• Journal of Welding and Joining
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• 제32권3호
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• pp.68-73
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• 2014

Among through silicon via (TSV) technologies, for replacing Cu filling method, the method of molten solder filling has been proposed to reduce filling cost and filling time. However, because Sn alloy which has a high coefficient of thermal expansion (CTE) than Cu, CTE mismatch between Si and molten solder induced higher thermal stress than Cu filling method. This thermal stress can deteriorate reliability of TSV by forming defects like void, crack and so on. Therefore, we fabricated SiC composite filling material which had a low CTE for reducing thermal stress in TSV. To add SiC nano particles to molten solder, ball-typed SiC clusters, which were formed with Sn powders and SiC nano particles by ball mill process, put into molten Sn and then, nano particle-dispersed SiC composite filling material was produced. In the case of 1 wt.% of SiC particle, the CTE showed a lowest value which was a $14.8ppm/^{\circ}C$ and this value was lower than CTE of Cu. Up to 1 wt.% of SiC particle, Young's modulus increased as wt.% of SiC particle increased. And also, we observed cross-sectioned TSV which was filled with 1 wt.% of SiC particle and we confirmed a possibility of SiC composite material as a TSV filling material.

• 한국산학기술학회논문지
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• 제14권4호
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• pp.1883-1889
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• 2013

Fe-Si계 합금은 우주탐사용으로 응용되고 있는 Si-Ge합금보다는 낮은 성능지수를 나타내지만 원료가 풍부하여 저가이고, 제조가 간단하며, $800^{\circ}C$까지 사용가능한 중고온용 열전발전재료이다. 본 연구에서는 고주파 진공유도로를 이용해서 제조한 p형 $FeSi_2$의 열전물성에 미치는 입자크기 및 첨가물 영향에 대해 조사하였다. 조성입자크기가 작을수록 소결밀도 증가와 함께 입자와 입자간의 연결성 향상에 의해 도전율이 증가하였다. Seebeck 계수는 600~800K에서 최고값을 나타내었고, 잔존하는 ${\varepsilon}$-FeSi 금속전도상에 의해 약간 감소하였다. $Fe_2O_3$ 및 $Fe_3O_4$를 첨가한 경우, 잔존 금속전도상 및 Si 결핍양 증가에 의해 도전율은 증가하였고 Seebeck 계수는 감소하였다. 반면에 $SiO_2$를 첨가한 경우에는 도전율과 Seebeck 계수 모두 상승하였다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.237-239
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• 2002

The effect of particle sizes of the metal matrix composites containing 10 wt.%SiCp was investigated with using various tools. The results showed that tool life decreased considerably with increasing particle size and cutting speed. The wear resistance of TiC-coated tools was considerably higher than that of the other tools. It was observed that abrasive wear was the main responsible mechanism for wear of the tool thermal cracks were at high speed while a built-edge formation was also evident at lower speed.

• 한국대기환경학회지
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• 제21권6호
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• pp.639-647
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• 2005

A single particle analytical technique, named low-Z particle electron probe X-ray microanalysis (EPMA), was applied to characterize samples collected at a subway station and ambient samples in Seoul. According to their chemical composition, many distinctive particle types were identified. For samples collected at the subway station platform, the major chemical species are carbon-rich, organic, aluminosilicates (AlSi), AlSi/C, AlSi/$CaCO_{3},\;CaCO_{3},\;SiO_{2},\;and\;Fe_{2}O_{3}$. For outdoor samples, carbon-rich, organic, AlSi, $CaCO_{3},\;SiO_{2},\;NaNO_{3},\;(Na,Mg)NO_{3},\;Na(CO_{3},NO_{3},SO_{4}),\;and\;(NH_{4})_2SO_4$, are abundantly encountered. Samples collected at the subway station show very high contents of $Fe_{2}O_{3}$, both in coarse and fine fractions, which come from brake block, subway train wheel, electric contact materials, etc. It is demonstrated that the single-particle characterization using this low-Z particle EPMA technique provided detailed information on various types of chemical species in indoor and outdoor samples.

• Journal of Mechanical Science and Technology
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• 제14권8호
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• pp.830-835
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• 2000

The thermodynamical estimation of the interfacial reaction and the impact properties of $Nb/MoSi_2$ laminate composites containing SiC, $NbSi_2$ or $ZrO_2$ particles are investigated. Laminate composites, which comprise alternating layers of $MoSi_2$ with the particle and Nb foil, were fabricated by the hot press process. It is clearly found out that the interfacial reaction of $Nb/MoSi_2$ can be controlled by the addition of $ZrO_2$ particle to the $MoSi_2$ phase. The addition of $ZrO_2$ particle increases both the impact value and the sintered density of Nb/McSij, The suppression of the interfacial reaction is caused by the formation of $ZrSiO_2$ in $MoSi_2-ZrO_2$ matrix mixture.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.121-125
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• 2001

We study the feasibility of synthesizing Si particles using PLA method. In the previous studies, it was possible to control the size of Si nanoparticles by the He gas pressure. In this study, we fabricated sub-micron size Si particles with various shapes such as conical, hexagonal, and ring by controlling not only the ambient gas pressure but also the laser energy density. Furthermore, we found that the conical Si particles were uniform-sized and had step shape when observed from FE-SEM and AFM. The conical Si particle has the same crystal structure as the bulk single crystalline Si by the analysis of the Raman scattering. It is shown that the relationship between the laser energy density and the He gas pressure inside the chamber affects the shape of the Si particle.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.121-125
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• 2001

We study the feasibility of synthesizing Si particles using PLA method. In the previous studies, it was possible to control the size of Si nanoparticles bythe He gas pressure. In this study, we fabricated sub-micron size Si particles with various shapes such as conical, hexagonal, and ring by controlling not only the ambient as pressure but also the laser energy density. Furthermore, we found that the conical Si particles were uniform-sized and had step shape when observed from FE-SEM and AFM. The conical Si particle has the same crystal structure as the bulk single crystalline Si by the analysis of the Raman scattering. It is shown that the relationship between the laser energy density and the He gas pressure inside the chamber affects the shape of the Si particle.

• Tribology and Lubricants
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• 제39권2호
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• pp.72-75
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• 2023

Silicon carbide (SiC) is used as a substrate material for power semiconductors; however, SiC chemical mechanical polishing (CMP) requires considerable time owing to its chemical stability and high hardness. Therefore, researchers are attempting to increase the material removal rate (MRR) of SiC CMP using various methods. Mixed-abrasive CMP (MAS CMP) is one method of increasing the material removal efficiency of CMP by mixing two or more particles. The aim of this research is to study the mathematical modeling of the MRR of MAS CMP of SiC with SiO₂ and TiO₂ particles. With a total particle concentration of 32 wt, using 80-nm SiO₂ particles and 25-nm TiO₂ particles maximizes the MRR at 8 wt of the TiO₂ particle concentration. In the case of 5 nm TiO₂ particles, the MRR tends to increase with an increase in TiO₂ concentration. In the case of particle size 10-25 nm TiO₂, as the particle concentration increases, the MRR increases to a certain level and then decreases again. TiO₂ particles of 25 nm or more continuously decreased MRR as the particle concentration increased. In the model proposed in this study, the MRR of MAS CMP of SiC increases linearly with changes in pressure and relative speed, which shows the same result as the Preston's equation. These results can contribute to the future design of MAS; however, the model needs to be verified and improved in future experiments.

• 한국분말재료학회지
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• 제6권3호
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• pp.215-223
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• 1999

The synthesis of $Ni_5Si_2,\;Ni_2Si$ and NiSi has been investigated by mechanical alloying (MA) of Ni-27.9at%Si, Ni-33.3at%Si and Ni-50.0at%Si powder mixtures. As-received and premilled elemental powders were subjected to MA. The as-received Ni powder was spherical and the mean particle size 48.8$\mu$m, whereas the premilled Ni powder was flaky and the mean particle diameter and thickness were found to be 125 and 5$\mu$m, respectively. The mean surface area of the premilled Mi powder particle was 3.5 times as large as that of the as-received Ni powder particle. The as-received Si powder was was 10.0$\mu$m. Self-propagating high-temperature synthesis (SHS) reaction, followed by a slow reaction (a solid state diffusion), was observed to produce each Ni silicide during MA of the as-received elemental powders. In other word , the reactants and product coexisted for a long period of MA of time. Only SHS reaction was, however, observed to produce each Ni silicide during MA of the premilled elemental powders, indicating that each Ni sillicide formed rather abruptly at a short period of MA time. The mechanisms and reaction rates for the formation of the Ni silicides appeared to be influenced by the elemental powder particle size and shape as well as the heat of formation of the products $(Ni_5Si_2$longrightarrow-43.1kJ/mol.at., $Ni_2Si$$\rightarrow$-47.6kJ/mol.at.).

• 한국결정성장학회지
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• 제29권1호
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• pp.12-18
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• 2019

스케일업된 초음파 분무 열분해 공정을 이용하여 양산용 구형 $SiO_2$ 분말을 합성하였다. 초음파 분무 열분해 공정에 사용된 전구체는 20 nm에서 30 nm의 $SiO_2$ 입자를 포함한 수계 $SiO_2$ 졸을 사용하였다. 초음파 분무 열분해 공정의 구동 조건과 전구체 조건의 변화가 합성된 $SiO_2$ 입자에 미치는 영향을 알아보기 위해 반응 온도, 운반 기체 공급 속도 그리고 전구체인 수계 $SiO_2$ 졸의 농도를 조절하였다. 합성된 $SiO_2$ 입자는 공통적으로 반비정질상, 구 형태의 매끄러운 표면을 나타내었다. 구형 $SiO_2$ 입자의 크기는 반응 온도가 증가 또는 전구체 농도가 감소함에 따라 감소하였다. 또한 운반 기체 공급 속도가 증가할수록 합성된 $SiO_2$ 입자의 크기는 증가하였다. 스케일업 규모와 실험실 규모의 초음파 분무 열분해 공정의 차이점을 비교하였고, 반응관 내부 체류시간이 상대적으로 짧은 실험실 규모의 초음파 분무 열분해 공정에서 합성된 $SiO_2$ 입자가 상대적으로 큰 입도를 나타내었다.