• Journal of the Korean Ceramic Society
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• v.13 no.3
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• pp.55-62
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• 1976

순수한 닉켈과 금 박막을 (III)규소 단 결정위에 진공 증착시켰다. Ni/Au/Si나 Au/Ni/Si시료를 진공중에서 약 55$0^{\circ}C$로 가열하였을 때 육방정 혹은 변형된 육방정의 미소 결정들이 규소 기질위에 형성되었다. 이들 미소 결정들의 형성과정 및 조성은 X-선 회절법, scanning electron microscopy 및 scanning Auger microprobe 법을 사용하여 결정하였다. 이들 미소 결정은 NiSi2임이 확인되었다. Ni/Au/Si 시료에서는 Au-Si 공융점(37$0^{\circ}C$) 이상으로 온도가 증가됨에 따라 닉켈과 규소가 Au-Si 공융체 속으로 이동한 후 반응하여 NiSi2를 형성하였다. Au/Ni/Si 시료에 있어서의 Au-Si 공융체 형성은 닉켈 박막에 있는 바늘구멍형의 표면 결함과 관련 지을 수 있겠다. 금이 닉켈 박막의 grain boundary를 통하여 Ni/Si 계면으로 확산되어 그 계면을 습윤시킨 다음 Au-Si 공융체를 형성하였다. 이런 Au-Si 공용체는 닉켈과 규소 원자에 대한 높은 확산 매질로서 작용하여 NiSi2 형성을 촉진시켰다. 표면에 평행한 (III)규소면 위의 NiSi2 미소 결정은 유사한 육방정으로 나타났으며, 경사진 미소결정은 부등변 사변형과 유사하였다. Auger 스펙트럼 및 Ni, Au 및 Si에 대한 내층조성(indepth Composition Profiles)은 NiSi2 미소 결정이 Au-Si 공융체의 matrix에 미소 부분으로 나타났음을 보여주었다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.434-437
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• 2005

Chemical Mechanical Polishing (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. In general, CMP is a surface planarization method in which a silicon wafer is rotated against a polishing pad in the presence of slurry under pressure. The polishing pad, generally a polyurethane-based material, consists of polymeric foam cell walls, which aid in removal of the reaction products at the wafer interface. It has been found that the material removal rate of any polishing pad decreases due to the so-called 'pad glazing' after several wafer lots have been processed. Therefore, the pad restoration and conditioning has become essential in CMP processes to keep the urethane polishing pad at the proper friction coefficient and to allow effective slurry transport to the wafer surface. Diamond pad conditioner employs a single layer of brazed bonded diamond crystals. Due to the corrosive nature of the polishing slurry required in low pH metal CMP such as copper, it is essential to minimize the possibility of chemical interaction between very low pH slurry (pH <2) and the bond alloy. In this paper, we report an exceptional protective coated conditioner for in-situ pad conditioning in low pH Cu CMP process. The protective Cr-coated conditioner has been tested in slurry with pH levels as low as 1.5 without bond degradation.

• Transactions of Materials Processing
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• v.29 no.1
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• pp.44-48
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• 2020

Aluminum nitride (AlN), as a substrate material in electronic packaging, has attracted considerable attention over the last few decades because of its excellent properties, which include high thermal conductivity, a coefficient of thermal expansion that matches well with that of silicon, and a moderately low dielectric constant. AlN films with c-axis orientation and thermal conductivity characteristics were deposited by using Pulsed Laser Deposition (PLD). The epitaxial AlN films were grown on sapphire (c-Al₂O₃) single crystals by PLD with AlN target and Y₂O₃ doped AlN target. A comparison of different targets associated with AlN films deposited by PLD was presented with particular emphasis on thermal conductivity properties. The quality of AlN films was found to strongly depend on the growth temperature that was exerted during deposition. AlN thin films deposited using Y₂O₃-AlN targets doped with sintering additives showed relatively higher thermal conductivity than while using pure AlN targets. AlN thin films deposited at 600℃ were confirmed to have highly c-axis orientation and thermal conductivity of 39.413 W/mK.

• Journal of Sensor Science and Technology
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• v.13 no.5
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• pp.399-404
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• 2004

We report on the technology of formation of sandwich structures based on fullerite films and on experimental results in research of optical and conductivity properties of these sandwich samples. Single crystals of sapphire (100) or silicon were used as substrates. The sandwich specimens were based on the structure M/$C_{60}$/M (M=Cr, Pd, Ag, Al, Cu). The thickness of the fullerite films was about $0.2{\sim}1.0{\mu}m$. The area of the $C_{60}$ film under the top contact was about $1cm^{2}$. The specimens have been investigated by infrared spectroscopy, spectra-photometry, ellipsometry and X-ray diffraction analysis. Measurements of the current/voltage characteristics and research on the temperature dependence of conductivity were performed as well. It was shown that metals such as Cr, Pd, Ag, Al, and Cu penetrate easily into the fullerite films. It appears that these specimens have a large conductivity. For silver/$C_{60}$ and other sandwich structures the conductivities show a semiconductor-like behaviour.

• Proceedings of the Acoustical Society of Korea Conference
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• spring
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• pp.315-318
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• 2004

이식형 인공중이에 있어 그 특성은 트랜스듀서의 성능에 따라 크게 좌우된다. 따라서 성능이 우수한 인공중이 제작을 위해서는 트랜스듀서의 주파수 특성 및 구동 성능이 우수해야 하고 인체 내 이식을 위해서는 그 크기가 작아야 한다. 본 연구에서는 인공중이용 소형 트랜스듀서로서 단결정 압전 재료인 PMN-PT를 이용한 적층형 액츄에이터를 제안하였다. 또한 제안된 모델을 두께 0.2mm를 갖는 $1mm{\times}1mm$ 크기의 PMN-PT 시편을 14층으로 쌓아 2.8mm 두께로 제작하였고, 이때 절연층으로 P.R을 사용하였다. 제작된 트랜스듀서의 성능은 Impedance Spectrum, 구동변위 측정 및 구동력의 계산을 통해 평가하였다. 이를 통해 PMN-PT를 재료로 사용한 적층형 액츄에이터의 성능이 기존의 PZT를 재료로 사용한 Bimorph 액츄에이터보다 훨씬 뛰어날 뿐만 아니라 청각 장애가 심한 고도난청자들에게 적용이 가능한 이식형 인공중이용 트랜스듀서로서 충분한 성능을 가지고 있음을 입증하였다.

• Atmosphere
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• v.20 no.4
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• pp.427-436
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• 2010

The single-scattering optical properties of ice crystals in cirrus clouds by the aircraft measurement data were investigated, and the radiative equilibrium temperatures and radiative fluxes were calculated and analyzed by radiative convective model with the variations of ice crystal habits and sizes in cirrus clouds. The homogeneous cloud is assumed to be in the layer 200~260 hPa with an ice crystal content of $10gm^{-2}$ for the flux calculation. The profiles of temperature, humidity, and ozone typical of mid-latitude summer are used. The surface albedo is assumed to be 0.2 for all spectral bands and the cosine of solar zenith angles is 0.5. The result of radiative equilibrium temperature at surface was less than surface temperature of the standard atmosphere data in case of smaller effective ice crystal size and larger optical thickness. The column, aggregation and plate in 6 ice crystal habits were the most effective in positive greenhouse effect and bullet-4 was the worst in it. At the surface, the maximum difference of equilibrium temperature by 6 kinds of ice crystal habits were about 3~15 K with 30 sample aircraft measurement data.

• Journal of the Korean Society of Clothing and Textiles
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• v.13 no.1 s.29
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• pp.43-47
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• 1989

The microstructural changes of nylon 6 UDY, POY and FDY were compared after free-annealing through crystallinity, birefringence, and melting behavior analyses. Free-annealing was done at various temperatures $(120^{\circ}C\;,140^{\circ}C,\;160^{\circ}C,\;180^{\circ}C,\;200^{\circ}C)$ and times (15 min., 30 min., 60 min.) using vaccum oven. Crystallinity was measured by the density gradient column technique and birefringence was measured using a Nikon polarizing microscope with a quartz wedge and Senarmont compensator. Melting behavior was investigated on the basis of DSC melting corves. Crystallinites of specimens increased as the treatment temperature and time increased. Birefringence of UDY increased after annealing and increased as the treatment temperature increased. On the other hand, those of POY and FDY decreased after annealing. Especially, the changes of crystallinity and birefringence of treated POY were particularly lower than those of treated UDY and FDY. Melting peaks of untreated UDY, POY and FDY were different in the position and the shape, but little change was seen in melting peaks in spite of increasing the annealing temperature and time. UDY and FDY showed single melting peaks in all the specimens. But POY showed double melting peaks, which means the coexistences of crystals with different thermal properties.

• The Journal of Engineering Geology
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• v.25 no.1
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• pp.1-8
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• 2015

Deep geological disposal is the preferred storage method for high-level radioactive waste, because it ensures stable long-term storage with minimal potential for human disruption. Because of the risk of groundwater contamination, a buffer of steel and bentonite layers has been proposed to prevent the leaching of radionuclides into groundwater. Quartz is one of the most common minerals in earth's crust. To understand how deformation and dissolution phenomena affect waste disposal, here we study quartz samples at pressure, temperature, and pH conditions typical of deep geological disposal sites. We perform a dissolution experiment for single quartz crystals under different pressure and temperature conditions. Solution samples are collected and the dissolution rate is calculated by analyzing Si concentrations in a solution excited by inductively coupled plasma-atomic emission spectroscopy (ICP-AES). After completing the dissolution experiment, deformation of the quartz sample surfaces is investigated with a confocal laser scanning microscope (CLSM). An empirical formula is introduced that describes the relationship between dissolution rate, pressure, and temperature. These results suggest that bentonite layers in engineering barrier systems may be vulnerable to thermal deformation, even when exposed to higher temperatures on relatively short timescales.

• Journal of the Korean Graphic Arts Communication Society
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• v.14 no.1
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• pp.47-54
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• 1996

Deuterium NMR studies have been carried out for two kinds of main- chain dimer liquid crystals $\alpha$.$\omega$-bis[(4,4`-cyanobipheny0oxy] alkane (CBA-n, n=9,100.The H-NMR spectra were recorded on a JEOP JNM-GSX-500 spectrometer by using deuterium labelled CBA-n at various temperatures. The RIS analysis of the NMR spectra was performed so as to elucidate the conformational characteristics of the spacer in the nematic phase. Following the previous treatment, the single-ordering-matrix model was adopted, in which the molecular axis was defined parallel to the line connecting the centers of the terminal mesogenic cores. Conformer fractions of the spacer were estimated by simulation so as to reproduce the observed NMR profile. The conformational entropy changes at both CN and NI interphases were estimated on the basis of the nematic conformations taken from the conformation map as well as those derived from the simulation. In these calculations the spacer was assumed th by in the all-trans conformation and in the random coil stats in the crystal and isotropic phases respectively. The esimated conformational entropy change values were then compared with the corresponding constant-volume entropies obtained from PVT measurements. The correspondence between both entropy values was found to be quite good in consideration of the uncertainties involved in both experiment and calculations.

• 한국초전도학회:학술대회논문집
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• v.9
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• pp.251-255
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• 1999

Local field distribution in the mixed state of type II superconductors has been numerically calculated and compared with $^{11}$B NMR spectra for YNi$_2B_2C$ single crystals. We find that only small distortion of vortex positions from the perfect lattice points is enough to smear out the low frequency shoulder. As the vortices are further distorted, the line shape changes from an asymmetric shape with a high frequency tail to a symmetric Gaussian line shape. It is found that the second moment of the field distribution has a major contribution from the high frequency tail. Consequently, a linewidth of the full width at half maximum calculated from the second moment assuming for a Gaussian line shape is overestimated.