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http://dx.doi.org/10.4313/JKEM.2002.15.9.798

A Study on the ZnO Piezoelectric Thin Films for SAW Filter by RF Magnetron Sputtering  

최형욱 (경원대학교 전기정보전자공학부)
김경환 (경원대학교 전기정보전자공학부)
김상종 (KIST 박막연구센터)
강종윤 (KIST 박막연구센터)
안병국 (전북대학교 신소재공학부)
윤석진 (KIST 박막연구센터)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.15, no.9, 2002 , pp. 798-807 More about this Journal
Abstract
ZnO thin films on Si wafer were deposited by RF magnetron reactive sputter with various RF power, chamber pressure, argon/oxygen gas ratios ana substrate temperatures. Crystallinities, surface morphologies, and electrical properties of the films were investigated by XRD, AFM, RBS, and electrometer(keithley 617). ZnO films showed a strong c-axis preferred orientation. Surface roughness and resistivity were changed by the argon/oxygen gas ratio. The minimum surface roughness of 12${\AA}$ and maximum resistivity of $10^8\Omega cm$ were achieved at Ar/O$O_2$=0/100.
Keywords
ZnO; Preferred orientation; Surface roughness; Resistivity; RF magnetron sputter;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 Yasuhiro Igasaki and Hiromi Saito, 'Substrate temperature dependence of electrical properties of ZnO:Al epitaxial films on sapphire(1210)', J. Appl. Phys., Vol. 69, No. 4, p. 2190, 1991   DOI
2 H. Nanto, T. Minami, S. Shooii, and S. Takata, 'Electrical and optical properties of zinc oxide thin films prepared by magnetron sputtering for transparent electrode applications', J. Appl. Phys., Vol. 55, No. 4, p. 1029, 1984   DOI   ScienceOn
3 R. Wang, L. L. H. King, and Arthur W. Sleight, 'Highly conducting transparent thin films based on zinc oxide', J. mater. Res., Vol. 11, No. 7, p. 1659, 1996   DOI   ScienceOn
4 이동윤, 박용욱, 남 산, 이전국, 김현재, 윤석진, 황금찬, 'Ar/O2 에 따른 ZnO 박막의 c-축 배향성에 관한 연구', 전기전자재료학회논문지, 13권, 7호, p. 617, 2000
5 K. S. Chou and C. K Liu, Mater. Chem. Phys., 'Effects of excess zinc on the structure of reactively sputtered zinc oxide films', Vol. 37, No. 2, p. 156, 1994   DOI   ScienceOn
6 F. R. Blom, D. J. Yntema, F. C. M. Van De Pol, M. Elwenspoek, J. H. J. Fluitman, and Th. A. Popma, 'Thin-film ZnO micromechanical actuator at low frequencies', Sensors and Actuators., Vol. A21-A23, p. 226, 1990   DOI   ScienceOn
7 J. O. Barens, D. J. Leary, and A. G. Jordan, 'Relationship between deposition conditions and physical properties of sputtered ZnO', J. Electrochem. Soc., Vol. 127, No. 7, p. 1636, 1980   DOI   ScienceOn
8 Y. K. Kim, William D. Hunt, F. S. Hickernell, and R. J. Higgins, 'Surface acoustic wave properties of ZnO films on {001}-cut <110>-propagating GaAs substrates', J. Appl. Phys., Vol. 75, No. 11, p. 7299, 1994   DOI   ScienceOn
9 C. R. Aita, R. J. Lad, and T. C. Tisone, 'The effect of rf power on sputtered zinc oxide', J. Appl. Phys., Vol. 51, No. 12, p. 5405, 1980
10 박용욱, 신현용, 박정흠, 강종윤, 심성훈, 최지원, 윤석진, 김현재, 김경환, 최형욱, 'RF 마그네트론 스퍼터링에 의한 ZnO 박막 SAW 필터에 관한 연구', 전기전자재료학회논문지, 14권, 6호, p. 617, 2001   과학기술학회마을
11 박용욱, 윤석진, 최치원, 김현재, 정형진, 박창엽, 'RF 마그네트론 반응성 스퍼터링으로 제작된 ZnO/Glass 박막 특성', 전기전자재료학회논문지, 11권, 10호, p. 883, 1998
12 S. Pizzini, N, Butta, D. Narducci, and M. Palladino, 'Thick film ZnO resistive gas sensors', J. Electrochem. Soc., Vol. 136, No. 7, p. 1945, 1989   DOI   ScienceOn
13 M. J. Brett and R. R. Parsons, 'Structural properties of non-stoichiometric zinc oxide films', J. Mat. Sci., vol. 22, No. 10, p. 3611, 1987   DOI   ScienceOn