• 기술사
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• 제22권2호
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• pp.10-18
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• 1989

New Materials such as fine ceramics have attracted much attention as structural materials. The industrial needs of machining such materials will be emphasized more and more in the future. The objective of this study is to supply useful knowledges for improvement by cooled cutting of sintered diamond tool. This study treats with experimental analysis of tool wear, surface roughness and thermal stress which will lead to the machinability of fine ceramics.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2008년도 춘계학술발표대회 개요집
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• pp.40-40
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.362-365
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• 2005

Currently Chemical Mechanical Planarization (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. Especially the CMP pad conditioner, one of the diamond tools, is required to have strong diamond retention. Strong cohesion between diamond grits and metal matrix prevents macro scratch on the wafer. If diamond retention is weak, the diamond will be pulled out of metal matrix. The pulled diamond grits are causative of macro scratch on wafer during CMP process. Firstly, some results will be reported of cohesion between diamond grits and metal matrix on the diamond tools prepared by three different manufacturing methods. A measuring instrument with sharp cemented carbide connected with a push-pull gauge was manufactured to measure the cohesion between diamond grits and metal matrix. The retention force of brazed diamond tool was stronger than the others. The retention force was also increased in proportion to the contact area of diamond grits and metal matrix. The brazed diamond tool has a strong chemical combination of the interlayer composed of chrome in metal matrix and carbon which enhance the interfacial cohesion strength between diamond grits and metal matrix. Secondly, we measured real-time data of the coefficient of friction and the pad wear rate by using CMP tester (CETR, CP-4). CMP pad conditioner samples were manufactured by brazed, electro-plated and sintered methods. The coefficient of friction and the pad wear rate were shown differently according to the arranged diamond patterns. Consequently, the coefficient of friction is increased according as the space between diamonds is increased or the concentration of diamonds is decreased. The pad wear rate is increased according as the degree of diamond protrusion is increased.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.533-537
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• 2003

Compared to sintered polycrystalline diamond (PCD), the deposited thin film diamond has a great advantage on the fabrication of cutting tools with complex geometries such as drills. Because of high performance in high speed machining non-ferrous difficult-to-cut materials in the field of automobiles industry, aeronautics and astronautics industry, diamond-coated drills find large potentialities in commercial applications. However, the poor adhesion of the diamond film on the substrate and high surface roughness of the drill flute adversely affect the tool lift and machining quality and they become the main technical barriers for the successful development and commercialization of diamond-coated drills. In this paper, diamond thin films were deposited on the commercial WC-Co based drills by the electron aided hot filament chemical vapor deposition (EACVD). A new multiple coating technology based on changing gas pressure in different process stages was developed. The large triangular faceted diamond grains may have great contribution to the adhesive strength between the film and the substrate, and the overlapping ball like blocks consisted of nanometer sized diamond crystals may contribute much to the very low roughness of diamond film. Adhesive strength and quality of diamond film were evaluated by scanning electron microscope (SEM), atomic force microscope (AFM), Raman spectrum and drilling experiments. The ring-block tribological experiments were also conducted and the results revealed that the friction coefficient increased with the surface roughness of the diamond film. From a practical viewpoint, the cutting performances of diamond-coated drills were studied by drilling the SiC particles reinforced aluminum-matrix composite. The good adhesive strength and low surface roughness of flute were proved to be beneficial to the good chip evacuation and the decrease of thrust and consequently led to a prolonged tool lift and an improved machining quality. The wear mechanism of diamond-coated drills is the abrasive mechanical attrition.

• 한국분말재료학회지
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• 제14권6호
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• pp.348-353
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• 2007

In the present study, Zr-base metallic glass (MG) and Zr-base BMG/diamond composites were fabricated using a combination of gas atomization and spark plasma sintering (SPS). The microstructure, thermal stability and mechanical property of both the specimens as atomized and sintered were investigated. The experimental results showed that the SPSed specimens could be densified into nearly 100% and maintained the initial thermal stability at the sintering temperature of 630K. In addition, MG/diamond powder composites were successfully synthesised using SPS process. The composites, even a very low diamond volume fraction, generated a significant increase in compressive strength. With increasing the diamond volume fraction, the compressive strength was also increased due to the addition of hardest diamonds. It suggests that these composites would be potential candidates for a new cutting tool material.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.593-598
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• 2003

Ceramic plates containing many micro-holes are used in diverse applications such as MCP (Microchannel Plate). catalytic converters, filters, electrical insulators in integrated circuits, and so on. One of the efficient methods for machining many holes in ceramic plates is wet drilling of ceramic green bodies followed by sintering them. Since the strength of ceramic green bodies is much lower than the strength of sintered ceramic plate, ceramic green bodies can be drilled with high feed rate. The axial force during micro-drilling of ceramic green bodies increases rapidly at high feed rate, which induces the crack in workpiece. Therefore, the tool lift of micro-drill with respect to feed rate may be determined by the predicting increase of axial force. In this work, the axial force during micro-drilling was calculated using the chip flow model on the micro-drill tip. from which the tool life of diamond abrasive micro-drill during micro-drilling of ceramic green bodies was calculated.

• 대한기계학회논문집
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• 제13권4호
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• pp.604-610
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• 1989

본 연구는 알루미나계 세라믹의 소결 다이아몬드 공구로 절삭시의 칩의 형태 와 절삭저항을 관찰하였다. 절삭 양식은 건식과 습식으로 하고, 여러 가지 적삭조건 에 따른 flank 마멸의 진행과정, 가공면의 표면거칠기에 미치는 영향 및 가공면의 크랙 상태를 조사형 현미경으로 확대 검출하여 가공상태를 정밀하게 조사, 측정하였 다.

• 한국분말재료학회지
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• 제15권5호
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• pp.378-385
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• 2008

This article presents the successful consolidation of the mixed Co and Diamond powders for a drilling segment by the combined application of magnetic pulsed compaction (MPC) and subsequent sintering, and their properties were analyzed. Homogeneous hardness (Hv 220) and density (97%) of sintered bulks fabricated by MPC were obtained by the new technique, where higher pressure has been employed for short period of time than that of general process. A fine microstructure and homogeneous hardness in the consolidated bulk were observed without cracks. Relatively higher drilling speed of 9.61 cm/min and life time of 6.55 m were found to the MPCed specimens, whereas the value of the specimens fabricated by general process was 11.71 cm/min and 7.96 m, respectively. A substantial improvement of mechanical properties of segment was achieved through this study.

• 대한기계학회논문집A
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• 제21권6호
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• pp.1002-1012
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• 1997

When the presintered ceramics are machined with ceramic tool, the tool life becomes extremely short. The CBN tool exhibits the best performance in dry machining of the ceramics presintered at $1450^{\circ}C$ among all cutting tests. The roughness of the machined surface of the ceramics presintered below $1350^{\circ}C$ is smaller than that of the ceramics presintered at $1450^{\circ}C$ While the performance of the cemented carbide and CBN tools is better in dry than in wet machining, the diamond tool shows adverse tendency. The tool life is not affected by the feed rate and depth of cut. During the following full-sintering after the machining of the presintered ceramics, the surface roughness decreases up to 62%. The finished surface in machining the presintered ceramics is much better than that in machining the full-sintered ceramic.

• 한국기계가공학회지
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• 제10권2호
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• pp.135-141
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• 2011

In this study, the variation of the cutting forces generated in the machining process were evaluated experimentally. A material of $Al_{2}O_{3}$ ceramic and a tool of the dynamometer were used for the measurements of the cutting forces. With the constant rates of the feed and the tool rotation, the cutting forces were measured along three axial directions(X, Y, Z axis) for the various values of the hollow ratio. It was found that the cutting force be increasing linearly along the direction of Z axis, but along X, Y axis be not varied. Also from the viewpoint of the precesses of the hole drilling, the cutting force was found to be increasing sharply at the beginning process, but from the eighth process be increasing smoothly. As conclusions, the cutting force generated by machining for the material of $Al_{2}O_{3}$ ceramic are influenced more significantly by the feed rate and the hollow ratio than by the tool rotational speed.