• 제목/요약/키워드: Si/O-doped

검색결과 481건 처리시간 0.027초

Optical, Mechanical and Tribological Properties of $Y_2O_3$ $Er_2O_3$ and $Nd_2O_3$ Doped Polycrystalline Silicon Nitride Ceramics

  • ;이수완
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2010년도 춘계학술발표대회
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    • pp.51.1-51.1
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    • 2010
  • $Y_2O_3$ $Er_2O_3$ and $Nd_2O_3$ doped polycrystalline silicon nitride were prepared by hot pressed sintering at $1850^{\circ}C$ and their optical transmittance were investigated in visible and in infrared region. Mechanical and tribological properties were also investigated. Grain growth in silicon nitride was reduced with addition of $Y_2O_3$ and $Nd_2O_3$. 1 wt.% of each rare earth metal were sintered with 3 wt.% MgO, 9wt.% AlN and 87 wt.% of ${\alpha}-Si_3N_4$. Adding these rare earth metal oxides shows good mechanical properties as high strength and toughness and also shows low friction coefficient.

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Realization and Analysis of p-Type ZnO:Al Thin Film by RF Magnetron Sputtering

  • Jin, Hu-Jie;Jeong, Yun-Hwan;Park, Choon-Bae
    • Transactions on Electrical and Electronic Materials
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    • 제9권2호
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    • pp.67-72
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    • 2008
  • Al-doped p-type ZnO thin films were fabricated by RF magnetron sputtering on n-Si (100) and homo-buffer layers in pure oxygen ambient. ZnO ceramic mixed with 2 wt% $Al_2O_3$ was selected as a sputtering target. XRD spectra show that the Al-doped ZnO thin films have ZnO crystal structure. Hall Effect experiments with Van der Pauw configuration show that p-type carrier concentrations are arranged from $1.66{\times}10^{16}$ to $4.04{\times}10^{18}\;cm^{-2}$, mobilities from 0.194 to $198\;cm^2V{-1}s^{-1}$ and resistivities from 0.0963 to $18.4\;{\Omega}cm$. FESEM cross section images of different parts of a p-type ZnO:Al thin film annealed at $800^{\circ}C$ show a compact structure. Measurement for same sample shows that density is $5.40\;cm^{-3}$ which is smaller than theoretically calculated value of $5.67\;cm^{-3}$. Photoluminescence (PL) spectra at 10 K show a shoulder peak of p-type ZnO film at about 3.117 eV which is ascribed to electron transition from donor level to acceptor level (DAP).

Er이 도핑된 졸-겔 코팅막의 발광특성 (Near IR Luminescence Properties of Er-doped Sol-Gel Films)

  • Lim, Mi-Ae;Seok, Sang-Il;Kim, Ju-Hyeun;Ahn, Bok-Yeop;Kwon, Jeong-Oh
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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    • pp.136-136
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    • 2003
  • In fiber optic networks, system size and cost can be significantly reduced by development of optical components through planar optical waveguides. One important step to realize the compact optical devices is to develop planar optical amplifier to compensate the losses in splitter or other components. Planar amplifier provides optical gain in devices less than tens of centimeters long, as opposed to fiber amplifiers with lengths of typically tens of meters. To achieve the same amount of gain between the planar and fiber optical amplifier, much higher Er doping levels responsible for the gain than in the fiber amplifier are required due to the reduced path length. These doping must be done without the loss of homogeniety to minimize Er ion-ion interactions which reduce gain by co-operative upconversion. Sol-gel process has become a feasible method to allow the incorporation of Er ion concentrations higher than conventional glass melting methods. In this work, Er-doped $SiO_2$-A1$_2$ $O_3$ films were prepared by two different method via sol -Eel process. Tetraethylorthosilicate(TEOS)/aluminum secondary butoxide [Al (OC$_4$ $H_{9}$)$_3$], methacryloxypropylcnethoxysaane(MPTS)/aluminum secondary butofde [Al(OC$_4$ $H_{9}$)$_3$] systems were used as starting materials for hosting Er ions. Er-doped $SiO_2$-A1$_2$ $O_3$ films obtahed after heat-treating, coatings on Si substrate were characterized by X-ray din action, FT-IR, and N-IR fluorescence spectroscopy. The luminescence properties for two different processing procedure will be compared and discussed from peak intensity and life time.

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Al-doped Uvarovite 안료의 합성과 특성 (Synthesis and Characterization of Al-doped Uvarovite Green Pigments)

  • 서성규;이병하
    • 한국세라믹학회지
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    • 제47권6호
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    • pp.608-612
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    • 2010
  • Uvarovite Garnet is green pigment prepared by using $Cr_2O_3$, CaO and $SiO_2$ which are widely used in ceramic industry. The synthesis of above pigment was carried out by mixing $K_2Cr_2O_7$, $SiO_2$ and $CaCO_3$ as formulated and then firing at $1000{\sim}1200^{\circ}C$. To investigate the optimum synthesis condition of the Uvarovite Garnet. it was prepared by using CaO to replace $CaCO_3$, $CaF_2$ and $CaCl_2$. To get green brighter color, $Al^{3+}$ was substituted for $Cr^{3+}$. They were characterized by X-ray diffraction, UV-Vis spectroscopy, Raman spectroscopy and SEM analysis. When the pigments were applied to lime glazes (6 wt%), color parameters of Uvarovite Garnet showed the $L^*$=40.99, $a^*$=-16.23 and $b^*$=17.04.

Eu와 V 동시 도핑에 의한 BiFeO3 박막의 구조와 전기적 특성 (Structural and Electrical Properties of BiFeO3 Thin Films by Eu and V Co-Doping)

  • 장성근;김윤장
    • 한국전기전자재료학회논문지
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    • 제32권3호
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    • pp.229-233
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    • 2019
  • Pure $BiFeO_3$ (BFO) and (Eu, V) co-doped $Bi_{0.9}Eu_{0.1}Fe_{0.975}V_{0.025}O_{3+{\delta}}$ (BEFVO) thin films were deposited on $Pt(111)/Ti/SiO_2/Si(100)$ substrates by chemical solution deposition. The effects of co-doping were observed by X-ray diffraction, Raman spectroscopy, and scanning electron microscopy (SEM). The electrical properties of the BEFVO thin film were improved as compared to those of the pure BFO thin film. The remnant polarization ($2P_r$) of the BEFVO thin film was approximately $26{\mu}C/cm^2$ at a maximum electric field of 1,190 kV/cm with a frequency of 1 kHz. The leakage current density of the co-doped BEFVO thin film ($4.81{\times}10^{-5}A/cm^2$ at 100 kV/cm) was two orders of magnitude lower than of that of the pure BFO thin film.

20mol% Gd-doped 소결체 CeO$_2$ 전해질의 전기적 특성분석 (Characterization for Electrical Properties of Sintered 20mol% Gd-doped CeO$_2$ Electrolyte)

  • 김선재;국일현
    • 한국세라믹학회지
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    • 제35권1호
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    • pp.97-105
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    • 1998
  • 20mol% Gd-doped CeO2 ultrafine powders as a promising electrolyte for the low temperature solid ox-ide fuel cells were synthesized with particle sizes of 15-20 nm using glycine nitrate process(GNP) fol-lowed by sintering their pellets at 150$0^{\circ}C$ for various times in air and then the electrical properties of the sintered pellets were investigated. The sintering behaviors and electrical properties for the sintered 20 sintered mol% Gd-doped CeO2 pellets were analyzed using dilatometer and SEM and AC two-terminal impedance technique respectively. As the heating temperature increased the synthesized powder had the sintering behaviors to show the start of the significant shrink at temperature of about $700^{\circ}C$ and to show the end of the shrink at the temperature of about 147$0^{\circ}C$. When the pellets were sintered with the vaious times at 150$0^{\circ}C$ the temperatuer which the shrink had been already completed the grain sizes in the sintered 20 mol% Gd-doped GeO2 pellets increased with the increase of the sintering time but their electrical resis-tivities showed the minimum value at the sintering time of 10h. It is due that the pellet sintered for 10h had the minimum activation energy fior the electtrical conduction. Thus it is thought that the decrease of the activation energy with the increase of the sintering time to 10h is induced by the enhanced mi-crostructure like the decrease of pore amount and the grain growth and its increase with the sintering times more than 10h is induced by the increase of the amounts of the impurities such as Mg. Al and Si from the sintering atmosphere.

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RF 마그네트론 스퍼터링에 의한 ZnO박막의 증착 및 구리 도우핑 효과 (Deposition of ZnO Thin Films by RF Magnetron Sputtering and Cu-doping Effects)

  • 이진복;이혜정;서수형;박진석
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권12호
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    • pp.654-664
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    • 2000
  • Thin films of ZnO are deposited by using an RF magnetron sputtering with varying the substrate temperature(RT~39$0^{\circ}C$) and RF power(50~250W). Cu-doped ZnO(denoted by ZnO:Cu) films have also been prepared by co-spputtering of a ZnO target on which some Cu-chips are attached. Different substrate materials, such as Si, $SiO_{2}/Si$, sapphire, DLC/Si, and poly-diamond/Si, are employed to compare the c-axial growth features of deposited ZnO films. Texture coefficient(TC) values for the (002)-preferential growth are estimated from the XRD spectra of deposited films. Optimal ranges of RF powers and substrate temperatures for obtaining high TC values are determined. Effects of Cu-doping conditions, such as relative Cu-chip sputtering areas, $O_{2}/(Ar+O_{2})$ mixing ratios, and reactor pressures, on TC values, electrical resistivities, and relative Cu-compositions of deposited ZnO:Cu films have been systematically investigated. XPS study shows that the relative densities of metallic $Cu(Cu^{0})$ atoms and $CuO(Cu^{2+})$-phases within deposited films may play an important role of determining their electrical resistivities. It should be noted from the experimental results that highly resistive(> $10^{10}{\Omega}cm$ ZnO films with high TC values(> 80%) can be achieved by Cu-doping. SAW devices with ZnO(or Zn):Cu)/IDT/$SiO_{2}$/Si configuration are also fabricated to estimate the effective electric-mechanical coupling coefficient($k_{eff}^{2}$) and the insertion loss. It is observed that the devices using the Cu-doped ZnO films have a higher $k_{eff}^{2}$ and a lower insertion loss, compared with those using the undoped films.

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전기화학증착법으로 성장된 n-ZnO 나노구조/p-Si 기판의 특성연구

  • 김명섭;이희관;유재수
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.102-102
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    • 2011
  • ZnO는 우수한 전기적, 광학적 특성으로 LED, solar cell 등과 같은 광전자소자의 응용을 목적으로 많은 연구가 진행되고 있다. 최근에는 ZnO 동종접합을 만들고자 많은 연구가 진행되고 있으나 p형 ZnO의 낮은 용해성과 높은 불순물에 따른 제조의 어려움으로 현재까지는 n형 ZnO만이 전도성 기판 위에 성장되어 응용되고 있다. 전도성 기판으로서 Si의 경우 낮은 가격, 공정의 용이함 등으로 GaN, SiC 등의 기판에 비하여 많은 응용이 가능하다. 따라서 본 연구에서는 전기화학증착법을 이용하여 p-n 접합을 형성하기 위하여 p형 Si 기판 위에 n형 ZnO 나노구조를 성장하고 그 특성을 분석하였다. 전기화학증착법은 낮은 온도 및 간단한 공정과정으로 빠른 성장 속도를 가지고 나노구조를 효과적으로 성장할 수 있는 방식이다. Seed 층 및 열처리에 따른 n형 ZnO 나노구조의 성장 특성 분석을 위하여 radio frequency (RF) magnetron 스퍼터를 사용하여 ZnO 및 Al doped ZnO (AZO) seed 층을 p형 Si 기판 위에 증착 후 다양한 온도로 열처리를 수행하였다. 질산아연(zinc nitrate)과 HMT가 희석된 용액에 KCl 촉매를 일정량 첨가한 후 다양한 공정 온도, 공정시간 및 질산아연의 몰농도를 변화시켜 n형 ZnO 나노구조를 성장하였다. 성장된 나노구조의 특성은 field emission scanning microscopy (FE-SEM), energy dispersive X-ray (EDX), photoluminescence (PL) 등의 장비를 사용하여 구조적, 광학적 특성을 분석하였다.

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Photoluminescence Imaging of SiO2@ Y2O3:Eu(III) and SiO2@ Y2O3:Tb(III) Core-Shell Nanostructures

  • Cho, Insu;Kang, Jun-Gill;Sohn, Youngku
    • Bulletin of the Korean Chemical Society
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    • 제35권2호
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    • pp.575-580
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    • 2014
  • We uniformly coated Eu(III)- and Tb(III)-doped yttrium oxide onto the surface of $SiO_2$ spheres and then characterized them by scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction crystallography and UV-Visible absorption. 2D and 3D photoluminescence image map profiles were reported for the core-shell type structure. Red emission peaks of Eu(III) were observed between 580 to 730 nm and assigned to $^5D_0{\rightarrow}^7F_J$ (J = 0 - 4) transitions. The green emission peaks of Tb(III) between 450 and 650 nm were attributed to the $^5D_4{\rightarrow}^7F_J$ (J = 6, 5, 4, 3) transitions. For annealed samples, Eu(III) ions were embedded at a $C_2$ symmetry site in $Y_2O_3$, which was accompanied by an increase in luminescence intensity and redness, while Tb(III) was changed to Tb(IV), which resulted in no green emission.

PC 기판위에 증착된 SiO2/GZO박막의 전자빔 조사에너지에 따른 특성 변화 (Effect of Electron Irradiation Energy on the Properties of GZO/SiO2 Thin Films on Polycarbonate)

  • 허성보;박민재;정우창;김대일;차병철
    • 한국표면공학회지
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    • 제47권6호
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    • pp.341-346
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    • 2014
  • Ga-doped ZnO (GZO) single layer and $SiO_2/GZO$ bi-layered films were deposited on Polycarbonate(PC) substrate by radio frequency magnetron sputtering. Influence of the structural, electrical, and optical properties of the films was considered. We have considered the influence of electron irradiation energy of 450 and 900 eV on the stuctural, electrical and optical properties of $SiO_2/GZO$ thin films. The optical transmittance in a visible wave length region increased with the electron irradiation energy. The electrical resistivity of the films were dependent on the electron's irradiation energy. The $SiO_2/GZO$ films irradiated at 900 eV were showen the lowest resistivity of $7.8{\times}10^{-3}{\Omega}cm$. The film which was irradiated by electron at 900 eV shows 84.3% optical transmittance and also shows lower than contact angle of $58^{\circ}$ in this study.