and Groundwater Environment
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• v.6 no.2
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• pp.57-67
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• 2001

The purpose of this study is to predict appropriate leachate rates and leachate transport velocity through weathered zone and basement rock on the transient condition at Nanji waste landfill. The leachate transport in the Nanji waste landfill is analyzed using MODFLOW(A Modular 3-D Finite Different Groundwater Flow Model) model which simulates three dimension groundwater flow and MT3D(A Modular Three Dimentional Transport Model) model which describes three dimensional transport for advection, dispersion and chemical reaction of dissolved constituents in groundwater system on the transient condition. Leachate production rates are estimated by HELP(Hydraulical Evaluation of Landfill Performance) model and used weather records for recent 10 years. Leachate transport is predicted by a change of leachate level to after/before established HDPE, established slurry wall and wells.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.3 s.234
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• pp.432-438
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• 2005

CMP characteristics such as material removal rate and edge effect were measured and investigated in accordance with pad grooving effect, groove width, depth and pitch. GSQ (Groove Stiffness Quotient) and GFQ (Groove Flow Quotient) were proposed to estimate pad grooving characteristics. GSQ is defined as groove depth(D) divided by pad thickness(T) and GFQ is defined as groove width(W) divided by groove pitch(P). As GFQ value increased, material removal rate increased some point but gradually saturated. It seems that material removal rate is not affected by each parameter respectively but by interaction of these parameters such as groove dimensions. In addition, an increase in GFQ and GSQ causes edge effect to be improved. Because, pad stiffness decreases as GSQ and GFQ increase. In conclusion, groove influences relative pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. The change of groove dimensions has influence on pad stiffness and slurry flow, so that polishing results such as removal rate and edge effect become changed.