• Proceedings of the Korean Vacuum Society Conference
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• 1992.02a
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• pp.17-18
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• 1992

SIMS is an indispensable surface analysis instrument in trace element depth p profiling because of high detection sensitivity and excellent depth r resolution, however, it requires standard sample to do quantitative analysis d due to matrix effect depending on the species of impurities and sample m matricies and on the sputtering rates. A Among the SNMS technology developed to supply the deficiency, we researched i into CsX+ SNMS which improved the resul t quanti tati vely wi thout any extra epuipments. So basic SNMS functions were confirmed through matrix element composition rate a analysis using Si02 layer etc. and adaptability to trace element c concentration analysis was tried. For that purpose we compared SIMS depth profile data for Boron which presented s strong matrix effect on account of Fluorin existence after BF2 ion implantation on silicon substrate with SNMS data. d dynamic range were investigated. A After these experements we concluded that CsX+ SNMS reduced matrix effect and we could apply it to profile impurity elements.

• Journal of Korea Water Resources Association
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• v.38 no.3 s.152
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• pp.179-188
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• 2005

This study on the HwaBuk Multipurpose Dam showed that two- and three- dimensional numerical model experiments, as well as hydraulic model experiments, can be useful analysis tools for engineers. A commercially available RMA2, which solves the shallow water equations, and FLOW-3D, which solves the Reynolds averaged Navier-Stokes equations, were used to simulate the hydraulic model setup. Numerical simulation results on the following were compared with the hydraulic model results: the flow in the reservoir basin and the approaching channel; the discharge in the overflow weir; the water surface profiles in the rollway, chute, and stilling basin; and the pressure distributions in the rollway. It was shown that there is a reasonably good agreement between the numerical model and the hydraulic model for the most of computations. There were, however, some differences between the numerical simulation results and hydraulic model results for the hydraulic jump in the stilling basin because of air entrainment effect.

• Journal of the Korean Vacuum Society
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• v.16 no.4
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• pp.286-290
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• 2007

We fabricated NiO coated ZnO nanorods using ZnO nanorods grown on a Si substrate. After thermal hydrogenation process of these NiO-ZnO core-shell nanorods, we confirm that Ni nanodots were built up on the surface of ZnO nanorods. Photoluminescence (PL) measurements at T=5 K were made to understand the optical properties of these various nanorods. As samples sequencially transformed into $ZnO{\rightarrow}NiO-ZnO{\rightarrow}Ni$ nanodot-ZnO, PL transition energies and intensities are varied as well. In comparison to pure ZnO nanorod, the acceptor bound exciton ($A^0X$) became the minor peak for NiO-ZnO nanorods. On the other hand, for Ni nanodot-ZnO sample, ($A^0X$) transition peak intensity became the most dominant peak. This is due to the fact that during thermal hydrogenation process, appreciable amounts of Ni and hydrogen ions defused into ZnO nanorod which played as accepters.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.81-81
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• 2011

Sol-gel spin-coating법을 이용하여 ZnO 박막을 증착하였다. Sol 전구체 용액을 Si(100) 기판에 증착하고 전열처리(pre-heat treatment)하여 gel 상태의 ZnO 박막을 형성시킨 후 다른 속도로 냉각시켰다. Atomic force microscopy (AFM), X-ray diffraction (XRD), Raman, photoluminescence (PL)을 이용하여 냉각속도가 ZnO 박막의 구조적 및 광학적 특성에 미치는 영향을 분석하였다. 느린 속도($5^{\circ}C$/min)로 냉각시킨 ZnO 박막은 나노섬유질구조(nano-fibrous structure)를 나타내었고, 상온에서 바로 냉각시킨 ZnO 박막은 매우 매끄러운 표면(mirror-like surface)을 나타내었다. ZnO (100), ZnO (002), ZnO (101) 방향을 나타내는 회절피크가 관찰되었고, 냉각속도에 따른 ZnO 박막의 배향성을 알아보기 위하여 texture coefficient (TC)를 계산해 보았다. 상온에서 바로 냉각시킨 ZnO 박막(TC(002)=76.3%)이 느린 속도로 냉각시킨 박막(TC(002)=45.2%)보다 (002) 방향으로의 배향성이 우세하게 나타났으며, 잔류응력도 작았다. 뿐만 아니라 PL을 이용한 광학적 특성평가에서도 상온에서 바로 냉각시킨 ZnO 박막에서 더 강한 강도와 좁은 반치폭(full-width at halt-maximum)을 갖는 near-band-edge emission (NBE) 피크가 관찰되었다. 후열처리에 따른 구조적 및 광학적 특성 변화 또한 연구하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.200-200
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• 2012

We investigated a flexible transparent film using the spinning multi-walled carbon nanotubes (MWCNTs). Spin-capable MWCNTs on iron catalyzed on a SiO2 wafer was grown by chemical vapor deposition, which was performed at $780^{\circ}C$ using C2H2 and H2 gas. The average diameter and length of MWCNTs grown on the substrate were ~15 nm and $250{\sim}300{\mu}m$, respectively. The MWCNT sheets were produced by continuously pulling out from well-aligned MWCNTs on a substrate. The MWCNT sheet films were produced simply by direct coating on the flexible film or grass. The thickness of sheet film was remarkably decreased by alcohol spraying on the surface of sheet. The alcohol splay increased transmittance and decreased electrical resistance of MWCNT sheet films. Single and double sheets were produced with sheet resistance of ~699 and ${\sim}349{\Omega}/sq$, respectively, transmittance of 81~85 % and 67~72%, respectively. The MWCNT sheet films were heated through the application of direct current power. The flexible transparent heaters showed a rapid thermal response and uniform distribution of temperature. In addition, MWCNT yarns were prepared by spinning a bundle of MWCNTs from vertically super-aligned MWCNTs on a substrate, and field emission from the tip and side of the yarns was induced in a scanning electron microscope. We found that the field emission behavior from the tip of the yarn was better than the field emission from the side. The field emission turn-on voltages from the tip and side of MWCNT yarns were 1.6 and $1.7V/{\mu}m$, respectively, after the yarn was subjected to an aging process. Both the configuration of the tip end and the body of the yarn were changed remarkably during the field emission. We also performed the field emission of the sheet films. The sheet films showed the turn on voltage of ${\sim}1.45V/{\mu}m$ during the field emission.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.567-567
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• 2012

Since the carbon nanotubes (CNTs) have extraordinary material properties, many researchers are trying to make a practical application in various fields [1]. In particular, the high surface area of CNTs was fascinated for nano-template on the catalytic system. $RuO_2$ coated CNTs are useful functional nano-composites in many applications, including super capacitors, fuel cells, biosensors, and field emitters. However, the research of interaction between CNTs and $RuO_2$ was not satisfied with various fields [2]. In this study, we will introduce the change of chemical and electrical state of $RuO_2$/CNTs at different temperatures by synchrotron radiation photoemission spectroscopy (SRPES). The t-MWCNTs used in this experiment were grown on the Ni/TiN/Si substrates by chemical vapor deposition. $RuO_2$ of 4-20 nm in thickness was deposited on the t-MWNTs by sputter. The SRPES measurements were carried out at the 4B1 beamline of the Pohang Accelerator Laboratory in Korea. The result of XPS measurement indicates that the deposited $RuO_2$ on the CNTs was reduced into pure Ru at above $300^{\circ}C$. And we confirmed that the effective work function of $RuO_2$/CNTs was decreased with increasing temperature.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.124-124
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• 2011

This study investigated the interaction of varied plasma power with ultralow-k toluene-tetraethoxysilane (TEOS) hybrid plasma polymer thin films, as well as changing electrical and mechanical properties. The hybrid thin films were deposited on silicon(100) substrates by plasma enhanced chemical vapor deposition (PECVD) system. Toluene and tetraethoxysilane were utilized as organic and inorganic precursors. In order to compare the electrical and the mechanical properties, we grew the hybrid thin films under various conditions such as rf power of plasma, bubbling ratio of TEOS to toluene, and post annealing temperature. The hybrid plasma polymer thin films were characterized by Fourier transform infrared (FT-IR) spectroscopy, atomic force microscopy (AFM), nanoindenter, I-V curves, and capacitance. Also, the hybrid thin films were analyzed by using ellipsometry. The refractive indices varied with the RF power, the bubbling ratio of TEOS to toluene, and the annealing temperature. To analyze their trends of electrical and mechanical properties, the thin films were grown under conditions of various rf powers. The IR spectra showed them to have completely different chemical functionalities from the liquid toluene and TEOS precursors. Also, The SiO peak intensity increased with increasing TEOS bubbling ratio, and the -OH and the CO peak intensities decreased with increasing annealing temperature. The AFM images showed changing of surface roughness that depended on different deposition rf powers. An nanoindenter was used to measure the hardness and Young' modulus and showed that both these values increased as the deposition RF power increased; these values also changed with the bubbling ratio of TEOS to toluene and with the annealing temperature. From the field emission scanning electron microscopy (FE-SEM) results, the thickness of the thin films was determined before and after the annealing, with the thickness shrinkage (%) being measured by using SEM cross-sectional images.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.76-76
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• 2011

Polymer-fullerene based bulk heterojunction (BHJ) solar cells can be fabricated in large area using low-cost roll-to-roll manufacturing methods. However, because of the low mobility of the BHJ materials, there is competition between the sweep-out of the photogenerated carriers by the built-in potential and recombination within the thin BHJ film [12-15]. Useful film thicknesses are limited by recombination. Thus, there is a need to increase the absorption by the BHJ film without increasing film thickness. Metal nanoparticles exhibit localized surface plasmon resonances (LSPR) which couple strongly to the incident light. In addition, relatively large metallic nanoparticles can reflect and scatter the light and thereby increase the optical path length within the BHJ film. Thus, the addition of metal nanoparticles into BHJ films offers the possibility of enhanced absorption and correspondingly enhanced photo-generation of mobile carriers. In this work, we have demonstrated several positive effects of shape controlled Au and Ag nanoparticles in organic P3HT/PC70BM, PCDTBT/PC70BM, Si-PCPDTBT/PC70BM BHJ-based PV devices. The use of an optimized concentration of Au and Ag nanomaterials in the BHJ film increases Jsc, FF, and the IPCE. These improvements result from a combination of enhanced light absorption caused by the light scattering of the nanomaterials in an active layer. Some of the metals induce the plasmon light concentration at specific wavelength. Moreover, improved charge transport results in low series resistance.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.404-405
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• 2011

Cu(InGa)$Se_2$ (CIGS) 박막 태양전지의 저가 및 대면적화를 위한 양산화 공정인 two-step process (sputter/selenization) 공정에서는 sputtering으로 형성한 metal precursor stack을 $H_2$ Se gas를 이용하여 selenization하는 공정을 주로 이용한다. 하지만 이러한 selenization 공정은 유독한 $H_2$ Se gas를 이용해야 한다는 점과 긴 시간 동안 열처리를 해야 하는 단점을 가지고 있다. 이에 metal precursor stack 위에 Se 막을 우선 증착하고, Rapid Thermal Process (RTP)를 이용하여 selenization하는 방법이 현재 많은 관심을 끌고 있다. 본 논문에서는 sputtering 이후 RTP를 이용한 CIGS 흡수층 제작에 대한 선행연구의 일환으로 co-evaporator 장비를 이용하여 다양한 구조의 precursor를 제작하고 RTP 조건에 따른 selenization 효과를 연구하였다. Co-evaporator를 이용하여 CIGS, CIG/Se, CuGa/In/Se, In/CuGa/Se 4가지 구조의 precursor stack을 Mo coated soda lime glass 위에 제작하였다. 이때 amorphous 상태의 precursor stack을 만들기 위하여 기판에 열은 가하여 주지 않았으며, 각각의 stack 구조에서 가지고 있는 Cu, In, Ga, Se의 총량을 동일하게 유지하기 위하여 각 stack의 증착 시간을 동일하게 유지하였다. Selenization을 위한 RTP 조건은 550, $600^{\circ}C$ 각각에 대하여 1, 5, 10분으로 split을 진행하였다. Precursor stack의 증착 후 관찰한 XRD 결과는 비정질 상태를 잘 나타내었으며, SEM 결과 CIGS precursor stack을 제외한 나머지 구조의 stack에서는 In 박막의 surface roughness로 인하여 박막의 평탄화가 좋지 않음을 확인하였다. CIGS precursor stack의 경우, RTP 온도와 시간 split와 상관없이 결정화가 잘 이루어졌으나 grain의 성장이 부족하였다. 이에 비하여 CIG/Se, CuGa/In/Se, In/CuGa/Se 구조의 precursor stack의 경우, $550^{\circ}C$ 열처리에서는 InSe의 결정상이 관찰 되었으며 $600^{\circ}C$, 5분 이상 열처리에서 CIGS 결정상이 관찰되었다. 이러한 결과는 Se이 metal 원소들과 함께 있는 CIGS 구조에 비하여 metal precursor stack 위에 Se을 증착한 stack 구조들의 경우는 CIGS 결정을 형성하기 위해 Se이 metal 층들로 확산되어 반응을 하여야 하므로 상대적으로 많은 열에너지가 필요한 것으로 이해할 수 있으며, RTP를 이용한 selenization 공정으로 CIGS 박막 태양전지의 흡수층 형성이 가능함을 확인하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.454-454
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• 2011

Graphene shows unusual electronic properties, such as carrier mobility as high as 10,000 $cm^2$/Vs at room temperature and quantum electronic transport, due to its electronic structure. Carrier mobility of graphene is ten times higher than that of Silicon device. On the one hand, quantum mechanical studies have continued on graphene. One of them is quantum Hall effect which is observed in graphene when high magnetic field is applied under low temperature. This is why two dimension electron gases can be formed on Graphene surface. Moreover, quantum Hall effect can be observed in room temperature under high magnetic field and shows fractional quantization values. Quantum Hall effect is important because quantized Hall resistances always have fundamental value of h/$e^2$ ~ 25,812 Ohm and it can confirm the quantum mechanical behaviors. The value of the quantized Hall resistance is extremely stable and reproducible. Therefore, it can be used for SI unit. We study to measure quantum Hall effect in CVD graphene. Graphene devices are made by using conventional E-beam lithography and RIE. We measure quantum Hall effect under high magnetic field at low temperature by using He4 gas closed loop cryostat.