• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.100-101
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• 2012

The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

• Progress in Superconductivity
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• v.9 no.1
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• pp.35-39
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• 2007

Myocardial ischemia causes heterogeneity of ventricular repolarization and sometimes produces changes of the ST-T wave in ECG. Therefore, morphological changes of ST-T waveform in ECG have a clinical significance in diagnosing myocardial ischemia. In this study, we investigated the ST-T changes caused by myocardial ischemia in magnetocardiography (MCG). We analyzed MCG patterns of biphasic T, ST segment deviations from baseline, main current angle of $T_{peak}$ and $T_{peak}$ dispersion in 300 CAD patients without ST elevation in ECG, 122 symptomatic patients and 48 normal subjects. MCGs were recorded by multichannel SQUID system in a magnetically shielded room. As results, we found that appearances of the abnormality were strongly correlated with the severity of myocardial ischemia. Also we found that the percentage of the patients showing MCG changes were higher than those in ECG. These results show that morphological changes of ST-T waveform in MCG can be used as a marker of myocardial ischemia.

• Journal of Advanced Marine Engineering and Technology
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• v.37 no.1
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• pp.29-34
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• 2013

The welds tent to be weakened if it is exposed to the air during the welding process. In titanium welding with Gas Tungsten Arc Welding, inappropriate colors of the welds, such as purple/red, blue, yellow, gray, white and pink represents that it is contaminated by oxygen and nitrogen in the air. Shielding gases can be used to protect welds from the contamination. In addition, Weld metal and heat affected zone (HAZ) are also shielded from the air when it is cooled down to the room temperature. In this paper, appropriate shielding gases for the shape and form of Trailing Shielding Jig and torch shielding ($13{\sim}20{\ell}/min$), after shielding ($22{\sim}30{\ell}/min$), and back shielding ($25{\sim}30{\ell}/min$) are studied.

• Journal of Ocean Engineering and Technology
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• v.21 no.5
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• pp.39-46
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• 2007

The sea water pipe of a ship's engine room is a severely corrosive environment caused by fast flawing sea water containing chloride ions and high conductivity. Therefore, leaking of sea water may occur as a result of local corrosion of the welded zone. Leaking is usually controlled by various welding methods. In this study, when the sea water pipe is welded with certain welding methods and welding electrodes, the corrosion resistance of WM (Welding metal) and HAZ (Heat affected zone) was investigated using electrochemical methods. Although the corrosion potential of the HAZ is higher than that of WM, the corrosion resistance of WM is superior to HAZ. However, when WM and HAZ are both opened to the sea water, the WM part with the anode was more seriously corroded than was the HAZ of the cathode by performance of a galvanic cell due to difference of the corrosion potential between HAZ and WM. In particular TIG welding showed relatively good results in corrosion resistance of both HAZ and WM compared to other welding methods.

• Progress in Superconductivity
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• v.7 no.1
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• pp.46-51
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• 2005

We have developed control electronics to operate flux-locked loop (FLL), and analog signal filters to process FLL outputs for 64-channel Double Relaxation Oscillation SQUID (DROS) magnetocardiography (MCG) system. Control electronics consisting of a preamplifier, an integrator, and a feedback, is compact and low-cost due to larger swing voltage and flux-to-voltage transfer coefficients of DROS than those of dc SQUIDs. Analog signal filter (ASF) serially chained with a high-pass filter having a cut-off frequency of 0.1 Hz, an amplifier having a gain of 100, a low-pass filter of 100 Hz, and a notch filter of 60 Hz makes FLL output suitable for MCG. The noise of a preamplifier in FLL control electronics is $7\;nV/{\surd}\;Hz$ at 1 Hz, $1.5\;nV/{\surd}\;Hz$ at 100 Hz that contributes $6\;fT/{\surd}\;Hz$ at 1 Hz, $1.3\;fT/{\surd}\;Hz$ at 100 Hz in readout electronics, and the noise of ASF electronics is $150\;{\mu}V/{\surd}\;Hz$ equivalent to $0.13\;fT/{\surd}\;Hz$ within the range of $1{\sim}100\;Hz$. When DROSs are connected to readout electronics inside a magnetically shielded room, the noise of 64-channel DROS system is $10\;fT/{\surd}\;Hz$ at 1 Hz, $5\;fT/{\surd}\;Hz$ at 100 Hz on the average, low enough to measure human MCG.

• Progress in Superconductivity
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• v.13 no.3
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• pp.139-145
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• 2012

Electric activity of cardiac muscles generates magnetic fields. Magnetocardiography (or MCG) technology, measuring these magnetic signals, can provide useful information for the diagnosis of heart diseases. It is already about 40 years ago that the first measurement of MCG signals was done by D. Cohen using SQUID (superconducting quantum interference device) sensor inside a magnetically shielded room. In the early period of MCG history, bulky point-contact RF-SQUID was used as the magnetic sensor. Thanks to the development of Nb-based Josephson junction technology in mid 1980s and new design of tightly-coupled DC-SQUID, low-noise SQUID sensors could be developed in late 1980s. In around 1990, several groups developed multi-channel MCG systems and started clinical study. However, it is quite recent years that the true usefulness of MCG was verified in clinical practice, for example, in the diagnosis of coronary artery disease. For the practical MCG system, technical elements of MCG system should be optimized in terms of performance, fabrication cost and operation cost. In this review, development history, technical issue, and future development direction of MCG technology are described.

• Progress in Superconductivity and Cryogenics
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• v.15 no.2
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• pp.20-23
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• 2013

For sensitive measurements of micro-Tesla nuclear magnetic resonance (${\mu}T$-NMR) signal, a low-noise superconducting quantum interference device (SQUID) system is needed. We have fabricated a liquid He dewar for an SQUID having a large diameter for the pickup coil. The initial test of the SQUID system showed much higher low-frequency magnetic noise caused by the thermal magnetic noise of the aluminum plates used for the vapor-cooled thermal shield material. The frequency dependence of the noise spectrum showed that the noise increases with the decrease of frequency. This behavior could be explained from a two-layer model; one generating the thermal noise and the other one shielding the thermal noise by eddy-current shielding. And the eddy-current shielding effect is strongly dependent on the frequency through the skin-depth. To minimize the loop size for the fluctuating thermal noise current, we changed the thermal shield material into insulated thin Cu mesh. The magnetic noise of the SQUID system became flat down to 0.1 Hz with a white noise of 0.3 $fT/{\surd}Hz$, including the other noise contributions such as SQUID electronics and magnetically shielded room, etc, which is acceptable for low-noise ${\mu}T$-NMR experiments.

• Progress in Superconductivity
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• v.13 no.1
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• pp.18-23
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• 2011

We developed a four-channel first order gradiometer system to measure magnetoencephalogram for mice. We used double relaxation oscillation SQUID (DROS). The diameter of the pickup coil is 4 mm and the distance between the coils is 5 mm. Coil distance was designed to have good spatial resolution for a small mouse brain. We evaluated the current dipole localization confidence region for a mouse brain, using the spherical conductor model. The white noise of the measurement system was about 30 fT/$Hz^{1/2}$/cm when measured in a magnetically shielded room. We measured magnetic signal from a phantom having the same size of a mouse brain, which was filled with 0.9% saline solution. The results suggest that the developed system has a feasibility to study the functions of brain of small animals.

• Progress in Superconductivity
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• v.8 no.2
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• pp.164-168
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• 2007

We developed a SQUID magnetometer based on Double Relaxation Oscillation SQUID(DROS) for measuring magnetocardiography(MCG). Since DROS provides a 10 times larger flux-to-voltage transfer coefficient than the conventional DC-SQUID, simple flux-locked loop electronics could be used for SQUID operation. Especially, we adopted an external feedback to eliminate the magnetic coupling with adjacent channels. When the DROS magnetometer was operated inside a magnetically shielded room, average magnetic field noise was about 5 $fT/^{\surd}Hz$ at 100 Hz. Using the DROS magnetometer, we constructed a multichannel MCG system. The system consisted of 61 magnetometers are arranged in a hexagonal structure and measures a vertical magnetic-field component to the chest surface. The distance between adjacent channels is 26 mm and the magnetometers cover a circular area with a diameter of 208 mm. We recorded the MCG signals with this system and confirmed the magnetic field distribution and the myocardinal current distribution.

• Progress in Superconductivity
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• v.10 no.1
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• pp.1-5
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• 2008

Magnetocardiography (MCG) is a non-contact, non-invasive, and harmless diagnostic tool to detect the abnormal electrical conductivities of the heart caused by the various coronary artery disease or cardiac muscular disease. The purpose of this study is to identify whether MCG signals and MCG parameter values vary depending on the location of sensor assembly. It will be an important reference for the standard measurement. Four healthy male subjects (33.3$\pm$6.3 years) participated in this study. Basal recording was made at 20 mm apart from the chest surface. All subjects were requested to take a regular breathe while MCG was taken. The gap between the chest surface and the bottom of the sensor assembly was 20, 40, 60, and 80 mm. Recording was made using 64 channel MCG system (Axial type, first order gradiometer) developed by Korea Research Institute of Standards and Science (KRISS). After resting for two minutes in a supine position on the bed in magnetically shielded room, MCG were recorded for 30 s. As the sensor location is getting away from the chest surface signal, the amplitude of R and T wave peak decreases to 70% (at 40 mm gap), 50% (at 60 mm), and 37% (at 80 mm) of the reference strength measured (y = $1.3903e^{-0.0169x}$, $R^2$ = 0.99; where y=amplitude remained after reduction, x=distance between chest surface and sensor location). The regression equations may be used as a good reference to calculate how much strength will be decreased by the distance. In MCG parameters, most values of parameters were decreased as the gap was increased. As an example, the current moment at T-wave peak reduced to 52% (at 40 mm gap), 33% (at 60 mm), and 19% (at 80 mm). However, the difference caused by the gap could be reduced by considering the distance when the MCG parameters were calculated. The study results can be used as a useful reference to design the baseline and the sensor location.