Removal of Fe, Si from Silicon Carbide Sludge Generated in the Silicon Wafer Cutting Process
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Park, Hoey Kyung
(Department Chemical Engineering, Kongju National University)
Go, Bong Hwan (Department Chemical Engineering, Kongju National University) Park, Kyun Young (Department Chemical Engineering, Kongju National University) Kang, Tae Won (Department Chemical Engineering, Kongju National University) Jang, Hee Dong (Rare Metals Research Center, Korea Institute of Geoscience & Mineral Resources (KIGAM)) |
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