• 한국전기전자재료학회논문지
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• 제14권3호
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• pp.175-184
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• 2001

In this study, the improved throughput and stability in device fabrication could be obtained by applying CMP process to STi structue in 0.18 um semiconductor device. To employ the CMP process in STI structure, the Reverse Moat Process used to be added after STI Fill, as a result, the process became more complex and the defect were seriously increased than they had been,. Removal rate of each thin film in STI CMP was not uniform, so, the device must have been affected. That is, in case of excessive CMP, the damage on the active area was occurred, and in the case of insufficient CMP nitride remaining was happened on that area. Both of them deteriorated device characteristics. As a solution to these problems, the development of slurry having high removal rate and high oxide to nitride selectivity has been studied. The process using this slurry afford low defect levels, improved yield, and a simplified process flow. In this study, we evaluated the 'High Selectivity Slurry' to do a global planarization without reverse moat step, and also we evaluated EPD(Eend Point Detection) system with which 'in-situ end point detection' is possible.

• 설비공학논문집
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• 제16권2호
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• pp.142-149
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• 2004

Recently, the government introduced the thermal storage system for reducing the electric power load. Especially, the ice slurry type has gained lots of interest due to its good heat transfer and flowing characteristics. This study was peformed to understand the effects of transporting ice slurry through elbows of various angle. Propylene glycol water solution was used and about 2 mm ice particles were circulated. The experiments were carried out under various conditions, such as concentration and velocity of water solution ranging between 0∼20 wt％, 1.5∼2.5 m/s, respectively. And elbows with 4 different angles of 30$^{\circ}$, 45$^{\circ}$, 90$^{\circ}$, 180$^{\circ}$. The differential pressure and IPF (ice packing factor) between the pipe entry and exit were measured. The tendency of pressure loss and outlet IPF in elbow is that the pressure loss was reduced as concentration and flow velocity of water solution is increased, and low value appeared at 10 wt％ and 2.5 m/s. The variation of outlet IPF was compared with the inlet IPF in the range of $\pm$20％.

• 설비공학논문집
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• 제19권9호
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• pp.647-653
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• 2007

In dynamic ice storage system(DISS), ice slurry is formed not only from solution freezing by mechanical removing parts but also supercooled solution. However, in order to perform continuous ice formation in the system without mechanical moving parts, supercooled aqueous solution should be formed stable through cooling heat exchanger and be dissolved uniformly in storage tank. In previous study, the time of ice slurry increased as the pressure of the cooling heat exchanger(PHX) increased. In this study, a cooling experiment of an ethylene glycol 7mass% solution was performed with various inlet temperature of the PHX, which has constant brine inlet temperature of $-7^{\circ}C$. The temperature in the storage tank maintained to freezing point of the solution. At results, the time of ice slurry formation increased as the supercooling degree decreased and the cooling rate increased.

• 한국항해항만학회지
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• 제34권1호
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• pp.71-75
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• 2010

아이스슬러리의 생성을 위하여 냉각평판에 작동수를 분사하는 실험을 수행하여 그에 대한 영향에 대하여 영향을 평가하였다. 실험에 사용된 에틸렌글리콜 수용액은 10~20wt%의 수용액을 사용하였다. 실험장치는 슬러리아이스 저장탱크, 브라인 탱크, 브라인 순환장치, 유량계 및 온도기록계로 구성되어 있다. 실험조건은 평균유속 1.0~2.0m/s, 냉각온도 $-17{\sim}-10^{\circ}C$의 조건 하에 실험을 수행하였다.

• 한국축산시설환경학회지
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• 제19권1호
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• pp.47-54
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• 2013

Two types of reactors were set to investigate the change of characteristics of pig slurry by aeration during fertilization period. One system was equipped with air diffuser to supply oxygen to pig slurry for liquid fertilization, but there was no air diffuser in the other system. Air supply to the experimental systems was regulated by air flow meter. The reactors were set up in the laboratory to protect the pig slurry from external condition such as temperature and humidity changes. Maintaining optimal pH range in the experimental reactors is an important factor for liquid fertilization of pig slurry. In this study, pH ranges of aerobic reactor and anoxic reactor was 7.04~7.19 and 7.34~7.81, respectively. The temperature of aerobic reactors was $2{\sim}3^{\circ}C$ higher then indoor temperature. The amount of sludge accumulated at the bottom layer of non-aerated reactors was 4~5 times more than that of aerated reactors.

• 한국지구물리탐사학회:학술대회논문집
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• 한국지구물리탐사학회 2003년도 Proceedings of the international symposium on the fusion technology
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• pp.142-149
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• 2003

Blind hydraulic backfilling is a commonly used technique for subsidence control of the strata over unapproachable waterlogged underground excavations. In this investigation model studies on all the three variants of this technique, namely, hydro-pneumatic or air-assisted gravity backfilling, pumped-slurry backfilling and simple gravity backfilling, have been carried out in fully transparent models of the underground excavations. On examination of the filling process, it was revealed that in all the three cases, the basic process of filling occurs by sand transport along one or more meandering channels. The relative influence of sand, water and air flow rates on the area of filling from a single inlet point and the hydraulic pressure loss per unit length were studied in details. In hydro-pneumatic backfilling process, the air bubbles while moving upward through the meandering channels provide an additional buoyant force over and above the available hydraulic head. In this way the area of filling from a single borehole may be quite large even at small flow rates of water. During actual field implementation the injected air, if not released completely from the rise side holes, may cause troubles by way of creating potholes on the surface. The pumped-slurry technique has shown its capability of filling a relatively larger area at faster rate, especially when high-volume, low-pressure method was selected. But simple gravity filling was also found to be equally effective method as slurry pumping, especially when flow rates were high. In the second and third method discussed above, examination of variations of injection pressure was also done and its relation with physical phenomenon was also attempted. Some empirical relationships were also developed using multivariate regression with a view to help the practicing engineers.

• 한국터널지하공간학회 논문집
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• 제13권4호
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• pp.347-370
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• 2011

이수가압식 쉴드공법은 이수압을 적정 수준으로 관리하면 특히 사질토에서 적용성이 우수하지만, 이수압이 낮으면 이수 유출 및 지반변형이 발생하기도 한다. 따라서 이수가압식 쉴드공법에서는 초기 막장압보다 큰 초과 이수압을 가하여 막장의 안정을 유지한다. 그러나 이수압이 너무 높으면 전방 지반의 수동 파괴를 유발하므로 전방 지반의 수동 파괴 위험성을 배제하고 이수압을 증가시키는 방법으로 막장 전방에 수평 차수층을 설치하는 방안이 있으나 그 위치와 규모 및 효과가 잘 알려져 있지 않다. 따라서 본 연구에서는 포화된 사질토에서 막장 전방에 차수 그라우팅을 적용할 경우에 발생하는 효과를 규명하기 위하여 모형실험을 수행하였다. 실험에서는 차수층의 위치와 길이를 변화시거면서 이수의 유출이나 지반 파괴 이전까지 이수압을 가하여 최대 이수압과 지반 변위 및 이수의 유출로 인한 파괴 형상을 측정하여 분석하였다. 실험 결과, 전방 차수층이 없는 경우에 최대 이수압과 초과 이수압은 토피고에 선형비례 하였으며, 차수층이 존재하는 경우에는 차수층이 없는 경우보다 이수압을 크게 가할 수 있어서 전방 차수층이 막장 안정성을 증대시킬 수 있다는 것을 확인할 수 있었다. 막장 안정성 증대에 가장 큰 영향을 주는 적정 차수층의 규격은 길이 1.0 ~ 1.5D, 설치높이 1.0D로 나타났다. 초기 막장압 대비 최대 이수압의 비로 막장의 자립 안전율(F)을 제안할 수 있으며, 전방 차수층을 적정 위치에 설치할 경우 초기 막장압보다 3.5~4.0배 크게 이수압을 가할 수 있는 것으로 나타났다.

• 신재생에너지
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• 제9권3호
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• pp.20-28
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• 2013

The gasification process has developed to convert coal into the more useful energy and material since decades. Despite the numberous design of ones, entrained flow gasifier of the major companies has had an advantage on the market. Because it has a merit of full-scale and high performance plant. In this paper, the gasification technologies of GE energy, Phillips, Siemens and Shell have been reviewed to compare their characteristics and a high performance gasification process was suggested. And the simulation model of gasifiers using Aspen Plus offered the quantitative comparison data for difference designs. The simulation results revealed the poor performance of the slurry feed than dry design. The corresponding cold gas efficiency of 77% is much lower than the 80.3% for the dry feed cases. The exergy analysis of the difference syngas quenching system showed that chemical quenching is superior to another. The results of analysis recommend the two stage gasifier with dry multi-feeder as the energy effective design.

• 한국지하수토양환경학회지:지하수토양환경
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• 제6권2호
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• pp.57-67
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• 2001

본 연구는 난지도 매립지에서 기반암 및 풍화대층을 통해서 거동하는 침출수의 속도와 침출수량을 부정류 상태에서 예측하기 위해 실시되었다. 본 연구에서는 3차원 지하수 거동 모델인 MODFLOW와 지하수에 용해되어 있는 오염물질의 확산, 분산, 화학반응 등을 해석할 수 있는 MT3D를 이용하여 안정화 공사 이후 부정류 상태에서 침출수 거동을 해석하였다. 침출수 발생량은 최근 10년간의 기상자료를 이용해서 HELP모델로 산출하였다. 침출수 거동은 차수벽, 차수층 설치 전,후의 침출수위 변화에 의해 예측되었다.

• 대한기계학회논문집A
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• 제29권3호
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• pp.432-438
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• 2005

CMP characteristics such as material removal rate and edge effect were measured and investigated in accordance with pad grooving effect, groove width, depth and pitch. GSQ (Groove Stiffness Quotient) and GFQ (Groove Flow Quotient) were proposed to estimate pad grooving characteristics. GSQ is defined as groove depth(D) divided by pad thickness(T) and GFQ is defined as groove width(W) divided by groove pitch(P). As GFQ value increased, material removal rate increased some point but gradually saturated. It seems that material removal rate is not affected by each parameter respectively but by interaction of these parameters such as groove dimensions. In addition, an increase in GFQ and GSQ causes edge effect to be improved. Because, pad stiffness decreases as GSQ and GFQ increase. In conclusion, groove influences relative pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. The change of groove dimensions has influence on pad stiffness and slurry flow, so that polishing results such as removal rate and edge effect become changed.