• Journal of Sensor Science and Technology
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• v.9 no.2
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• pp.113-119
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• 2000

In this work, Pd/Pt gate MISFET sensor using Pd membrane was fabricated to detect the hydrogen in DI water. A differential pair-type was used to minimize the intrinsic voltage drift of the MISFET. To avoid hydrogen induced drift of the sensor, the silicon dioxide/silicon nitride double layer was used as the gate insulator of the FET's. In order to eliminate the blister formation on the surface of the hydrogen sensing gate metal, Pd/Pt double metal layer was deposited on the gate insulator. For this type of application sensors need to be isolated from the DI water, and a Pd membrane was used to separate the sensor from the DI water. The output voltage change due to the variation of hydrogen concentration is linear from 100ppm to 500 ppm.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.136-136
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• 1999

박막의 탄성특성을 평가하는 방법으로 nano-indentation, Brillouin light scattering measurement, ultrasonic surface wave measurement, bulge test, vibration membrane method 등 여러 가지가 제시되어 왔다. 최근에는 탄성특성을 평가할 수 있는 간단한 방법으로 기판 식각 기법을 이용한 freehang, bridge 방법이 제시되었다. 이중에서 bridge 방법은 간단한 식각 기법을 이용하여 얇은 박막에서도 탄성 특성을 평가할 수 있는 방법으로 제시되었다. 그러나 식각 과정에서 발생하는 patch 부분의 under-cut으로 인해 정확한 bridge의 길이를 측정할 수 없게 되어 오차가 발생하고 있다. 본 연구에서는 bridge 방법에서 발생하는 오차를 줄이기 위한 방법으로, patch 부분에 etch-stop을 제작해 줌으로서 식각 과정에서 발생하는 under-cut을 효과적으로 제거시켰다. Etch-stop은 2장의 mask를 align key를 이용하여 제작하였다. 먼저 산화막이 형성되어 있는 Si 기판위에 mask 1을 이용하여 patch 부분을 lithography 작업하고, 습식 식각 공정을 한 뒤 DLC 필름을 증착시킨다. 다음으로 mask 2를 이용하여 bridge pattern을 제작하고, DLC 필름을 증착시킨 후 lift-off 기술과 산화막 등방식각 공정을 통해 bridge를 제작하였다. 이렇게 제작된 bridge를 통해 필름이 기판에 부착되기 위해 필요한 변형률을 측정하고, 독립적으로 측정된 필름의 잔류응력과 함께 박막의 응력-변형률 관계식에 적용시켜 biaxial elastic modulus, E/(1-v)를 구할 수 있었다. Sidl 첨가된 DLC 필름은 rf-PACVD 장비를 이용하여 증착하였다. 이때 전극과 플라즈마 사이의 바이어스 음전압은 -400V로 합성압력은 10mTorr로 고정하였다. 사용한 반응가스는 벤젠(C6H6)과 희석된 실렌(SiH4:2H=10:90)이며, 희석된 실렌의 첨가량을 조절하여 필름 내에 함유된 Si의 양을 조절하였다. 각각의 조건에서 증착시간을 조절하여 필름의 두께를 조절하였다. 필름의 잔류응력은 압축잔류 응력에 의해 발생한 필름/기판 복합체의 곡률을 laser 반사법을 이용하여 측정하고, 이 결과를 Brenner 등에 의해 유도된 식을 대입하여 계산하였다.

• Journal of Sensor Science and Technology
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• v.20 no.5
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• pp.317-321
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• 2011

A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2 ${\mu}m$ thick $SiN_x$ membrane. Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm. Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures of membranes on the platforms were $295^{\circ}C$, $297^{\circ}C$, and $296^{\circ}C$, respectively. Fabricated micro platform considered appropriate to apply for low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that $SnO_2$ nanopowder pastes were dropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors was tested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of $NO_2$.

• Journal of the Korean Chemical Society
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• v.28 no.3
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• pp.170-175
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• 1984

The transport rates of $H^+$ ion by DBC and DCC as carrier molecules through organic liquid membranes were determined at 25$^{\circ}$C. The transport rates depend highly on the dielectric constants of membrane solvents and these results were discussed in terms of Born's potential energy barrier methods. The sizes of anions also affect the transport rates and these results were well explained theoreticlly by extended Born's equation.

• Macromolecular Research
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• v.12 no.4
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• pp.413-421
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• 2004

Sulfonated poly(phthalazinone ether sulfone ketone) (SPPESK) membranes and sol-gel derived SPPESK/silica hybrid membranes have been investigated as potential polymer electrolyte membranes for direct methanol fuel cell (DMFC) applications. In comparison with the SPPESK membrane, the SPPESK/silica membranes exhibited higher water content, improved proton conductivity, and lower methanol permeability. Notably, the silica embedded in the membrane acted as a material for reducing the fraction of free water and as a barrier for methanol transport through the membrane. From the results of proton conductivity and methanol permeability studies, we suggest that the fractions of bound and free water should be optimized to obtain desirable proton conductivities and methanol permeabilities. The highly sulfonated PPESK hybrid membrane (HSP-Si) displayed higher proton conductivity (3.42 ${\times}$ 10$^2$ S/cm) and lower methanol permeability (4.15 ${\times}$ 10$\^$7/ $\textrm{cm}^2$/s) than those of Nafion 117 (2.54 ${\times}$ 10$^2$ S/cm; 2.36 ${\times}$ 10$\^$6/ $\textrm{cm}^2$/s, respectively) at 30$^{\circ}C$. This characteristic of the SPPESK/silica membranes is desirable for future applications related to DMFCs.

• Korean Journal of Food Science and Technology
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• v.20 no.1
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• pp.90-94
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• 1988

Sodium dodecyl sulfate-polyacrylamide gel electrophoresis (SDS-PAGE) and immunodiffusion method were used for the species differentiation of yeasts, Saccharomyces cerevisiae, Candida utils, Candida tropicalis, and Kleuyveromyces fragilis. Comparing the electrophoretic patterns of soluble and membrane proteins, Saccharomyces cereνisiae was similar to Candida utilis but was different from Candida tropicalis and Kleuyveromyces fragilis. In immunochemical properties of soluble proteins, Saccharomyces cerevisiae was almost identical with Candido utilis. However, Saccharomyces cerevisiae or Candida utilis was quite different from Candida tropicalis and Kleuyveromyces fragilis in their immunoreactivities. In immunochemical properties of membrane proteins, almost the same results were obtained irrespective of four yeast species. By using SDS-PAGE and immunodiffusion methods, Saccharomyces cerevisiae and Candida utilis were difficult to differentiate but both species were easily differentiated from Candida tropicalis and Kleuyveromyces fragilis.

• Applied Chemistry for Engineering
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• v.17 no.5
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• pp.458-464
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• 2006

The Pd-Ni-Ag alloy composite membrane using modified porous stainless steel (PSS) as a substrate was prepared by a electroless plating technique. In this work, we have introduced the intermediate layer between Pd-based alloy and a metal substrate. As an intermediate layer, the mixtures of nickel powder and inorganic sol such as $SiO_{2}$ sol, $Al_{2}O_{3}$ sol, and $TiO_{2}$ sol were used. The intermediate layers were coated onto a PSS substrate according to various membrane preparation conditions and then $N_{2}$ fluxes through the membranes with different intermediate layers were measured. The surface morphology of the intermediate layer in the mixture of nickel powder and inorganic sol was analyzed using scanning electron microscope (SEM). Finally, the Pd-Ni-Ag alloy composite membrane using the support coated with the mixture of nickel powder and silica as an intermediate layer was fabricated and then the gas permeances for $H_{2}$ and $N_{2}$ through the Pd-based membrane were investigated. The selectivity of $H_2/N_2$ was infinite and the $H_{2}$ flux was $1.39{\times}10^{-2}mol/m^2{\cdot}s$ at the temperature of $500^{\circ}C$ and trans-membrane pressure difference of 1 bar.

• Journal of the Korean Society of Food Science and Nutrition
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• v.6 no.1
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• pp.1-8
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• 1977

The sample persimmons were obtained from the of Yung-am Kun, Korea on October 24, and November 9, 1973. These persimmons were kept at room temperature overnight, then packed and stored on the following day at $0^{\circ}C$ and $85{\sim}100%$ humidity. Seven experimental items were studied : 1. control, 2. packing with excelsior in wooden boxes, 3. packing with rice hull in wooden boxes, 4. packing in bags of 0.03 mm polyethylene membrane, 5. packing in bags of 0.06 mm polyethylene membrane, 6. packing in bags of 0.08 mm polyethylene membrane, 7. packing in sealed desiccators. The dimension of polyethylene bags were $14{\times}28cm$ and three persimmons were packing in each bag. The results are as follows: 1. The persimmons both in polyethylene bags and in desiccators lost only 1 % or less of weight, while in control (1) packing with excelsior (2) or with rice hull (3) the loss was 6-7 % in weight after $2{\sim}3$ months. The persimmons became visibly shriveled and spongy-like in it's texture when it lost 5 % of weight. 2. Carbon dioxide content within the polyethylene bags and desiccators rapidly increased during the early storage period, and reached 5 % (in 0.03 mm polyethylene bags) to 50 % or more (in desiccator) after 1 month. In the polyethylene bags of 0.08 mm and desiccator, the carbon dioxide accumulated to a dangerous level and the persimmon showed physiological damage in a longer storage period. 3. The advance of after-ripening and deterioration of persimmon sealed in the polyethylene bags was slower than that in open bags when moved out to room temperature from the chilling and the polyethylene bags of 0.06 mm retarded the after-ripening most effectively. 4. On the basis of these results, a temperature of $0^{\circ}C$, relative humidity of almost $85{\sim}100%$ and combinations of 5 % oxygen and $5{\sim}8%$ carbon dioxide seem to be the optimum condition for the storage of persimmon (Teabong-Si). The most successful method of storing was to pack them in polyethylene bags of 0.06 mm and then to store them at $0^{\circ}C$.

• Journal of the Korean Chemical Society
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• v.28 no.3
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• pp.163-169
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• 1984

The transport rates of $K^+$ion through CHCl$_3$ liquid membrane containing dibenzo-18-crown-6(DBC) as a carrier molecule have been determined at $25^{\circ}C$. The transport rates depend highly on the ion concentration and on the nature of anion. It is concluded that $K^+$ions are transported in the form of ion-pair. In the case of potassium picrate, however, it is found that the transport proceeds with the formation of the incomplete ion-pair in the concentration less than 1.0 ${\times}10^{-3}$M of picrate, while with the complete formation of ion-pair in the concentration more than 1.0 ${\times}10^{-3}$M of picrate. Seven steps of the transport process are suggested and they can be illustrated in terms of energy barrier model as a function of the position of ionic species in the membrane.

• Proceedings of the IEEK Conference
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• 2000.06b
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• pp.115-118
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• 2000

Uncooled pyroelectric infrared detectors based on BST(B $a_{-x}$S $r_{x}$Ti $O_3$) thin films have been fabricated by RF magnetron sputtering and surface Micromachining technology. The detectors form BST thin film ferroelectric capacitors grown by RF magnetron sputtering on N/O/N(S $i_3$ $N_4$/ $SiO_2$/S $i_3$ $N_4$) membrane. The sputtered BST thin film exhibits highly c-axis oriented crystal structure that no poling treatment for sensing applications is required. This is an essential factor to increase the yield for realization of an infrared image sensor. surface-Micromachining technology is used to lower the thermal mass of the detector by giving maximum sensor efficiency Gold-black is evaporated on top of the sensing elements used the thermal evaporator. fabricated uncooled pyroelectric infrared detectors is highly output voltage at the low temperature(1$^{\circ}C$).).).