• 제목/요약/키워드: SiC filter

검색결과 115건 처리시간 0.032초

RF 마그네트론 스퍼터링에 의한 SAW 필터용 ZnO 압전 박막에 관한 연구 (A Study on the ZnO Piezoelectric Thin Films for SAW Filter by RF Magnetron Sputtering)

  • 최형욱;김경환;김상종;강종윤;안병국;윤석진
    • 한국전기전자재료학회논문지
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    • 제15권9호
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    • pp.798-807
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    • 2002
  • ZnO thin films on Si wafer were deposited by RF magnetron reactive sputter with various RF power, chamber pressure, argon/oxygen gas ratios ana substrate temperatures. Crystallinities, surface morphologies, and electrical properties of the films were investigated by XRD, AFM, RBS, and electrometer(keithley 617). ZnO films showed a strong c-axis preferred orientation. Surface roughness and resistivity were changed by the argon/oxygen gas ratio. The minimum surface roughness of 12${\AA}$ and maximum resistivity of $10^8\Omega cm$ were achieved at Ar/O$O_2$=0/100.

전해질 분리판용 세라믹 부직포와 리튬염간의 반응성 (Reaction Behavior of Ceramic Mat with Lithium Salt for the Electrolyte Separators of Thermal Batteries)

  • 조광연;류도형;신동근;임경훈;진은주;김현이;하상현;최종화
    • 한국세라믹학회지
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    • 제46권6호
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    • pp.587-591
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    • 2009
  • Lithium salt have been used mainly as electrolyte of thermal battery for electricity storage. Recently, The 3phase lithium salt(LiCl-LiF-LiBr) is tried to use as electrolyte of thermal battery for high electric power. It is reported that LiCl-LiF-LiBr salt have high ion mobility due to its high lithium ion concentration. Solid lithium salt is melt to liquid state at above $500{^{\circ}C}$. The lithium ion is easily reacted with support materials. Because the melted lithium ion has small ion size and high ion mobility. For the increasing mechanical strength of electrolyte pellet, the research was started to apply ceramic filter to support of electrolyte. In this study, authors used SiOC web and glass fiber filter as ceramic mat for support of electrolyte and impregnated LiCl-LiF-LiBr salt into ceramic mat at above $500{^{\circ}C}$. The fabricated electrolyte using ceramic mat was washed with distilled water for removing lithium salt on ceramic mat. The washed ceramic mat was observed for lithium ion reaction behavior with XRD, SEM-EDS and so on.

Teaklite DSP Core 를 이용한 이동통신 단말기용 음향반향제거기의 실시간 구현 (Real-Time Implementation of Acoustic Echo Canceller for Mobile Handset Using TeakLite DSP Core)

  • 권홍석;김시호;장병욱;배건성
    • 대한전자공학회논문지SP
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    • 제39권2호
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    • pp.128-136
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    • 2002
  • 본 논문에서는 이동통신 단말기의 음성부호화기에 탑재할 수 있도록 TeakLite DSP Core를 이용한 음향반향제거기(Acoustic Echo Canceller)를 실시간으로 구현하였다. 음성부호화기에서 음향반향제거기가 사용할 수 있는 연산량의 제한때문에 적응필터는 NLMS(Normalized Least Mean Square) 알고리즘을 이용한 FIR 필터를 사용하였다. 먼저 음향반향제거기를 부동소수점 C-언어로 구현한 다음 고정소수점 시뮬레이션을 통하여 고정소수점 연산으로 바꾸었다. 그리고 고정소수점 연산 결과를 기반으로 어셈블리 언어로 프로그램을 작성하고 최적화 과정을 거쳐 실시간으로 동작하도록 하였다. 최종적으로 구현된 반향제거기는 프로그램 메모리가 624 words이고 데이터 메모리는 811 words이었다. 샘플링 주파수를 8 ㎑로 하였을 때, 32 msec의 반향경로 지연시간에 해당되는 256 차수의 필터를 이용한 경우에는 14.12 MIPS의 연산량을, 16 msec의 반향경로 지연시간에 해당되는 128 차수의 필터를 이용한 경우에는 9.00 MIPS의 연산량을 필요로 하였다.

Hybrid MBE Growth of Crack-Free GaN Layers on Si (110) Substrates

  • 박철현;오재응;노영균;이상태;김문덕
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.183-184
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    • 2013
  • Two main MBE growth techniques have been used: plasma-assisted MBE (PA-MBE), which utilizes a rf plasma to supply active nitrogen, and ammonia MBE, in which nitrogen is supplied by pyrolysis of NH3 on the sample surface during growth. PA-MBE is typically performed under metal-rich growth conditions, which results in the formation of gallium droplets on the sample surface and a narrow range of conditions for optimal growth. In contrast, high-quality GaN films can be grown by ammonia MBE under an excess nitrogen flux, which in principle should result in improved device uniformity due to the elimination of droplets and wider range of stable growth conditions. A drawback of ammonia MBE, on the other hand, is a serious memory effect of NH3 condensed on the cryo-panels and the vicinity of heaters, which ruins the control of critical growth stages, i.e. the native oxide desorption and the surface reconstruction, and the accurate control of V/III ratio, especially in the initial stage of seed layer growth. In this paper, we demonstrate that the reliable and reproducible growth of GaN on Si (110) substrates is successfully achieved by combining two MBE growth technologies using rf plasma and ammonia and setting a proper growth protocol. Samples were grown in a MBE system equipped with both a nitrogen rf plasma source (SVT) and an ammonia source. The ammonia gas purity was >99.9999% and further purified by using a getter filter. The custom-made injector designed to focus the ammonia flux onto the substrate was used for the gas delivery, while aluminum and gallium were provided via conventional effusion cells. The growth sequence to minimize the residual ammonia and subsequent memory effects is the following: (1) Native oxides are desorbed at $750^{\circ}C$ (Fig. (a) for [$1^-10$] and [001] azimuth) (2) 40 nm thick AlN is first grown using nitrogen rf plasma source at $900^{\circ}C$ nder the optimized condition to maintain the layer by layer growth of AlN buffer layer and slightly Al-rich condition. (Fig. (b)) (3) After switching to ammonia source, GaN growth is initiated with different V/III ratio and temperature conditions. A streaky RHEED pattern with an appearance of a weak ($2{\times}2$) reconstruction characteristic of Ga-polarity is observed all along the growth of subsequent GaN layer under optimized conditions. (Fig. (c)) The structural properties as well as dislocation densities as a function of growth conditions have been investigated using symmetrical and asymmetrical x-ray rocking curves. The electrical characteristics as a function of buffer and GaN layer growth conditions as well as the growth sequence will be also discussed. Figure: (a) RHEED pattern after oxide desorption (b) after 40 nm thick AlN growth using nitrogen rf plasma source and (c) after 600 nm thick GaN growth using ammonia source for (upper) [110] and (lower) [001] azimuth.

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집진장치의 유입구조에 따른 세라믹필터의 철입자 제거특성에 미치는 영향 (Effect of inlet structure of filtration system on the removal characteristics of iron particles by ceramic candle filters)

  • 박영옥;정주영;서용칠
    • 한국입자에어로졸학회지
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    • 제5권4호
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    • pp.189-197
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    • 2009
  • Wet-type particulate removal system is employed in most of ironmaking processes. These de-dusting systems require additional downstream aggregates for treatment of water and for drying of the collected slurry. Thus dried slurry can be pressed in shape of briquettes and recycled in the steelmaking process. Different from the wet-type, the dry-type particulate removal systems generate no slurry. A high-temperature, high-pressure de-dusting system with inertial inlet was developed. The target application of this system was to remove particulate matter generated from the novel ironmaking process and other steelmaking processes. In this study we conducted tests with this newly developed system to evaluate the performance of the silica-carbide (SiC) ceramic filters. In addition, for purpose of comparison, we also conducted tests with a unit which has conventional direct inlet. Fe-Particles collected from the novel ironmaking process were used in our tests as test dusts. The temperature and the pressure were kept constant at their respective values $800^{\circ}C$ and $3kg_f/cm^2$.

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중력여과 방식의 MBR을 이용한 하수처리에서 HRT 변화에 따른 EPS의 거동과 막오염에 대한 영향 (Behavior and Influence of EPS on Membrane Fouling by Changing of HRT in MBR with Gravitational Filtration)

  • 김시원;곽성진;이의신;홍승모;민경석
    • 한국물환경학회지
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    • 제22권5호
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    • pp.865-870
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    • 2006
  • The behavior and influence of EPS on membrane fouling by changing of hydraulic retention time was investigated, using lab. scale submerged membrane bio-reactor, which was operated with gravitational filtration and fed supernatant of primary sedimentation in waste water treatment plant as influent. The membrane was adopted micro-filter of polyethylene hollow fiber. EPS was analysed as polysaccharides and protein especially, into soluble and bound EPS separately. The concentration of soluble EPS was increased at short HRT, then membrane fouling was rapidly progressed and flux was depressed. The most of EPS clogged membrane pore were polysaccharides, while protein was important parameter affected on membrane fouling because of it's more accumulating in the more term operating.

ECU 커먼레일 디젤기관에 있어서 매연 및 NOX 배출물 동시 저감용 일체형 요소-SCR 촉매필터 시스템의 특성에 관한 연구 (A Study on Characteristics of an Integrated Urea-SCR Catalytic Filter System for Simultaneous Reduction of Soot and NOX Emissions in ECU Common-rail Diesel Engines)

  • 배명환
    • 한국자동차공학회논문집
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    • 제22권4호
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    • pp.111-120
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    • 2014
  • The aim of this study is to develop an integrated urea-SCR catalytic filter system for reducing soot and $NO_X$ emissions simultaneously in diesel engines. In this study, the characteristics of exhaust emissions relative to reactive activation temperature under four kinds of engine loads are experimentally investigated by using a four-cycle, four-cylinder, direct injection type, water-cooled turbo intercooler ECU common-rail diesel engine with the integrated urea-SCR $MnO_2-V_2O_5-WO_3/TiO_2/SiC$ catalytic filter system operating at three kinds of engine speeds. The urea-SCR reactor is used to reduce $NO_X$ emissions, and the catalytic filter system is used to reduce soot emissions. The reactive activation temperature is very important for reacting a reducing agent with exhaust emissions. The reactive activation temperatures in this experiment is applied to 523, 573 and 623 K. The fuel is sprayed by the pilot and main injections at the variable injection timing between BTDC $15^{\circ}$ and ATDC $1^{\circ}$ according to experimental conditions. It is found that the $NO_X$ conversion rate is the highest as 83.9% at the reactive activation temperature of 523 K in all experimental conditions of engine speed and load, and the soot emissions shown by the average reduction rate of approximately 93.3% are almost decreased below 0.6% in all experimental conditions regardless of reactive activation temperatures. Also, the THC and CO emissions by oxidation reaction of Mn, V and Ti are shown in the average reduction rates of 70.3% and 38% regardless of all experimental conditions.

방사성의약품 합성에서 발생하는 방사성기체의 효율적 차단 (An Effective Block of Radioactive Gases for the Storage During the Synthesis of Radiopharmaceutical)

  • 지용기;김동일;김시활;원문희;최성욱;최춘기;석재동
    • 핵의학기술
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    • 제16권2호
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    • pp.126-130
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    • 2012
  • 방사성의약품 제조 시 휘발성 기체의 경우에 완전 차폐가 되지 않고, Hot cell 외부로 그리고 배기덕트를 통해 작업자에게 외부피폭은 물론 호흡을 통해 내부피폭을 가져오게 한다. 처음에는 Hot cell 자체의 배출구를 막아서 방사성기체를 차단하려하였으나 장치에 맞는 기체 밀폐형 댐퍼의 제작이 어렵고, 크기가 맞지 않아서 설치 후에 여전히 문제점이 개선되지 않았다. 그러나 Tedlar gas sampling bag의 사용으로 합성 장치의 가스 배출구를 연결하여 방사성 기체를 저장하고 10반감기가 지난 후에 배출함으로써 작업자의 피폭을 확연히 줄이게 되었으며 $^{18}F$ 방사성 기체는 Hot cell 배출구에 활성탄 필터를 연결하고 최종 배출구에 2차 활성탄 필터를 사용함으로써 배출되는 방사능 농도를 90% 이상 줄여주었다. 단 반감기의 핵종인 경우는 위와 같은 경우를 이용하여 다음날 작업을 할 수 있지만 반감기가 긴 핵종들 같은 경우는 다음날 처리 할 수 없는 문제점들이 발생한다. Decay tank의 추가적인 문제점들을 보완하거나 기체상의 여러 방사성 입자들을 포집 할 수 있는 물질들이 만들어져야 할 것이다. 현재 우리나라는 최종 배출 공기 중 방사능 농도만을 규제하고 있으나 유럽 같은 경우 일일 배출 양과 연간 배출도 규제를 하고 있다. 방사성의약품 합성 시 발생하는 많은 방사성 물질들을 보다 효과적으로 친환경적으로 처리할 수 있는 여러 연구들이 이루어져야 할 것이다.

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고속도로 톨게이트 부스의 공기 중 분진 및 침착 분진 특성 (Characteristics of Airborne and Deposited Dust in Expressway Toll Booths)

  • 남미란;정종현;피영규
    • 한국산업보건학회지
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    • 제30권1호
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    • pp.10-17
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    • 2020
  • Objectives: This study was performed to evaluate the total dust, size-selective dust, and heavy metal concentrations generated inside and outside toll booths on an expressway and to identify the source through analysis of the components of the deposited dust. Methods: A total of 32 samples were collected from eight expressway toll booths. Each total dust sample was collected using a 37 mm PVC filter attached to a personal air sampler. Heavy metal samples were collected according to NIOSH method 7300. The size-selective dust concentrations were identified using a DustMate, and deposited dust was analyzed by WD-XRF and UHR-FE-SEM. Results: The geometric mean concentrations of the total dust inside and outside the toll booths were 337.5 ㎍/㎥ and 342.7 ㎍/㎥, respectively. The overall concentrations of TSP, PM10, PM2.5, and PM1 were higher on the outside of the toll booths, as the particle size of dust was larger, and higher in the underground passage as the dust size was smaller. The real-time analysis of the dust concentrations of TSP, PM10, PM2.5, and PM1 revealed to be higher at morning and evening times than other times because of heavy traffic. The element components of deposited dust in the toll booth were related to natural sources rather than artificial sources. Among the chemical components in the deposited dust analyzed by WD-XRF, SiO2 was the highest. For the elements analyzed by UHR-FE-SEM, C was the highest, followed by O, and Si. Conclusions: In order to reduce the dust concentrations around toll booths on an expressway, it is necessary to periodically clean surrounding areas such as underground passages, and it is also necessary to remove deposited dust inside the toll booth from time to time.

탄성표면파 필터용 ZnO 압전 박막의 제조 (The Preparation of ZnO Piezo-electric Thin Film for Surface Acoustic Wave Filter)

  • 이동윤;박재준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 춘계학술대회 논문집
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    • pp.10-14
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    • 2005
  • Zinc Oxide(ZnO) thin films on Si (100) substrates were deposited by RF magnetron reactive sputtering. The characteristics of zinc oxide thin films with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance were investigated. To analyze a crystallographic properties of the films, $\theta/2{\theta}$ mode X -ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity, and surface roughness highly depended on Ar/$O_2$ gas ratios. The resistivity of ZnO thin films rapidly increased with increasing oxygen ratio and the resistivity value of $9{\times}10^7\;{\Omega}cm$ was obtained at a working pressure of 10 mTorr with Ar/$O_2$=50/50. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with Ar/$O_2$=50/50 showed the excellent roughness value of $28.7{\AA}$.

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