• Title/Summary/Keyword: Silicon phonics

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Analysis and Design of Si3N4 Rib-optical Waveguides for Evanescent-wave Integrated-optical Biosensors (소산파 집적광학 바이오센서에 적합한 Si3N4 립-광도파로 해석 및 설계에 관한 연구)

  • Jung, Hongsik
    • Korean Journal of Optics and Photonics
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    • v.30 no.1
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    • pp.15-22
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    • 2019
  • $Si_3N_4$ rib-optical waveguides for evanescent-wave integrated-optical biosensors were analytically interpreted, to derive the single-mode propagation conditions. The integrated-optical biosensor structure based on two-mode interference was proposed, and the rib width and thickness and core thickness for a single-mode and two-mode waveguide (sensing region) were proposed to be $3{\mu}m$, 2 nm, and 150 nm and $3{\mu}m$, 20 nm, and 340 nm respectively. The optical characteristics of each guided-wave mode were investigated utilizing the film mode-matching (FMM) analysis.