• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.363-363
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• 2008

The development of dry etching process for sapphire wafer with plasma has been key issues for the opto-electric devices. The challenges are increasing control and obtaining low plasma induced-damage because an unwanted scattering of radiation is caused by the spatial disorder of pattern and variation of surface roughness. The plasma-induced damages during plasma etching process can be classified as impurity contamination of residual etch products or bonding disruption in lattice due to charged particle bombardment. Therefor, fine pattern technology with low damaged etching process and high etch rate are urgently needed. Until now, there are a lot of reports on the etching of sapphire wafer with using $Cl_2$/Ar, $BCl_3$/Ar, HBr/Ar and so on [1]. However, the etch behavior of sapphire wafer have investigated with variation of only one parameter while other parameters are fixed. In this study, we investigated the effect of pressure and other parameters on the etch rate and the selectivity. We selected $BCl_3$ as an etch ant because $BCl_3$ plasmas are widely used in etching process of oxide materials. In plasma, the $BCl_3$ molecule can be dissociated into B radical, $B^+$ ion, Cl radical and $Cl^+$ ion. However, the $BCl_3$ molecule can be dissociated into B radical or $B^+$ ion easier than Cl radical or $Cl^+$ ion. First, we evaluated the etch behaviors of sapphire wafer in $BCl_3$/additive gases (Ar, $N_2,Cl_2$) gases. The behavior of etch rate of sapphire substrate was monitored as a function of additive gas ratio to $BCl_3$ based plasma, total flow rate, r.f. power, d.c. bias under different pressures of 5 mTorr, 10 mTorr, 20 mTorr and 30 mTorr. The etch rates of sapphire wafer, $SiO_2$ and PR were measured with using alpha step surface profiler. In order to understand the changes of radicals, volume density of Cl, B radical and BCl molecule were investigated with optical emission spectroscopy (OES). The chemical states of $Al_2O_3$ thin films were studied with energy dispersive X-ray (EDX) and depth profile anlysis of auger electron spectroscopy (AES). The enhancement of sapphire substrate can be explained by the reactive ion etching mechanism with the competition of the formation of volatile $AlCl_3$, $Al_2Cl_6$ or $BOCl_3$ and the sputter effect by energetic ions.

• Journal of Technologic Dentistry
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• v.34 no.2
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• pp.83-93
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• 2012

Purpose: The objective of this study is to find out physical properties and the flexural strength changed by the low temperature degradation of the block which is needed to make bio-prosthetic dentistry which is better than feldspar affiliated ceramic made by building up ceramic powder and also to apply this to the clinical use of zirconia monolithic all-ceramic crown. Methods: Flexural strength of each sample was evaluated before and after the Low Temperature Degradation, and physical properties of the Tetra Zirconia Block containing 3mol % was evaluated as well. The average and standard deviation of each experimental group were came out of the evaluation. Statistical package for social science 18.0 was used for statistics. Results: The average density of the monolithic all-ceramic crown was $6.0280{\pm}0.0147g/cm$, the relative density was 99.01 %. When the sample was sintered at $1480^{\circ}C$ the diameter of average particle was $396.62{\pm}33.71nm$. All the samples had no monolithic peak after XRD evaluation but only had tetragonal peak. There were statistically significant differences in the result of flexural strength of the samples evaluated after and before the low temperature degradation, the flexural strength before the low temperature degradation was $1747.40{\ss}{\acute{A}}$, at the temperature of $130^{\circ}C$ the flexural strength after the low temperature degradation was 1063.99MPa (p<0.001). There was statistically significant difference in the result of strength of 1020.07MPa after the low temperature degradation at the temperature of $200^{\circ}C$ (p<0.001). Conclusion: The block which was made for this evaluation possesses such an excellent strength among dental restorative materials that it is thought to have no problems to use for tetragonal zirconia polycrystal.

• Journal of Korean Society of Forest Science
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• v.77 no.2
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• pp.178-185
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• 1988

This study is carried out for analyzing the factors causing several disasters occurring around beach area in order to set a plan for an afforestation which will fulfill its function as facilities for prevention of disasters and for relaxation around beach resort at Tong-ri, Pokil-my$\bar{o}$n, Wando-gun. The results are as follows : 1. The main wind direction was summer was SE. 2. The first class in the rate of frequency of the hourly average wind speed and the instantaneous wind speed in summer were 2.1-3.0m/sec (29.2%) and 1.1-2.0m/sec (30.6%) respectively. 3. The particle sizes of the dune sands was a little small (82.5% in 0.125 to 0.25mm, $D_{50}=0.178mm$). 4. The mineral composition and the chemical components were as follows : The main mineral : Quartz The accessary minerals : Calcite, Feldspars(Orthoclase), Sericite. The chemical components : $SiO_2$ ; 75.6%. $Al_2O_3$ ; 8.1%, CaO ; 7.76%, Ign. loss ; 6.8%, MgO ; 0.23%, $K_2O$ ; 0.72%, $Na_2O$ ; 0.41%, $Fe_2O_3$ ; 0.32%. 5. The threshold friction velocity equation for the diameter class of the dune sands was $y=4.191x^{0.221}$. 6. The amount of floating salt was maximum at the point of 65m away from beach line, dropped abruptly at 135m and remained almost same on its way to the inland. The equation of the amount of floating salt was $y=28.181{\times}(-0.369^x)$. 7. The amount of extracted salt(33%) in seawater in summer was the same as the one of the nearest seawater of Korea.

• Journal of the Mineralogical Society of Korea
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• v.19 no.4 s.50
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• pp.355-361
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• 2006

Artificially crushed sands occupy approximately 30 percent of the total consumption in South Korea. The demand for the crushed sands is expected to rise in the future. Most manufacturers use granitic rocks to produce the crushed sands. During the manufacturing process, fine fractions (i.e., sludges or particles smaller than 63 microns) are removed through the process of flocculation. The fine fraction occupies about 15% of the total weight. The sludges are comprised of quartz, feldspars, calcite, and various kinds of clay minerals. Non-clay minerals occupy more than 75 percent of the sluges weight, according to the XRD semi-quantification measurement. Micas, kaolinites, chlorite, vermiculite, and smectites occur as minor constituents. The sludges from Jurassic granites contain more kaolinites and $14{\AA}$-types than those from the Cretaceous ones. The chemical analysis clearly shows the difference between the parent rocks and the sludges in chemical compositions. Much of colored components in the sludges was accumulated as the weathering products. Particle size analysis results show that the sludges can be categorized as silt loam in a sand-silt-clay triangular diagram. This result was for her confirmed by the hydraulic conductivity data. In South Korea, the sludges remained after crushed sand production are classified as an industrial waste because of their impermeability, and which is caused by their high silt and clay fractions.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.2 no.1
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• pp.53-59
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• 2004

A variety of factors such as the pattern of intake (acute or chronic), monitoring interval and the characteristics of the radionuclides could have a significant influence on the estimates for the intake and internal dose. The relative differences of the assessed intakes based on the assumption of an acute intake to that of a chronic intake were evaluated by using the predicted bioassay quantity in the whole body or organs for an acute and chronic intake through the inhalation of $^{125}$ I, $^{137}$ C, $^{235}$ U with the AMAD of 1 ${\mu}{\textrm}{m}$ and 5 ${\mu}{\textrm}{m}$ for the monitoring intervals of 7, 14, 30, 60, 90, 120, 180, 360 days, respectively, The relative difference of the assessed intakes based on the intake pattern is affected by the monitoring interval, radionuclide and absorption type, but the particle size has little influence on the difference of the assessed intakes based on the intake pattern. The maximum monitoring interval, which is defined as the monitoring interval that the relative difference of the assessed intakes based on the assumption of an acute intake to that of a chronic intake is less than 10%, is 60 d for $^{125}$ I with Type F, 180 d for $^{137}$ C with Type F, 90 d for $^{235}$ U with Type M, and 360 d for $^{235}$ U with Type S. It was concluded that an intake pattern has little influence on the estimates of the assessed intake in the case where the monitoring interval is shorter than the maximum monitoring interval for each radionuclide.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.395-396
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• 2011

본 논문에서는 30% 내외의 평균반사율을 가지는 다결정 실리콘 태양전지의 입사광 손실을 최소화하여 광전변환효율 극대화를 구현하기 위해서 SF6/O2 혼합가스를 이용한 RIE 표면 texturing 공정을 수행하였다. 현재 다결정 실리콘 태양전지는 다양한 방향의 grain을 가지기 때문에 단결정 실리콘에 적용되는 습식 식각 방식이 다결정 실리콘 표면 texturing에 적절하지 않은 것으로 알려져 있다. 이를 개선하기 위해서 이방성 식각 특성을 가지는 다양한 texturing 방법이 시도되고 있다. 대표적으로 기계적인 방식의 V-grooving, 레이저 grooving, 플라즈마 건식식각을 이용한 texturing 및 산 용액을 이용한 texturing 등의 연구가 보고되고 있다. 그 중에서 플라즈마 건식식각 방식의 하나인 RIE를 이용한 표면 texturing 공정이 간단한 공정과 산업계 응용의 용이성 때문에 활발히 연구되어 왔다. 특히 Sandia group과 일본 Kyocera사의 연구 결과에서는 그 가능성을 입증하고 있다. 본 연구에서는 공정의 단순화와 안전한 공정을 위해서 SF6/O2 혼합 가스를 이용하여 마스크 패턴 공정없이 RIE texturing 공정을 수행하였으며, RIE-textured 다결정 실리콘에 대해서 태양전지를 제작하여 표면 texturing이 광전변환효율에 미치는 영향에 대해서 분석하였다. 그 결과 SF6/O2 혼합 가스를 이용한 RIE texturing은 다결정 실리콘 표면에 주로 needle 구조를 형성하는 것을 확인하였다. 각 texturing 조건별 반사율의 차이는 needle 구조의 조밀도와 관련되는 것을 알 수 있었으며, 동일 공정 parameter 상에서 식각 시간 1, 2, 3, 4, 5분 기준 시간에 따른 표면 구조 분석 결과 seed 가 형성되고 그에 따라서 needle 형태로 식각되는 과정을 관찰하였다. 반사율은 분당 약 4%씩 낮아져 5분 식각 후 14.45% 까지 낮아졌으며, 표면 구조에서 폭은 약 30 nm로 모두 일정하며, 길이가 약 20, 30, 50, 80, 100 nm으로 증가되었다. 이 결과로 보아 seed로부터 needle 구조가 심화되어가는 것을 알 수 있었다. 시간에 따른 RIE texturing 후 제작된 태양전지는 효율이 1분 식각 기준 15.92%에서 약 0.35% 씩 낮아져 5분 식각 후 14.4%로 낮아졌다. Voc 는 texturing 시간에 관계없이 일정하며 Isc가 점점 감소되는 것으로 확인되었다. EQE 결과도 이와 동일하게 RIE texturing 시간이 길어질수록 전체 파장 범위에서 일정하게 낮아지는 것이 관찰되었다. Electroluminescence(EL) 이미지 결과 texturing 시간이 길어진 태양전지일수록 점점 어두운 이미지가 나타나 5분 식각의 경우 가장 어두운 결과를 나타내었다. 이런 결과는 한 가지 이유보다는 복합적인 문제로 예상되는데 궁극적으로는 RIE 공정 후 표면에 쌓인 charged particle들이 trap 준위를 형성하여 효율 및 공정상에 영향을 미친 것으로 보이며, 특히 잔류 O기가 불균일한 산화막을 형성하는 것으로 예상된다. 또한 EL 분석 결과를 볼 때 RIE texturing 공정이 길어질수록 불안정한 pn-junction을 형성하는 것을 확인하였으며, emitter 층 형성 후 PSG (phosphorous silica glass) 공정에서 needle의 상부 구조가 무너지면서 면저항이 증가된 결과로 분석된다. PSG 제거 후 측정된 면저항의 경우 3분 texturing 샘플부터 면저항이 약 4${\Omega}/sq$ 정도 증가됨을 확인하였다.

• Korean Journal of Materials Research
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• v.9 no.9
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• pp.872-877
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• 1999

The purpose of this research was to investigate the characteristics and the cleaning efficiency on HN(sub)4OH solutions added with H(sub)2O(sub)2 and surfactants. NH(sub)4OH solutions added with surfactants did not show much changes in pH and redox potential (Eh) as a function of NH(sub)4OH concentration compared with NH(sub)4OH solution. However H(sub)2O(sub)2 added NH\ulcornerOH solutions showed the decrease of pH and the increase of Eh as the concentration of NH(sub)4OH increased. The decrease of surface tension from 72 dynes/cm to 38 dynes/cm was observed in solutions added with surfactant but not in H(sub)2O(sub)2. The etch rates of silicon in NH(sub)4OH solutions(NH(sub)4OH:H(sub)2O= 1 : 5) showed at least 50 times higher than those in H(sub)2O(sub)2 and surfactant added NH(sub)4OH solutions(NH(sub)4OH:H(sub)2O(sub)2= 1 : 1 : 5) solution removed the PSL particles (0.67$\mu\textrm{m}$ in diameter) on Si wafers effectively at all temperatures investigated. NH(sub)4OH solution added with a surfactant could not remove particles at room temperature, however it was possible to remove particles at higher temperatures, 5$0^{\circ}C$ and 8$0^{\circ}C$.

• Korean Chemical Engineering Research
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• v.50 no.1
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• pp.106-111
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• 2012

Drying characteristic of high moisture coal using a 5 kg/hr bench scale flash dryer was investigated. Moisture content and heating value of raw coal as received basis were 29.74 wt% and 4,270 kcal/kg, respectively. Gas inlet temperature and gas inlet flow rate were $400{\sim}600^{\circ}C$ and 10~20 m/sec, respectively. The raw coal was ground and classified to the particle size range of $100{\sim}2,000{\mu}m$. The moisture removal rate of raw coal was dramatically increased with increasing gas inlet temperature and decreasing gas inlet flow rate. The heating value of dried coal was increased to 5,100~5,900 kcal/kg. To examine the chemical change on the surface of high moisture coal during flash drying process, FT-IR spectral analysis was carried out. As a result, major changes in hydroxyl, carboxyl and carbonyl peak was confirmed.

• Radiation Oncology Journal
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• v.28 no.4
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• pp.224-230
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• 2010

Purpose: We designed the aft-multiple-slit (AMS) system to reduce scatter in cone-beam computed tomography (CBCT). As a preliminary study, we performed a Monte Carlo N-Particle Transport Code (MCNP) simulation to verify the effectiveness of this system. Materials and Methods: The MCNPX code was used to build the AMS geometry. An AMS is an equi-angled arc to consider beam divergence. The scatter-reduced projection images were compared with the primary images only and the primary plus scatter radiation images with and without AMS to evaluate the effectiveness of scatter reduction. To obtain the full 2 dimensional (2D) projection image, the whole AMS system was moved to obtain closed septa of the AMS after the first image acquisition. Results: The primary radiation with and without AMS is identical to all the slit widths, but the profiles of the primary plus scattered radiation varied according to the slit widths in the 2D projection image. The average scatter reduction factors were 29%, 15%, 9%, and 8% when the slit widths were 5 mm, 10 mm, 15 mm, and 20 mm, respectively. Conclusion: We have evaluated the scatter reduction effect of the AMS in CBCT imaging using the Monte Carlo (MC) simulations. A preliminary study based on the MCNP simulations showed a mount of scatter reduction with the proposed system.

• Korean Chemical Engineering Research
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• v.51 no.4
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• pp.426-431
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• 2013

Nanosized $TiO_2$ particles were prepared from titanium (IV) sulfate solution using base solutions at low reaction temperature ($95^{\circ}C$) and atmospheric pressure by hydrothermal precipitation method without calcination. The effects of preparation conditions, such as kind of base solutions (NaOH, $NH_4OH$, Monoethanolamine, Diethanolamine, Triethanolamine) and surfactants (CTAB, Span 20, SDBS), concentration of surfactants, temperature and pH, on the physical properties of $TiO_2$ particles have been investigated by XRD, SEM and Zeta-potential meter. Absorption area was also investigated by DRS in order to confirm the photocatalytic activity of the nanosized $TiO_2$ particles. It was turned out that, among base solutions, NaOH provides the smallest $TiO_2$ particles with excellent crystallinity. And cationic surfactant (CTAB) prepared smaller $TiO_2$ particles than any other surfactants. When CTAB is added in the concentration ratio of $Ti(SO_4)_2$:CTAB=10:1, $TiO_2$ particles with particle diameter of 5.8 nm were prepared. This is approximately 1/10 of that prepared without CTAB.