• Title/Summary/Keyword: Single Crystal Growth

검색결과 917건 처리시간 0.027초

Hot Wall Epitaxy (W)에 의한 ZnIn$_2$S$_4$ 단결정 박막 성장과 특성 (Growth and characterization of ZnIn$_2$S$_4$ single crystal thin film using Hot Wall Epitaxy method)

  • 윤석진;홍광준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.266-272
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    • 2002
  • The stochiometric mixture of evaporating materials for the ZnIn$_2$S$_4$ single crystal thin film was prepared from horizontal furnace. To obtain the ZnIn$_2$S$_4$ single crystal thin film, ZnIn$_2$S$_4$ mixed crystal was deposited on throughly etched semi-insulating GaAs(100) in the Hot Wall Epitaxy(HWE) system. The source and substrate temperature were 610 $^{\circ}C$ and 450 $^{\circ}C$, respectively and the growth rate of the ZnIn$_2$S$_4$ single crystal thin film was about 0.5 $\mu\textrm{m}$/hr. The crystalline structure of ZnIn$_2$S$_4$ single crystal thin film was investigated by photo1uminescence and double crystal X-ray diffraction(DCXD) measurement. The carrier density and mobility of ZnIn$_2$S$_4$ single crystal thin film measured from Hall effect by van der Pauw method are 8.51${\times}$10$\^$17/ cm$\^$-3/, 291 $\textrm{cm}^2$/V$.$s at 293 $^{\circ}$K, respectively. From the photocurrent spectrum by illumination of perpendicular light on the c - axis of the ZnIn$_2$S$_4$ single crystal thin film, we have found that the values of spin orbit splitting ΔSo and the crystal field splitting ΔCr were 0.0148 eV and 0.1678 eV at 10 $^{\circ}$K, respectively. From the photoluminescence measurement of ZnIn$_2$S$_4$ single crystal thin film, we observed free excition (E$\_$X/) typically observed only in high quality crystal and neutral donor bound exciton (D$^{\circ}$,X) having very strong peak intensity. The full width at half maximum and binding energy of neutral donor bound excition were 9 meV and 26 meV, respectively. The activation energy of impurity measured by Haynes rule was 130 meV.

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승화법에 의한 SiC 단결정 성장에서 성장 step의 형성에 관한 연구 (The study on the formation of growth steps in the sublimation growth of SiC single crystals)

  • 강승민
    • 한국결정성장학회지
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    • 제11권1호
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    • pp.1-5
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    • 2001
  • 승화법에 의하여, 여러 조건의 성장압력과 성장온도에서 SiC 단결정을 성장시켰다. 성장된 단결정을 광학현미경으로 관찰하여 성장 step의 형태와 양상을 관찰하였으며, 성장 step의 morphology와 결정 성장 인자와의 상호 연관성에 대하여, 핵생성과 결정성장에 관한 BCF 이론을 적용시켜 고찰하였다.

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Hot Wall Epitaxy (HWE) 법에 의한 $CuInSe_2$ 단결정 박막 성장과 점결함 연구 (Study point defect and growth for $CuInSe_2$ single crystal thin film by hot wall epitaxy)

  • 유상하;홍광준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.152-153
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    • 2007
  • $CuInSe_2$ single crystal thin film was deposited on thoroughly etched semi-insulating GaAs(100) substrate by the hot wall epitaxy (HWE) system. After the as-grown $CuInSe_2$ single crystal thin films was annealed in Cu-, Se-, and In-atmospheres, the origin of point defects of $CuInSe_2$ single crystal thin films has been investigated by the photoluminescence(PL) at 10 K. The native defects of $V_{Cu}$, $V_{Se}$, $Cu_{lnt}$, and $Se_{lnt}$ obtained by PL measurements were classified as a donors or acceptors type. And we concluded that the heat-treatment in the Cu-atmosphere converted $CuInSe_2$ single crystal thin films to an optical n-type. Also, we confirmed that In in $CuInSe_2$/GaAs did not form the native defects because In in $CuInSe_2$ single crystal thin films existed in the form of stable bonds.

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SiC 단결정내의 결함 억제 (Defects control in SiC single crystals)

  • 김화목;오근호
    • 한국결정성장학회지
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    • 제8권1호
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    • pp.29-35
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    • 1998
  • 고품질의 6H-SiC 단결정을 성장하기 위하여 기판, 원료 및 성장에 사용되는 도가니에 대한 고순도 처리공정을 통하여 고순도화하여 결정성장을 시행하였다. 특히, 원료에 대해서는 순화처리전후의 XRD 분석을 행하여 고순도화된 원료의 상태를 확인하였다. 성장된 6H-SiC 단결정의 크기는 직경이 33mm, 길이는 11mm이었고, 기판으로의 사용 및 내부결함에 대한 관찰을 위하여 결정을 절단 및 연마하여 직경 33mm, 두께 0.5mm인 wafer를 제작하였으며, 광학현미경 및 Raman 분석을 이용하여 순화공정을 통해 제작된 wafer의 내부결함밀도 및 결정성을 측정하였다. 분석결과, micropipe 및 planar defect의 밀도는 각각 100개/$\textrm{cm}^2$, 30개/$\textrm{cm}^2$으로 순화처리를 통한 내부결함의 감소로 인해 고품질의 6H-SiC 단결정의 성장이 가능하였다

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단결정 밀리 부품의 입체성형 해석에 관한 연구 (A Study on Analysis for Bulk Forming of a Single Crystal Milli-Product)

  • 이용신;김용일
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2001년도 춘계학술대회 논문집
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    • pp.245-249
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    • 2001
  • This paper is concerned with numerical analyses for bulk forming of a single crystal milli-product, whose typical size ranges from a few hundreds ${\mu}m$ to a few mm. The numerical formulation invoked in this paper combines the crystal plasticity theory considering texture development and the ductile damage mechanics for growth of micro voids, since orientation development and growth of micro voids become the primary factors for bulk forming of milli-size products. As applications, milli-extrusion of a single crystal round bar and milli-rolling of a single crystal plate are simulated and the results are discussed in detail.

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Crystal growth from melt in combined heater-magnet modules

  • Rudolph, P.;Czupalla, M.;Dropka, N.;Frank-Rotsch, Ch.;KieBling, F.M.;Klein, O.;Lux, B.;Miller, W.;Rehse, U.;Root, O.
    • 한국결정성장학회지
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    • 제19권5호
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    • pp.215-222
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    • 2009
  • Many concepts of external magnetic field applications in crystal growth processes have been developed to control melt convection, impurity content and growing interface shape. Especially, travelling magnetic fields (TMF) are of certain advantages. However, strong shielding effects appear when the TMF coils are placed outside the growth vessel. To achieve a solution of industrial relevance within the framework of the $KRISTMAG^{(R)}$ project inner heater-magnet modules(HMM) for simultaneous generation of temperature and magnetic field have been developed. At the same time, as the temperature is controlled as usual, e.g. by DC, the characteristics of the magnetic field can be adjusted via frequency, phase shift of the alternating current (AC) and by changing the amplitude via the AC/DC ratio. Global modelling and dummy measurements were used to optimize and validate the HMM configuration and process parameters. GaAs and Ge single crystals with improved parameters were grown in HMM-equipped industrial liquid encapsulated Czochralski (LEC) puller and commercial vertical gradient freeze (VGF) furnace, respectively. The vapour pressure controlled Czochralski (VCz) variant without boric oxide encapsulation was used to study the movement of floating particles by the TMF-driven vortices.

LOW-DISLOCATION-DENSITY LARGE-DIAMETER GaAs SINGLE CRYSTAL GROWN BY VERTICAL BOAT METHOD

  • Kawase, Tomohiro;Tatsumi, Masami;Fujita, Keiichiro
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.129-157
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    • 1999
  • Low-dislocation-density large-diameter GaAs single crystals with low-residual-strain have been strongly required. We have developed dislocation-free 3-inch Si-doped GaAs crystals for photonic devices [1], and low-dislocation-density low-residual-strain 4-inch to 6-inch [2, 3] semi-insulating GaAs crystals for electronic devices by Vertical Boat (VB) technique. We confirmed that VB substrates with low-residual-strain have higher resistance against slip-line generation during MBE process. VB-GaAs single crystals show uniform radial profile of resistivity reflecting to the flat solid-liquid interface during the crystal growth. Uniformity of micro-resistivity of VB-GaAs substrate is much better than that of the LEC-GaAs substrate, which is due to the low-dislocation-density of VB-GaAs single crystals.

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초크랄스키 실리콘 단결정에서 성장 쌍정과 결정 외형의 관계 (Relation Between the Growth Twin and the Morphology of a Czochralski Silicon Single Crystal)

  • 박봉모
    • 한국결정학회지
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    • 제11권4호
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    • pp.207-211
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    • 2000
  • In a Czochralski silicon single crystal, the relation between the growth twin and the crystal morphology was investigated. The growth twin is nucleated on the {111} facet planes near the growth ridges. When a {111} growth twin is formed in the <100> silicon crystal, the growth ridge where twin is nucleated will continuous through the twin plane. Other two ridges at the 90。 apart will be displaced about 33° and be deformed to facets. The ridge on the opposite side of twin nucleation will disappear by forming a slight hill. Because the growth ridges of silicon is due to the {111} planes, the variation in the growth ridge formation can be predicted clearly by considering the change of the {111} plane traces in the stereographic projection after twining.

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스컬법에 의한 루틸 단결정 성장에 관한 연구 (A study on the growth of rutile single crystal by skull melting method)

  • 석정원;최종건
    • 한국결정성장학회지
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    • 제14권6호
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    • pp.262-266
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    • 2004
  • 초기 RF유도가열을 위해 Ti 금속링을 사용하여 스컬법에 의해 루릴 단결정을 성장시켰다. 성장시킨 단결정은 ${\varnothing}55.5{\times}1.0mm$의 wafer로 가공하였으며,$1300^{\circ}C$에서 15시간까지 대기중에서 열처리 하여 $\lambda=200~25000nm$의 범위에서 투광도를 비교하였다.