• Title/Summary/Keyword: Si 분포

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Microstructure and Characterisistics of Near Surface of $As^+$Ion Implanted Si (A$s^+$이온을 주입시킨 Si 표면부 미세구조와 특성)

  • Shin, D.W.;Choi, C.;Park, C.G.;Kim, J.C.
    • Korean Journal of Materials Research
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    • v.2 no.3
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    • pp.213-219
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    • 1992
  • The microstructure, dopant distribution and electrical properties of the $As^{+}$ ion-implanted surface layer differ significantly depending on the methods of subsequent heat treatments, furnace annealing(FA) and rapid thermal annealing(RTA). The amorphous layer created by ion implantation was recrystallized during the thermal annealing through solid phase epitaxial (SPE) growth. The dopant distribution and electrical properties are discussed with respect to the TEM cross-sectional microstructure observed. The microstructure, dopant distribution and electrical properties depended upon especially the annealing time of the heat treatment.

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Microstructural Effects on DC Bias Characters in FeSiBNi Amorphous Ribbon (FeSiBNi 비정질 리본의 열처리 조건에 따른 미세구조가 직류중첩특성에 미치는 영향)

  • 장용익;김종렬;송용설
    • Journal of the Korean Magnetics Society
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    • v.10 no.1
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    • pp.1-6
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    • 2000
  • Amorphous Fe$_{79.7}$Si$_{9.3}$B$_{9.7}$Ni$_{1.4}$ ribbon alloys were fabricated by a single roll method. To enhance D. C. bias properties, the magnetic and micro-structural changes have been investigated as the variation of annealing time and condition. The D. C. bias properties were found to be directly related to micro-structural changes. Primary ${\alpha}$-Fe dendrites with 200∼300 nm showed the best D. C. bias properties, which resulted from the magnetic domain wall pinning effect. Due to the differences of cooling rate, the growth shape and distribution of the dendrites is divided into two areas.

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A Study of Concentration Profiles in Amorphous Silicon by Phosphorus Doping and Ion Implantation (비정질 실리콘에서 인의 도핑과 이온주입에 따른 농도분포에 대한 연구)

  • 정원채
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.12 no.1
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    • pp.18-26
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    • 1999
  • In this study, the undoped amorphous layers and phosphorus doped amorphous layers are fabricated using LPCVD at 531$^{\circ}C$ with SiH$_4$ gas or at same temperature with PH$_3$ gas during deposition, respectively. The thickness of deposited amorphous layer from this experiments was 5000 ${\AA}$. In this experiments, undoped amorphous layers are deposited with SiH$_4$and Si$_2$H$\_$6/ gas in a low pressure reactor using LPCVD. These amorphous layers can be doped for poly-silicon by phosphorus ion implantation. The experiments of this study are carried out by phosphorus ion implantation with energy 40 keV into P doped and undoped amorphous silicon layers. The distribution of phosphorus profiles are measured by SIMS(Cameca 6f). Recoiling effects and two dimensional profiles are also explained by comparisions of experimental and simulated data. Finally range moments of SIMS profiles are calculated and compared with simulation results.

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Effect of Post Weld Heat Treatment for Crystal Orientation Distribution on Friction Stir Welds of Al-Mg-Si Series Aluminum Alloy Sheets (Al-Mg-Si계 알루미늄 합금 판재 마찰교반접합부의 결정 방위 분포에 대한 용접후열처리의 영향)

  • Lee, Kwang-Jin
    • Journal of Welding and Joining
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    • v.27 no.6
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    • pp.62-67
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    • 2009
  • Friction stir welding (FSW) was carried out for Al-Mg-Si series aluminum alloys which are being used for automotive body structure. Consequently, Post weld heat treatment (PWHT) was applied to the friction stir welds to evaluate the effect of the paint baking process which is one of the automotive fabrication process on friction stir welded zone (FSWZ) in 443K for 1.2Ks. Grain structure and its crystal orientation distribution was measured about both the as welded specimens and the post weld heat treated specimens. An optical microscope (OM) and an field emission scanning electron microscope (FE-SEM) was used for observing the grain structure and measuring its crystal orientation distribution, respectively. Changes on the grain structure and its crystal orientation distribution were not detected. From the present results, it was confirmed that the paint baking process after FSW do not affect on the grain structure and its crystal orientation distribution of FSWZ. The comprehensive investigations will be performed for various automotive aluminum alloys manufactured by different processes, in the future.

The Phytoplankton Compositions and Trophic States at Several Lakes ofSuwon-si, Korea (수원시 수계에 분포하는 식물플랑크톤의 종조성 및 영양단계)

  • Park, Jung-Hun;Moon, Byeong-Ryeol;Lee, Ok-Min
    • ALGAE
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    • v.21 no.2
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    • pp.217-228
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    • 2006
  • Seasonal compositions, standing crops and trophic status of phytoplankton were investigated at 13 sites of Suwon-si, Gyeonggi-do from June, 2004 to March, 2005. Total of 304 taxa were found, and classified as 4 phylums 4 classes 13 orders 36 families 93 genera 246 species 47 varieties 8 forms and 3 unidentified species by Engler’s classification system. Judged by standing crops of phytoplakton, algal blooming was observed at every sampling sites except Pajang reservoir, Hagwanggyo reservoir, Suwon-cheon and Woncheon-cheon throughtout the whole study periods. While Hagwanggyo reservoir appeared to be in mesotrophic or oligomesotrophic status, most of the remaining sampling sites in Suwon-si were in eutrophic status according to trophic status index. In this study, the most abundant taxa revealed in eutrophic status were Anabaena circinalis, Pandorina morum, Scenedesmus acuminatus, and S. quadricauda as previously reported as the most abundant taxa in eutrophic status. But Navicula cryptocephala and Cyclotella stelligera, reported as the abundant taxa of mesotrophic and oligomesotrophic status, respectively, occurred in eutrophic status in this study.

The Formative Processes and Ages of Paleo-coastal Sediments in Daepo-dong Sacheon-si in the Southern Coast, South Korea: Evaluation of the Mode and Rate of the Late Quaternary Tectonism (II) (남해안 사천시 대포동 일대에 분포하는 고해안 퇴적물의 형성 과정과 형성 시기: 한반도 제4기 후기 지각운동의 양식과 변형률 산출을 위한 연구(II))

  • Shin, Jaeryul;Hong, Seongchan
    • Journal of The Geomorphological Association of Korea
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    • v.25 no.3
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    • pp.57-70
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    • 2018
  • This study restores onshore paleo-shoreline records and establishes the nature and strain rate of neotectonism by investigating the existence and formative age of paleo-coastal sediments emerged around Sacheon-si in the Southern part of the Korean peninsula. As a result, paleo-sand bars representing 5m of the paleo-shoreline from high tide level are formed in Sacheon-si, and the formation age of these is confirmed as MIS 5c at approximately 100,000 year BP through rock surface luminescence dating to rounded gravels in paleo-sand bars. Although it is difficult to establish the uplift rate of crust precisely due to incomplete restoration of sea level records during the last interglacial stage, the uplift rate along the Southern coast of the peninsula was assumed approximately 0.72 lower than the Eastern coast during the late Quaternary in comparison to the 1st marine terrace along the Eastern coast.

Distributional Characteristics by Habitat Type of Alien Plants - For Gyeongsang Area in Korea - (외래식물의 서식처 유형에 따른 분포특성 - 한국 경상권을 대상으로 -)

  • Lee, Jung-Min;Kim, Eui-Joo;Lee, Hyo-Hye-Mi;Cho, Kuy-Tae
    • Korean Journal of Ecology and Environment
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    • v.54 no.2
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    • pp.142-150
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    • 2021
  • To analyze the distribution characteristics of alien plants in various habitat types, 249 sites were selected from four administrative districts in the Gyeongsang region of Korea. The survey was conducted across nine different habitat types. A total of 115 species of alien plants were collected; comprising 23 families, 73 genera, 112 species, and 3 varieties. Species from the family Compositae were the most common at 33.0%. Raunkiaer's life forms had the highest occurrence rate with 70 species(60.9%) of therophytes(Th) followed by 30 species (26.1%) of hemicryptophytes (H) and 8 species (7.0%) of geophytes (G). The distributions of alien plant species per habitat type were: 81 species on the roadside; 80 species on vacant lots and artificial habitats; 67 species in streams; 53 species in grasslands; 47 species in cultivated lands; and 39 species on the coast. Since 2017, the number of alien plants has increased in Gyeongju-si, Cheongdo-gun, and Pohang-si, and decreased in Ulsan Metropolitan-si. In each region, 614 taxa were observed. The invasive alien species, Sicyos angulatus, Hypocaeris radicata, and Solanum carolinense, were observed for the first time and are expected to further increase the disturbance of the ecosystem.

Crystalline Growth Properties of Diamond Thin Film Prepared by MPCVD

  • Park Soo-Gil;Kim Gyu-Sik;Einaga Yasuaki;Fujishima Akira
    • Journal of the Korean Electrochemical Society
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    • v.3 no.4
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    • pp.200-203
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    • 2000
  • Boron doped conducting diamond thin films were grown on Si substrate by microwave plasma chemical vapor deposition from a gaseous feed of hydrogen, acetone/methanol and solid boron. The doping level of boron was ca. $10^2ppm\;(B/C)$. The Si substrate was tilted ca. $10^{\circ}$ to make Si substrate, which have different height and temperature. Experimental results showed that different crystalline of diamond thin films were made by different temperature of Si substrate. There appeared $3\~4$ steps of different crystalline morphology of diamond. To characterize the boron-doped diamond thin film, Raman spectroscopy was used for identification of crystallinity. To survey surface morphology, microscope was used. Grain size was changed gradually by different temperature due to different height. The Raman spectrum of film exhibited a sharp peak at $1334cm^{-1}$, which is characteristic of crystalline diamond. The lower position of diamond film position, the more non-diamond component peak appeared near $1550 cm^{-1}$.

Effect of agitation on hydrothermal preparation of $\alpha$-$SiO_2$ powder (수열합성법에 의한 $\alpha$-$SiO_2$분말 제조시 교반의 영향)

  • 임진홍;서경원;목영일;이강인;유효신;이철경
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.2
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    • pp.191-196
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    • 1999
  • Effects of agitation and heating rate on crystallinity, size distribution and mean size of $\alpha$-$SiO_2$powder prepared hydrothermally were investigated. $\alpha$-$SiO_2$crystalline powder, in mean particle size of 1~3.2 $\mu\textrm{m}$, was obtained at $350^{\circ}C$ using KOH as a mineralized for a 3 h reaction. Experimental results showed that particle size became smaller as the rate of agitation increased if it was introduced from the beginning of reaction, however, crystallinity was reduced at the low rate of agitation and it was became enhanced at above 150 r/min. Particle size became larger if agitation was introduced at any time during the reaction rather than introduced from the beginning of reaction. It was also found that particle size became smaller if heating rate was reduced, while the rate of agitation kept constant.

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Metal Plasma-Etching Damages of NMOSFETs with Pure and $N{_2}O$ Gate Oxides (게이트 산화막에 따른 nMOSFET의 금속 플라즈마 피해)

  • Jae-Seong Yoon;Chang-Wu Hur
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.3 no.2
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    • pp.471-475
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    • 1999
  • The metal plasma-etch damage immunity of nMOSFET with $N{_2}O$ gate oxide is found to be improved comparing to that with regular pure oxide of similar thickness. With increasing the antenna ratio (AR), the characteristics of nMOSFETs with $N{_2}O$ oxide shows tighter initial distribution and smaller degradation under constant field stress, which is explained by the effect of the nitrogen at the substrate $Si/SiO_2$ interface. Also, if $N{_2}O$ gate oxide is used, the maximum allowable size of metal AAR and PAR may be increased to the much larger values. These improvements of nMOSFETs with $N{_2}O$ gate oxide are attributed to the effect of the interface hardness improved by the nitrogen included at the substrate-Si/$N{_2}O$-oxide interface.

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