• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.50-53
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• 2003

CMP (chemical mechanical polishing) process remained to solve several problems in deep sub-micron integrated circuit manufacturing process. especially consumables (polishing pad, backing film, slurry, pad conditioner), one of the most important components in the CMP system is the slurry. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are important in determining polish rate and planarization ability of a CMP process. However, the cost of abrasives is still very high. So, in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.145-148
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• 2003

Recently, the recycle of CMP (chemical mechanical polishing) slurries have been positively considered in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in CMP process. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are one of the most important components. Especially, the abrasive particles of slurry are needed in order to achieve a good removal rate. However, the cost of abrasives, is still very high. In this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slury, As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• 한국결정성장학회지
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• 제10권1호
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• pp.48-54
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• 2000

kaolin과 수산화알루미늄을 이용하여 mullite를 합성하는데 있어서 출발원료의 조성을 silica rich, stoichiometric, alumina rich 조성으로 준비하여 각각의 원료로부터 mullite를 합성할 때 mullite-seed가 미치는 영향을 연구하였다. 그 결과 silica rich 조성과 stoichiometric 조성에서는 mullite-seed의 첨가량이 증가할수록 꺾임강도값이 증가하며, alumina rich 조성에서는 mullite-seed의 첨가량이 증가할수록 꺾임강도값은 감소하는 경향을 보였다. 같은 양의 mullite-seed를 첨가했을 때 미세구조는 alumina 첨가 함량이 증가할수록 치밀도가 감소하고, aspect ratio는 증가하는 경향을 나타내었다. 순도면에서는 mullite정량결과 모든 조성에서 mullite-seed의 첨가량이 많을수록 합성된 mullite 결정상의 함량이 증가하는 경향을 보였다.

• 한국전기전자재료학회논문지
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• 제17권2호
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• pp.138-143
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• 2004

CMP (Chemical Mechanical Polishing) technology for global planarization of multilevel interconnection structure has been widely studied for the next generation devices. Among the consumables for CMP process, especially, slurry and their chemical compositions play a very important role in the removal rates and within-wafer non-uniformity (WIWNU) for global planarization ability of CMP process. However, CMP slurries contain abrasive particles exceeding 1 ${\mu}{\textrm}{m}$ size, which can cause micro-scratch on the wafer surface after CMP process. Such a large size particle in these slurries may be caused by particle agglomeration in slurry supply-line. In this work, to investigate the effects of agglomeration on the performance of oxide CMP slurry, we have studied an aging effect of silica slurry as a function of particle size distribution and aging time during one month. We Prepared and compared the self-developed silica slurry by adding of alumina powders. Also, we have investigated the oxide CMP characteristics. As an experimental result, we could be obtained the relatively stable slurry characteristics comparable to aging effect of original silica slurry. Consequently, we can expect the saving of high-cost slurry.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2013년도 추계 학술논문 발표대회
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• pp.68-71
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• 2013

Reactive Powder Concrete (RPC) is an ultra high strength and high ductility cement-based composite material and has shown some promise as a new generation concrete in construction field. It is characterized by a silica fume-cement mixture with very low water-binder (w/b) ratio and very dense microstructure, which is formed using various powders such as cement, silica fume and very fine quartz sand (0.15~0.4mm) instead of ordinary coarse aggregate. However, the unit weight of cement in RPC is as high as 900~1,000 kg/㎥ due to the use of very fine sand instead of coarse aggregate, and a large volume of relatively expensive silica fume as a high reactivity pozzolan is also used, which is not produced in Korea and thus must be imported. Since the density of RPC has a heavy weight at 2.5~3.0 g/㎤. In this study, the modified RPC was made by the combination of ternary pozzolanic materials such as blast furnace slag and fly ash, silica fume in order to economically and practically feasible for Korea's situation. The fire resistance and structural behavior of the modified RPC exposed to high temperature were investigated.

• 대한화장품학회지
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• 제45권4호
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• pp.409-414
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• 2019

실리카와 폴리메틸실세스퀴옥세인(polymethylsilsesquioxane, PMSQ)은 화장품 원료로 널리 쓰이는 실리콘 분체이다. 본 연구팀은 각각 실리카와 PMSQ의 전구체로서 테트라에톡시실란(tetraethyoxysilane, TEOS)과 메틸트라이메톡시실란(methyltrimethoxysilane, MTMS)을 사용하여 졸-겔 법(sol-gel method)을 통해 실리카-PMSQ 복합분체를 합성하였다. 또한, 합성에 사용된 실란 단량체인 TEOS와 MTMS의 단순한 비율 조절만으로 복합분체의 형태 제어에 성공하였다. 실리카-PMSQ 복합분체는 구형, 라즈베리형, 도넛형, 총 3가지 형태를 띠었고, 공통적으로 사용감이 부드럽고 수분산에 용이하며 소프트 포커스 효과를 나타내었다. 복합분체의 형태에 따라서 사용감과 밀착력, 소프트 포커스 효과의 강도에 차이가 있었다. 라즈베리형 복합분체는 가장 강한 소프트 포커스 효과를 보였고, 도넛형 복합분체는 가장 강한 밀착력을 보였으며, 구형 복합분체는 가장 부드러운 사용감을 보였다. 본 연구 결과를 바탕으로, 실리카-PMSQ 복합분체를 원하는 형태로 간편하게 합성할 수 있을 것이다. 더 나아가, 목적에 맞는 복합분체를 선택하여 화장품에 적용할 수 있을 것이다.

• 한국세라믹학회지
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• 제32권7호
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• pp.853-857
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• 1995

ZrSiO4 powders were prepared from partially hydrolyzed solution of Si(OC2H5)4 and ZrOCl2.8H2O solution by the sol-gel method and formation rate of ZrSiO4 on the reaction parameter was investigated. In order to prepare homogeneous ZrSiO4 precursor gels, the H2O/Si(OC2H5)4 molar ratio of about 2, the pH of the ZrOCl2.8H2O solution fo about 4 and stirring time of the mixed solutions of about 2 hrs were appropriate. Formation of temperature of ZrSiO4 reduced about 15$0^{\circ}C$ by milling and formation of ZrSiO4 at 1300~135$0^{\circ}C$ showed an accelerative increase through the hedvall effect by silica.

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 1997년도 봄 학술발표회 논문집
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• pp.136-145
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• 1997

The purpose of this study is to develope of alternative adimixture for manufacture of PHC pile(compressive strength above 800kg/$\textrm{cm}^2$). For the investigation, properties of alternative admixture admixed with II-anhydrite and pozollanic fine powders(e.q., Fly-ash, Silica-Fume), the fluidity and viscosity in the cement pastes, the fluidity and compressive strength in mortars at steam curing condition, were respectively examined. Also, properties of compressive strength of concretes with exiting admixture(specimen name SM) and alterantive admixture(specimen name AP) for PHC pile, at steam and standard curing condition, were compared each other. As a result of this experimental study, it was found that specimens admixed with II-anhydrite and pozollanic fine powders had an increase on the fluidity of cement paste and mortar, and compressive strength of mortar and concrete was as good as concrete with SM.

• 한국세라믹학회지
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• 제53권5호
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• pp.541-547
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• 2016

In developing high temperature molds with advantages of the sand and precision (investment) castings, mechanical properties of the mold were improved through homogeneous coating of starting powders with an inorganic binder and improvement of fabrication process. Beads with mullite composition were employed for properties of the mold under high temperature, which was compared with artificial sands. Precursors of silica and sodium oxide were used as starting materials for an inorganic binder to achieve homogeneous coating on the starting powders. Strength was enhanced by the glass phase converted from the inorganic binder through heat treatment process. Also, two kinds of process, wet and dry processes, were incorporated to prepare mold specimens. Consequently, fabrication process of the mold with superior strength and high temperature applicability, compared with the previous molds for sand casting, could be suggested through control of the starting material and enhancement of the vitrification efficiency.

• Applied Biological Chemistry
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• 제33권4호
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• pp.315-318
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• 1990

분쇄되지 않은 미량의 원제를 수화제로 제제하는데는 미분상 다공성 증량제의 물리성을 이용한 흡착법이 유호하다. 밀리그램 단위의 농약 원제를 휘발성 유기용매에 용해시킨 후 계면활성제 혼합물이 흡착되어 있는 미분상의 합성실리카에 흡수시키고 건조하여 11종의 10% 수화제를 제제하였다. 원료 상태의 합성실리카와 시료수화제의 입도분포를 측정하여 평균 입경의 변화를 관찰하였다. 이들 수화제중 pencycuron과 vinclozolin을 제외한 9종의 시료는 2시간후에도 80%이상의 현수율을 나타냈다. 제제중 유효성분량을 $30{\sim}50%$로 증가시켜도 4종의 시료중 3종에서 현수율의 변화가 거의 없었다. 또한 이들 수화제 시료는 현수성과 거의 무관하게 생리활성이 기존제품과 대등하게 나타나서 수화제로서 그 기능이 우수한 것으로 인정되었다.