• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.66-66
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• 2008

Most of the properties of ITO films depend on their substrate nature, deposition techniques and ITO film composition. For the display panel application, it is normally deposited on the glass substrate which has high strain point (>575 degree) and must be deposited at a temperature higher than $250^{\circ}C$ and then annealed at a temperature higher than $300^{\circ}C$ in order to high optical transmittance in the visible region, low reactivity and chemical duration. But the high strain point glass (HSPG) used as FPDs is blocking popularization of large sizes FPDs because it is more expensive than a soda lime glass (SLG). If the SLG could be used as substrate for FPDs, then diffusion of Na ion from the substrate occurs into the ITO films during annealing or heat treatment on manufacturing process and it affects the properties. Therefore proper care should be followed to minimize Na ion diffusion. In this study, we investigate the electrical, optical and structural properties of ITO films deposited on the SLG and the Asahi glass(PD200) substrate by rf magnetron sputtering using a ceramic target ($In_2O_3:SnO_2$, 90:10wt.%). These films were annealed in $N_2$ and air atmosphere at $400^{\circ}C$ for 20min, 1hr, and 2hrs. ITO films deposited on the SLG show a high electrical resistivity and structural defect as compared with those deposited on the PD200 due to the Na ion from the SLG on diffuse to the ITO film by annealing. However these properties can be improved by introducing a barrier layer of $SiO_2$ or $Al_2O_3$ between ITO film and the SLG substrate. The characteristics of films were examined by the 4-point probe, FE-SEM, UV-VIS spectrometer, and X-ray diffraction. SIMS analysis confirmed that barrier layer inhibited Na ion diffusion from the SLG.

• The Journal of the Petrological Society of Korea
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• v.13 no.4
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• pp.179-190
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• 2004

Precambrian metamorphic rocks of Yeongyang-Uljin area, which is located in the eastern part of Sobaegsan Massif, Korea, are composed of Pyeonghae, Giseong, Wonnam Formations and Hada leuco granite gneisses. These show a zonal distribution of WNW-ESE trend, and are intruded by Mesozoic igneous rocks and are unconformably overlain by Mesozoic sedimentary rocks. This study clarifies the deformation history of Precambrian metamorphic rocks after the formation of gneissosity or schistosity on the basis of the geometric and kinematic features and the forming sequence of multi-deformed rock structures, and suggests that the geological structures of this area experienced at least four phases of deformation i.e. ductile shear deformation, one deformation before that, at least two deformations after that. (1) The first phase of deformation formed regional foliations and WNW-trending isoclinal folds with subhorizontal axes and steep axial planes dipping to the north. (2) The second phase of deformation occurred by dextral ductile shear deformation of top-to-the east movement, forming stretching lineations of E-W trend, S-C mylonitic structure foliations, and Z-shaped asymmetric folds. (3) The third phase deformation formed I-W trending open- or kink-type recumbent folds with subhorizontal axes and gently dipping axial planes. (4) The fourth phase deformation took place under compression of NNW-SSE direction, forming ENE-WSW trending symmetric open upright folds and asymmetric conjugate kink folds with subhorizontal axes, and conjugate faults thrusting to the both NNW and SSE with drag folds related to it. These four phases of deformation are closely connected with the orientation of regional foliation in the Yeongyang-Uljin area. 1st deformation produced regional foliation striking WNW and steeply dipping to the north, 2nd deformation locally change the strike of regional foliation into N-S direction, and 3rd and 4th deformations locally change dip-angle and dip-direction of regional foliation.