• Title/Summary/Keyword: Si 분포

Search Result 1,177, Processing Time 0.036 seconds

A Study on Implanted and Annealed Antimony Profiles in Amorphous and Single Crystalline Silicon Using 10~50 keV Energy Bombardment (비정질 및 단결정 실리콘에서 10~50 keV 에너지로 주입된 안티몬 이온의 분포와 열적인 거동에 따른 연구)

  • Jung, Won-Chae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.28 no.11
    • /
    • pp.683-689
    • /
    • 2015
  • For the formation of $N^+$ doping, the antimony ions are mainly used for the fabrication of a BJT (bipolar junction transistor), CMOS (complementary metal oxide semiconductor), FET (field effect transistor) and BiCMOS (bipolar and complementary metal oxide semiconductor) process integration. Antimony is a heavy element and has relatively a low diffusion coefficient in silicon. Therefore, antimony is preferred as a candidate of ultra shallow junction for n type doping instead of arsenic implantation. Three-dimensional (3D) profiles of antimony are also compared one another from different tilt angles and incident energies under same dimensional conditions. The diffusion effect of antimony showed ORD (oxygen retarded diffusion) after thermal oxidation process. The interfacial effect of a $SiO_2/Si$ is influenced antimony diffusion and showed segregation effects during the oxidation process. The surface sputtering effect of antimony must be considered due to its heavy mass in the case of low energy and high dose conditions. The range of antimony implanted in amorphous and crystalline silicon are compared each other and its data and profiles also showed and explained after thermal annealing under inert $N_2$ gas and dry oxidation.

Characterization of Chemical Composition and Size Distribution of Atmospheric Aerosols by Low-Pressure Impactor (저압 임팩터를 이용한 대기 에어로졸 입자의 입경분포 측정과 화학조성 자료의 해석)

  • 박정호;최금찬
    • Journal of Korean Society for Atmospheric Environment
    • /
    • v.13 no.6
    • /
    • pp.475-486
    • /
    • 1997
  • The characteristics of atmospheric aerosols were investigated as a function of particle size and water solubility. The atmospheric aerosols were sampled with classifying into 12 size ranges by the use of Andersen low-pressure impactor. Collected aerosol particles were extracted by ultrapure water and filtered to be separated into water-soluble and insoluble components. The concentrations 12 elements in both components were determined by PIXE analysis. And the concentrations of 8 ions in the soluble component were analyzed by ion chromatography. In general, the mass size distribution of particulate matter was represented as a bimodal distribution. The mass size distributions of S$(SO_4^{2-}), K(K^+), Zn and NH_4^+$ skewed to the smaller size range and those of Si, Ca$(Ca^{2+}), Fe, Na^+ and Mg^{2+}$ skewed to the larger size range. They had roughly one peak in the fine and coarse particle region,respectively. On the other hand, the mass size distribution of Ti, Mn, Ni, Cu, $Cl^- and NO_3^-$ were represented as the bimodal distribution. Fe and Si in the aerosol particles extracted into pure water are existing in high insoluble state. Conversely, almost the whole of S is dissolved in water.

  • PDF

Geochemistry and K-Ar Age of Gabbroic Rocks in the Konamsan Area of Yonchon Province, South Korea (연천 고남산 지역에 분포하는 반려암질암의 암석화학과 관입시기)

  • Kim, Kyu Han;Lee, Hyun Joo
    • Economic and Environmental Geology
    • /
    • v.27 no.1
    • /
    • pp.29-39
    • /
    • 1994
  • Gabbroic rocks in which titanomagnetite orebodies are embedded were emplaced in Precambrian metasedimentary rocks. Hornblende K-Ar ages for equigranula and gneissic gabbros were obtained to be $1021.8{\pm}14.5$ Ma and $1468.4{\pm}20.8$ Ma, respectively. Biotite-granite has an age of 116.4 Ma, which has corresponded to Daebo granite. Amphibole minerals of the gabbroic rock and the magnetite orebodies belong to calcic amphibole group such as ferroan pargasite, pargasite, and ferro-pargasite. The gabbroic rocks have unusually high content of $TiO_2$ ranging from 0.88 to 6.03 wt.% with an average value of 3.46 wt.% as compared to normal gabbroic rock with 1.32 wt.% in $TiO_2$. Incompatible elements such as Ba and Sr of the gabbros are negatively correlated with $SiO_2$. In contrast, Co and Cr have a positive correlation with $SiO_2$, suggesting a normal differentiation trend of gabbroic magma.

  • PDF

Homogeneous Incorporation of Dimethylsiloxane into Polymethylsilsesquioxane (Dimethylsiloxane의 균일 도입에 의한 PMSSQ의 인성 강화)

  • 안창훈;석상일;진문영
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2003.03a
    • /
    • pp.104-104
    • /
    • 2003
  • 다양한 구조를 갖는 polysilsesquioxane은 열적, 전기적, 기계적 성질이 우수하여 차세대 고집적 반도체용 저 유전율 층간 절연막 재료로 부각되고 있으며, 유/무기 하이브리드 재료로 많은 연구 대상이 되고 있다. 그러나 PMSSQ(polymethylsilsesquioxane)는 취성으로 인한 반도체 제조의 CMP 공정에서 미세 크렉 발생의 위험이 있으므로 막의 인성 강화가 요구되고 있다. 이를 위하여 PMSSQ의 취성을 보완하기 위한 목적으로 선형 분자인 dimethylsiloxane을 10-20mo1% 도입하고자 하였다. 이때 도입된 dimethylsiloxane기가 PMSSQ에 균일하게 분포하지 않으면 실리콘 기판에 코팅 후 약 43$0^{\circ}C$의 열처리 공정 중에 열분해 되는 위험이 있다. 이에 따라 본 연구에서는 dimethylsiloxane기의 열분해에 의한 문제를 최소화하기 위하여 출발 물질인 MTMS(methyltrimethoxysilane)와 DMDMS(dimethyldimethoxysilane)과의 가수분해 속도차이를 고려한 단계(step) 반응법과 MTMS 와 DMDES(dimethyldiethoxysilane)를 사용한 리간드 교환법(ligand exchange)으로 dimethylsiloxane이 PMSSQ에 도입된 공중합체를 합성하였다. 각 합성 방법에 따라 합성된 공중합 PMSSQ의 특성을 TGA, TG-IR, $^1$H-NMR, $^{29}$ Si-NMR과 in-situ IR을 통하여 분석하였다. 또한 dimethylsiloxane 도입 양 및 상기 제조 방법에 따라 합성한 공중합체를 Si 기판위에 코팅하여 43$0^{\circ}C$에서 열처리한 후 코팅막의 강도, 두께 및 굴절율 변화를 ellipsometry 와 nanoindenter로 분석하였다.

  • PDF

Computational Approach to Improve Coolant Flow Characteristics for the SI Engine (수치해석적 접근을 통한 불꽃점화 엔진의 냉각수 유동특성 개선)

  • Lee, Sang-In;Park, Sung-Young
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.10 no.12
    • /
    • pp.3553-3558
    • /
    • 2009
  • This study has been conducted to improve coolant flow pattern in the gasoline engine. Flow field has been calculated for the coolant passage mainly around the exhaust ports and valves. For the original model, a flow stagnant region has existed between exhaust valves of the second cylinder. To improve coolant flow characteristics, coolant passage area has been re-modeled and optimized. Furthermore, for the improved coolant core model, coolant passage under the exhaust manifold has been added to reduce exhaust-gas temperature. It was found that the flow through a gasket plays a critical role for the flow in the cylinder head and around exhaust valves. Finally, coolant flow around exhaust valves and in the cylinder head has been improved in terms of flow rate distribution.

Elastic-Plastic Stress Distributions Behavior in the Interface of SiC/Ti-15-3 MMC under Transverse Loading(I) (횡하중을 받는 SiC/Ti-15-3 MMC 복합재 계면영역에서의 탄소성 응력장분포거동(I))

  • Kang Ji-Woong;Kim Sang-Tae;Kwon Oh-Heon
    • Journal of the Korean Society of Safety
    • /
    • v.19 no.4 s.68
    • /
    • pp.25-30
    • /
    • 2004
  • Unidirectional fiber-metal matrix composites have superior mechanical properties along the longitudinal direction. However, the applicability of continuous fiber reinforced MMCs is somewhat limited due to their relatively poor transverse properties. Therefore, the transverse properties of MMCs are significantly influenced by the properties of the fiber/matrix interface. In this study, the interfacial stress states of transversely loaded unidirectional fiber reinforced metal matrix composites investigated by using elastic-plastic finite element analysis. Different fiber volume fractions $(5-60\%)$ were studied numerically. The interface was treated as thin layer (with different properties) with a finite thickness between the fiber and the matrix. The fiber is modeled as transversely isotropic linear-elastic, and the matrix as isotropic elastic-plastic material. The analyses were based on a two-dimensional generalized plane strain model of a cross-section of an unidirectional composite by the ANSYS finite element analysis code.

Improvement of MLLR Speaker Adaptation Algorithm to Reduce Over-adaptation Using ICA and PCA (과적응 감소를 위한 주성분 분석 및 독립성분 분석을 이용한 MLLR 화자적응 알고리즘 개선)

  • 김지운;정재호
    • The Journal of the Acoustical Society of Korea
    • /
    • v.22 no.7
    • /
    • pp.539-544
    • /
    • 2003
  • This paper describes how to reduce the effect of an occupation threshold by that the transform of mixture components of HMM parameters is controlled in hierarchical tree structure to prevent from over-adaptation. To reduce correlations between data elements and to remove elements with less variance, we employ PCA (Principal component analysis) and ICA (independent component analysis) that would give as good a representation as possible, and decline the effect of over-adaptation. When we set lower occupation threshold and increase the number of transformation function, ordinary MLLR adaptation algorithm represents lower recognition rate than SI models, whereas the proposed MLLR adaptation algorithm represents the improvement of over 2% for the word recognition rate as compared to performance of SI models.

Multichannel optical transmission-filters based on one-dimensional photonic crystals (일차원 광자결정을 이용한 다중채널 광-투과필터)

  • Nam, Gi-Yeon;Jeong, Geon;Kim, Jun-Hyung;Cho, Sung-Jun;Lee, Hyun-Yong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2004.07b
    • /
    • pp.993-997
    • /
    • 2004
  • 파장다중분할 방식의 광통신소자는 단일파장 뿐만 아니라 이웃하는 여러 파장대에서도 동작 할 수 있는 유연성을 갖는 소자가 요구된다. 이를 해결하는 하나의 방법이 파장제어(다중채널)광자결정(Photonic crystal)소자이다. 본 연구에서는 결함층으로 광자결정체 배열구조를 가지는 다중주기 일차원광자결정을 이용하므로 투과광 파장제어가 가능한 가변형 다중채널 투과필터를 얻을 수 있는 이론적 모델과 그에 따라 제작된 $Si/SI_)2$의 광자결정체를 제작하고 그 특성을 고찰하였다. 반사밴드 갭내에 생성된 다중투과-dip의 파장 위치는 이론값과 정착하게 일치하였다. 특히, 결함층 수(N)에 따라 광자 에너지갭내에 2N개의 투과-dip 모드를 생성할 수 있으며, 이들은 주파수범위에 대해 대칭 분포됨을 알 수 있다. 여기에 제안하는 다중채널 투과필터는 외부 전원 없이 입사각도를 미세 조절하므로 파장을 tuning할 수 있다.

  • PDF

The Strength Properties Of Light-Weight Formed Concrete According To Curing Times And Replacement Ratio Of WCP (폐콘크리트 미분말 대체율과 양생시간에 따른 경량기포콘크리트의 강도 특성)

  • Shin, Sang-Chul;Kim, Kee-Seok;Ra, Jeong-Min;Choi, Duck-Jin;Jeong, Ji-Yong;Kim, Jin-Man
    • Proceedings of the Korea Concrete Institute Conference
    • /
    • 2010.05a
    • /
    • pp.373-374
    • /
    • 2010
  • This study is to search for recycling method of the WCP(waste concrete powder). From the experiment analysis on the chemical composition, we confirmed that $SiO_2$ was occupied about 60% of WCP. To investigate the applicability of WCP as replacement material of Quartz, we tested the properties of autoclaved light weight concrete containing WCP. As a results, when increasing the replacement of WCP, compressive strength decreased and pore diameter did not change. On the other hand, when increasing curing times, compressive strength and pore diameter increased.

  • PDF

Fatigue Life Prediction of $SIC_w$/Al Composites by Using the Monte-Carlo Simulation (몬테카르로 시뮬레이션에 의한 $SIC_w$/Al 복합재료의 피로수명에측)

  • Ahn, Jeong-Ju;Kwon, Jae-Do;Kim, Sang-Tae
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.20 no.5
    • /
    • pp.1552-1561
    • /
    • 1996
  • It requires uch time and cost to obtain the fatigue crack growth life and fatigue crack growth path morphlogy from the fatigue crack growth tests. In this study, the Monte-Carlo simulation program was developed to predict the fatigue crack growth lofe and fatigue crack growth path morphology of metal matrix composites. Fatigue crack growth lives of 5%, 10%, 15%, 20%, 25% and 30% $SiC_w$/Al composites were predicted by usign the Monte-Carlo Simulation. And the fatigue crack growth lives of 25% $SiC_w$/Al and Almatrix from Monte-carlo simulation were compared with fatigue life from experiments in order to verify the accuracy of Monte-Carlo Simulation program.