• Title/Summary/Keyword: Silicon carbide(SiC)

Search Result 564, Processing Time 0.029 seconds

Removal of Fe, Si from Silicon Carbide Sludge Generated in the Silicon Wafer Cutting Process (실리콘 웨이퍼 절단공정(切斷工程)에서 발생(發生)하는 실리콘 카바이드 슬러지로부터 철(鐵), 실리콘 제거(除去))

  • Park, Hoey Kyung;Go, Bong Hwan;Park, Kyun Young;Kang, Tae Won;Jang, Hee Dong
    • Resources Recycling
    • /
    • v.22 no.2
    • /
    • pp.22-28
    • /
    • 2013
  • In the present study, the possibility of recovering and recycling the silicon carbide(SiC) from a silicon sludge by removing Fe and Si impurities was investigated. Si and SiC were separated from the silicon sludge using centrifugation. The separated SiC concentrate consisted of Fe, Si and SiC, in which Fe and Si were removed to recover the pure SiC. Leaching with acid/alkali solution was compared with the vapor-phase chlorination. The Fe concentration removed in the SiC was 49 ppm, and it was separated by leaching with 1 M HCl solution at $80^{\circ}C$ for 1 h. The Si concentration removed in the SiC was 860 ppm, and it was separated by leaching with 1M NaOH solution at $50^{\circ}C$ for 1 h. The SiC concentrate was chlorinated in a tubular reactor, 2.4 cm in diameter and 32 cm in length. The boat filled with SiC concentrate was located at the midpoint of the alumina tube, then, the chlorine and nitrogen gas mixture was introduced. The Fe and Si concentration removed in the SiC were 48 ppm and 405 ppm, respectively, at $500^{\circ}C$ reactor temperature, 4 h reaction time, 300 cc/min gas flow rate, and 10% $Cl_2$ gas mole fraction.

Effect of $Si_3N_4$ Whisker and SiC Platelet Addition on Phase Transformation and Mechanical Properties of the $\alpha/\beta$ Sialon Matrix Composites (보강재로 첨가된 $Si_3N_4$ Whisker와 SiC Platelet가 $\alpha/\beta$ Sialon 복합체의 상변태와 기계적 물성에 미치는 영향)

  • 한병동;임대순;박동수;이수영;김해두
    • Journal of the Korean Ceramic Society
    • /
    • v.32 no.12
    • /
    • pp.1417-1423
    • /
    • 1995
  • α/β sialon based composites containing silicon nitride whisker and silicon carbide platelet were fabricated by hot pressing. Effect of the reinforcing agents on the α to β phase transformation of the sialon as well as on the mechanical properties was investigated. Silicon nitride whisker and silicon carbide platelet promoted the phse transformation. TEM/EDS analysis revealed that the grain containing the whisker had 'core-rim' structure; core being high purity Si3N4 whisker and rim being β-sialon. Flexural strength of the composite decreased with the reinforcement addition which, on the other hand, improved fracture toughness of it. High temperature strength was measured at 1300℃ to be about 130 MPa lower than that measured at RT for the whisker reinforced composites.

  • PDF

Conversion of Carbon Fiber into Silicon Carbide Fiber by Pack-Cementation

  • Joo, Hyeok-Jong;Kim, Jung-Il;Lee, Jum-Kyun
    • Carbon letters
    • /
    • v.1 no.1
    • /
    • pp.12-16
    • /
    • 2000
  • Carbon fiber was reacted with gaseous silicon monoxide which is produced from pack-powder mixture at elevated temperature. As a result of the reaction, two kinds of SiC fiber were obtained. The first one was SiC fibers which were converted from carbon fiber. The fiber is constituted with polycrystal like fine grains or monolithic crystals that have a size from sub-micron to $10\;{\mu}m$. Their size depends on the temperature during the conversion reaction. The second one was ultra-fine SiC fibers that were found on the surface of the converted SiC fibers. The ultra-fine fibers have diameters from 0.08 to $0.2\;{\mu}m$ and their aspect ratio were larger than 100. The chemical composit ion of the ultra-fine fibers was analyzed using an Auger electron spectroscopy. In result, the fibers consist of 51% silicon, 38% carbon and 11% oxygen by weight.

  • PDF

Growth Mechanism of Graphene structure on 3C-SiC(111) Surface: A Molecular Dynamics Simulation

  • Hwang, Yu-Bin;Lee, Eung-Gwan;Choe, Hui-Chae;Jeong, Yong-Jae
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2011.02a
    • /
    • pp.433-433
    • /
    • 2011
  • Since the concept of graphene was established, it has been intensively investigated by researchers. The unique characteristics of graphene have been reported, the graphene attracted a lot of attention for material overcomes the limitations of existing semiconductor materials. Because of these trends, economical fabrication technique is becoming more and more important topic. Especially, the epitaxial growth method by sublimating the silicon atoms on Silicon carbide (SiC) substrate have been reported on the mass production of high quality graphene sheets. Although SiC exists in a variety of polytypes, the 3C-SiC polytypes is the only polytype that grows directly on Si substrate. To practical use of graphene for electronic devices, the technique, forming the graphene on 3C-SiC(111)/Si structure, is much helpful technique. In this paper, we report on the growth of graphene on 3C-SiC(111) surface. To investigate the morphology of formed graphene on the 3C-SiC(111) surface, the radial distribution function (RDF) was calculated using molecular dynamics (MD) simulation. Through the comparison between the kinetic energies and the diffusion energy barrier of surface carbon atoms, we successfully determined that the graphitization strongly depends on temperature. This graphitization occurs above the annealing temperature of 1500K, and is also closely related to the behavior of carbon atoms on SiC surface. By analyzing the results, we found that the diffusion energy barrier is the key parameter of graphene growth on SiC surface.

  • PDF

Estimation of Tribological Properties on Surface Modified SiC by Chlorine Gas Reaction at Various Temperatures (다양한 온도에서 염소가스 반응에 의해 표면 개질된 SiC의 트라이볼로지 특성평가)

  • Bae, Heung-Taek;Jeong, Ji-Hoon;Choi, Hyun-Ju;Lim, Dae-Soon
    • Journal of the Korean Ceramic Society
    • /
    • v.46 no.5
    • /
    • pp.515-519
    • /
    • 2009
  • Carbon layers were fabricated on silicon carbide by chlorination reaction at temperatures between $1000^{\circ}C$ and $1500^{\circ}C$ with $Cl_2/H_2$ gas mixtures. The effect of reaction temperature on the micro-structures and tribological behavior of SiC derived carbon layer was investigated. Tribological tests were carried out ball-on-disk type wear tester. Carbon layers were characterized by X-ray diffractometer, Raman spectroscopy and surface profilometer. Both friction coefficients and wear rates were maintained low values at reaction temperature up to $1300^{\circ}C$ but increased suddenly above this temperature. Variation of surface roughness as a function of reaction temperature was dominant factor affecting tribological transition behavior of carbon layer derived from silicon carbide at high temperature.

Liquid Phase Sintering of Silicon Carbide (탄화규소의 액상소결)

  • 김원중;김영욱
    • Journal of the Korean Ceramic Society
    • /
    • v.32 no.10
    • /
    • pp.1162-1168
    • /
    • 1995
  • Systematic studies of the effects of additives and processing variables on the sintered density and the effect of crystalline forms of starting powders on the microstructure of pressureless sintered silicon carbide are described. Oxide additives were effective for the densification of SiC up to 96% of theoretical density at temperature as low as 185$0^{\circ}C$. Use of embedding powder increased the sintered density, up to 98% of theoretical density, by decreasing the weight loss during sintering. Composite type duplex microstructure has been developed due to the $\beta$longrightarrow$\alpha$ phase transformation of SiC by sintering at 185$0^{\circ}C$ and heat treatment at 195$0^{\circ}C$ for 1h.

  • PDF

Enhanced thermal conductivity of spark plasma-sintered thorium dioxide-silicon carbide composite fuel pellets

  • Linu Malakkal;Anil Prasad;Jayangani Ranasinghe;Ericmoore Jossou;Lukas Bichler;Jerzy Szpunar
    • Nuclear Engineering and Technology
    • /
    • v.55 no.10
    • /
    • pp.3725-3731
    • /
    • 2023
  • Thorium dioxide (ThO2)-silicon carbide (SiC) composite fuel pellets were fabricated via the spark plasma-sintering (SPS) method to investigate the role of the addition of SiC in enhancing the thermal conductivity of ThO2 fuel. SiC particles with an average size of 1㎛ in 10 and 15 vol% were used to manufacture the composite pellets. The changes in the composites' densification, microstructure and thermal conductivity were explored by comparing them with pure ThO2 pellets. The structural and microstructural characterization of the composite pellets has revealed that SPS could manufacture high-quality composite pellets without having any reaction products or intermetallic. The density measurement by the Archimedes principles and the grain size from the electron back-scattered diffraction (EBSD) analysis has indicated that the composites have higher densities and smaller grain sizes than the pellets without SiC addition. Finally, thermal conductivity as a function of temperature has revealed that sintered ThO2-SiC composites showed an increase of up to 56% in thermal conductivity compared to pristine ThO2 pellets.

Fabrication of Carbon Fiber Reinforced Reaction Bonded SiC Composite Fabricated by a Molten Si Infiltration Method; I. The Effect of Carbon Fiber Coating Process (용융 Si 침윤법에 의해 제조된 반응소결 탄소 섬유강화 탄화규소 복합체 제조; I. 탄소 섬유 코팅 방법에 따른 영향)

  • Yun, Sung-Ho;Tan, Phung Nhut;Cho, Gyung-Sun;Cheong, Hun;Kim, Young-Do;Park, Sang-Whang
    • Journal of the Korean Ceramic Society
    • /
    • v.45 no.9
    • /
    • pp.531-536
    • /
    • 2008
  • Reaction bonded silicon carbide (RBSC) composite for heat-exchanger was fabricated by molten Si infiltration method. For enforcing fracture toughness to reaction bonded silicon carbide composite, the surface of carbon fiber has coating layer by SiC or pyro-carbon. For SiC layer coating, CVD method was used. And for carbon layer coating, the phenol resin was used. In the case of carbon layer coating, fracture toughness and fracture strength were enhancing to 4.4 $MPa{\cdot}m^{1/2}$ and 279 MPa.

The Effect of SiC Powder Size at Reaction Bonded SiC Composite Fabricated by a Molten Si Infiltration Method (용융 Si 침윤법에 의해 제조된 반응소결 탄화규소 복합체에서 SiC 입자 크기의 영향)

  • Yun, Sung-Ho;Cho, Kyung-Sun;Tan, Phang Nhun;Cheong, Hun;Kim, Young-Do;Park, Sang-Whang
    • Journal of the Korean Ceramic Society
    • /
    • v.45 no.8
    • /
    • pp.486-492
    • /
    • 2008
  • Reaction bonded silicon carbide(RBSC) composite for heat-exchanger was fabricated by molten Si infiltration method. The raw materials with variable particle sizes were used in this experience. The finer the particle size in sintered silicon carbide was the more increasing 3-point bending strength and fracture toughness. As the adaptable particle sizes had been occupied interstice arising from packing sample, the mechanical properties were increased. In the PCS1-1 sample, the 3-point bending strength and fracture toughness were 323MPa and $4.9\;MPa{\cdot}m^{1/2}$, respectively.

방전플라즈마 소결에 의한 SiC-$ZrB_2$ 복합체 개발

  • Kim, Cheol-Ho;Sin, Yong-Deok;Ju, Jin-Yeong;Lee, Jeong-Hun;Lee, Hui-Seung;Kim, Jae-Jin;Lee, Jong-Seok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2009.11a
    • /
    • pp.87-87
    • /
    • 2009
  • The composites were fabricated by adding 30, 40, 50, 60[vol.%] Zirconium Diboride(hereafter, $ZrB_2$) powders as a second phase to Silicon Carbide(hereafter, SiC) matrix. SiC-$ZrB_2$ composites were sintered by Spark Plasma Sintering(hereafter, SPS) in argon gas atmosphere. The relative density SiC+30[vol.%]$ZrB_2$, SiC+40[vol.%]$ZrB_2$, SiC+50[vol.%]$ZrB_2$ and SiC+60[vol.%]$ZrB_2$ composites are 94.98[%], 99.57[%], 96.58[%] and 93.62[%] respectively.

  • PDF