• Title/Summary/Keyword: Side-lobe pattern

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Scattering Bar Optical Proximity Correction to Suppress Overlap Error and Side-lobe in Semiconductor Lithography Process (Overlap Margin 확보 및 Side-lobe 억제를 위한 Scattering Bar Optical Proximity Correction)

  • 이흥주
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.4 no.1
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    • pp.22-26
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    • 2003
  • Overlap Errors and side-lobes have been simultaneously solved by the rule-based correction using the rules extracted from test patterns. Lithography process parameters affecting attPSM lithography process have been determined by the fitting method to the real process data. The correction using scattering bars has been compared to the Cr shield method. The optimal insertion rule of the scattering bal's has made it possible to suppress the side-lobes and to enhance DOF at the same time. Therefore, in this paper, the solution to both side-lobe and overlap Error has been proposed using rule-based confection. Compared to the existing Cr shield method, the proposed rule-based correction with scattering bars can reduce the process complexity and time for mask production.

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OPC Technique in The AttPSM Lithography Process Using Scattering Bars (Scattering Bar를 이용한 AttPSM Lithography 공정에서의 OPC)

  • 이미영;이홍주
    • Proceedings of the KAIS Fall Conference
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    • 2002.11a
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    • pp.201-204
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    • 2002
  • Overlay margin 확보를 위한 oversizing과, design rule checking, jog filtering를 통하여 side-lobe를 추출하였다. 이렇게 추출한 side-lobe를 extent하고, Cr pattern을 정의하여 side-lobe 현상을 해결할 수 있었다. 하지만 이 방법은 mask제조 공정이 복잡하므로 Cr shield방식의 단점인 복잡한 mask제작공정과 구조를 단순화하기 위하여 scattering bar를 이용하였다. 따라서, scattering bar를 삽입하기 위한 rule을 생성하여 metal layer에 적용하고 aerial image simulation을 통해 side-lobe 현상이 억제되었음을 확인하였다. 그리고 앞에서와는 반대로 background clear의 경우에 발생하는 side-lobe에 scattering bar를 적용하여 억제됨을 확인하였다.

STUDY ON THE OPTIMAL PLANAR ARRAY STRUCTURE WITH TRIANGULAR LATTICE FOR SIDE-LOBE REDUCTION (삼각 격자구조를 갖는 평면배열 안테나의 부엽 레벨 감소를 위한 최적 평면배열 형상에 관한 연구)

  • 배지훈;성낙선;이태윤;김종면;표철식
    • Proceedings of the Korea Electromagnetic Engineering Society Conference
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    • 2002.11a
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    • pp.250-254
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    • 2002
  • In this paper, we design an optimized planar array structure with triangular lattice for side-lobe reduction using a genetic algorithm. A constraint optimization is implemented by optimally removing some outer array elements far from the array center. It is shown that only the proper array shape without optimizing the magnitudes and phases of each array antenna can give low side-lobe level with a slight main beam broadening.

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Design of Scannable Non-uniform Planar Array Structure for Maximum Side-Lobe Reduction

  • Bae, Ji-Hoon;Kim, Kyung-Tae;Pyo, Cheol-Sig;Chae, Jong-Suk
    • ETRI Journal
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    • v.26 no.1
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    • pp.53-56
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    • 2004
  • In this letter, we propose a novel design scheme for an optimal non-uniform planar array geometry in view of maximum side-lobe reduction. This is implemented by a thinned array using a genetic algorithm. We show that the proposed method can maintain a low side-lobe level without pattern distortion during beam steering.

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An Effective Method to Form Side-Lobe Blanking Beam of Fully Digital Active Phased Array Antenna (완전 디지털 능동위상배열 안테나의 효과적인 부엽 차단 빔 형성 방법)

  • Joo, Joung-Myoung;Park, Jongkuk;Lim, Jae-Hwan;Lee, Jae-Min
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.22 no.4
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    • pp.59-65
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    • 2022
  • In this paper, a digital active phased array antenna is briefly introduced and beam forming method for a dual-channel side-lobe blanking applied to blank the side-lobe of the main beam is described. Next, the antenna performance was verified from results of design and antenna near-field measurement for the antenna main beam and side-lobe blanking beam. Then, a single-channel side-lobe blanking beam forming method was proposed to reduce the number of channels than the existing system operating dual-channel side-lobe blanking beam and weight distribution for each element of the side-lobe blanking antenna was designed with the proposed method. Finally, the designed single-channel side-lobe blanking beam pattern and blanking ability were verified and compared with the dual-channel side-lobe blanking beam. In addition, by comparing/verifying the conventional dual-channel and the proposed single-channel side-lobe blanking beam patterns measured through the receiving near-field test of the digital active phased array antenna and their ability to blank side-lobe of the main beam, validity of the proposed method for forming single-channel side-lobe blanking beam was confirmed.

Design of an Optimal Planar Array Structure with Uniform Spacing for Side-Lobe Reduction

  • Bae, Ji-Hoon;Seong, Nak-Seon;Pyo, Cheol-Sig;Park, Jae-Ick;Chae, Jong-Suk
    • Journal of electromagnetic engineering and science
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    • v.3 no.1
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    • pp.17-21
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    • 2003
  • In this paper, we design an optimal planar array geometry for maximum side-lobe reduction. The concept of thinned array is applied to obtain an optimal two dimensional(2-D) planar array structure. First, a 2-D rectangular array with uniform spacing is used as an initial planar array structure. Next, we modify the initial planar array geometry with the aid of thinned array theory in order to reduce the maximum side-lobe level. This is implemented by a genetic algorithm under some constraint, minimizing the maximum side-lobe level of the 2-D planar array. It is shown that the optimized planar array structure can achieve low side-lobe level without optimizing the excitations of the array antennas.

Development of Split-beam Acoustic Transducer for a 50 kHz Fish Sizing Echo Sounder (50 kHz 체장어군탐지기용 분할 빔 음향 변환기의 개발)

  • Lee, Dae-Jae;Lee, Won-Sub
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.44 no.4
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    • pp.413-422
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    • 2011
  • An improved split-beam transducer for a 50 kHz fish-sizing echo sounder was developed. The main objective of this study was to minimize the side lobe level in the beam pattern and the distance between acoustic centers for adjacent transducer quadrants in the geometrical arrangement of array elements while maintaining a given number of transducer elements and beam width. To achieve these goals, a 32-element planar array transducer ($6{\times}6$ array with one element in each corner missing) was designed using the Dolph-Chebyshev shading function to suppress side lobes in the array beam pattern and fabricated by arranging the inter-element spacing to be substantially equal to half the wavelength using the transducer element of 0.4 times the wavelength in diameter. The performance characteristics of this split-beam transducer were evaluated in the experimental water tank of $5m{\times}5m{\times}6m$ (length${\times}$height${\times}$width). In this study, the design goal of the beam width and side lobe level for transmitting a beam pattern was initially set at $21^{\circ}$ and -30 dB, respectively. However, the measured beam width at 3 dB was $21^{\circ}$ in both directions with side lobe levels of -24.7 dB in the horizontal plane and -25.6 dB in the vertical plane. The averaged beam width at -3 dB of the receiving beam patterns for four receiving quadrants was $31.4^{\circ}$. The transmitting voltage response was 161.5 dB (re $1{\mu}Pa$/V at 1 m) at 50.23 kHz with a bandwidth of 2.16 kHz, and the averaged receiving sensitivity for four receiving quadrants was -178.13 dB (re 1 V/${\mu}Pa$) at 49.8 kHz with a bandwidth of 2.64 kHz.

Frame synchronization Confirmation Technique Using Pilot Pattern

  • Song, Young-Joon
    • Journal of Communications and Networks
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    • v.2 no.1
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    • pp.69-75
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    • 2000
  • A new frame synchronization confirmation technique using a pilot pattern of both uplink and downlink channels is proposed for W-CDMA (Wideband Code Division Multiple Access) system. It is shown that by using this technique, we can cancel the side lobe for autocorrelation functions of the frame synchronization words of pilot pattern have the maximum to-of-phase autocorrelation value "4" with two peak values equal in magnitude and opposite in polarity at zero and middle shifts. Due to this side lobe cancellation effect, therefore, the autocorrelation function of the frame synchronization words becomes ideal for the frame synchronization confirmation since double maximum correlation values equal in magnitude and opposite polarity at zero ad middle shifts can be achieved. This property can be used to double check frame synchronization timing and thus. improve the frame synchronization confirmation performance.

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A Study on Sidelobe Reduction Using Kaiser Window in Ultrasonic Imaging System (초음파 영상시스템에서 카이저 윈도우를 이용한 사이드 로브 감축에 관한 연구)

  • Na, Byeong-Yoon;Ahn, Young-Bok;Jeong, Mok-Kun
    • Journal of Biomedical Engineering Research
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    • v.17 no.2
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    • pp.189-200
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    • 1996
  • In this paper, we compared the performance of the Kaiser window with those of others as a weight function of well known anodization technique for regression of side lobe in a field pattern resulted from focusing of transducer array. The Kaiser window is an window providing many types of curve with several variables. In order to compare performance of the Kaiser window as the weight function, anodization results of the previously used Hamming window function and the Matched Gaussian function are compared Result of computer simulation, the pertormance of Kaiser window with $\delta$=0.0025 in side lobe regression was better than that of Hamming window or Matched Gausian function.

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A Study on Characteristics of the Twin Tree Array Structure of the Triangular Patch Array Antenna (삼각형 패치 트윈 트리 배열 안테나의 특성 연구)

  • Chang, Tae-Soon;Kang, Sang-Won
    • Journal of IKEEE
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    • v.24 no.2
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    • pp.372-377
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    • 2020
  • This paper is based on the triangular inset patch antenna as the basic structure, and the array structure is the twin tree form to improve the antenna's main lobe gain and reduce the side lobe gain. A twin tree structure was implemented by placing two identical trees of 2-4-6 arrays of triangular inset patches side by side. The parametric analysis confirmed that the gap between tree structures arranged side by side is most effective for impedance matching. The fabricated antenna has a gain of 16.74 dBi at 24.15 GHz, and the beam width of the main lobe is 22° in the E-plane and 6° in the H-plane. The antenna size was 125 mm × 50 mm, and a Taconic TLC substrate with a dielectric constant of 3.2 was used. Although the main lobe gain is improved over the twin tree structure, The directivity in the beam pattern due to the mutual interference of the two tree array structure can be improved.