• The Transactions of the Korean Institute of Electrical Engineers A
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• v.48 no.5
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• pp.607-614
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• 1999

This paper deals with the design problem of the state estimator for servo system. The servo system has input time delay which depends on the computational time of control algorithm. The delayed input is a factor that brings out the state estimation error. So in order to reduce the state estimation error of the system, we propose a state estimator in which the delayed input of the system is considered. For this purpose, discrete time state space model is established accounting for the delayed input and a state estimator is designed based on this model. Kalman filter algorithm is employed in the design of the state estimator. The proposed estimator is used in the speed control of servo system with delayed input. Performance of the proposed state estimator is exemplified via simulations and experiments for servo system. Also, robustness of the proposed estimator to modeling error by variation of the system parameters is also shown in simulations.

• The Journal of Korea Robotics Society
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• v.5 no.2
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• pp.160-168
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• 2010

In order to achieve a force controller with high performance, an accurate torque servo is required. However, the precise torque servo for a double vane rotary actuator system has not been developed till now, due to many nonlinear characteristics and system parameter variations. In this paper, the torque servo structure for the double vane rotary actuator system is proposed based on the torque model. Nonlinear equations are set up using dynamics of the double vane rotary hydraulic actuator system. Then, to derive the torque model, the nonlinear equations are linearized using a taylor series expansion. Both effectiveness and performance of the design of torque servo are verified by torque servo experiments and applying the suggested torque model to an impedance controller.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.111.2-111
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• 2001

The research focuses on controlling a gap to measure the surface defect in semi-conductor fabrication device. The measurement is available accompanying a near field image gap control. In this article, a pneumatic servo system is adopted for the near field gap control. The advantage of the pneumatic servo system is on the preventing the possibility of contacting the device to the wapper surface, fence arising fatal damage. Furthermore, the air from the pneumatic system blows the some particle on the wapper during controlling. The target gap is less than 20 $\mu$m and the gap should keep same amount while the device moves around the surface. The experiment by the pneumatic servo control system is done by employing a simple PID control, and the tracking performance is remarkably verified. The target gap is set from 10 $\mu$m to 100 $\mu$m ...

• Journal of the Korean Society for Precision Engineering
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• v.14 no.11
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• pp.25-33
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• 1997

This study deals with controlling the velocity of Electr-Hydraulic servo system through the non-stan-dard PIC control. This was done as follows. First, we modeled nonlinearised model and linearised model, second designed analytic program for electro-hydraulic servo system velocity control Lastly, to im- prove dynamic characteristics of system we designed non-standard PID contoller and verifed throughth experi- ment and MATLAB program, commercial used software.

• Proceedings of the KIEE Conference
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• 1996.07a
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• pp.270-273
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• 1996

A scheme of observer-based MFAC(Model Following Acceleration Control) system is proposed for the robustness control of DC servo position control systems. The proposed system is composed of LMFC, variable structure feedback controller, and reduced-order state observer. As the servo motor is controlled by the acceleration command, the total servo system becomes the acceleration control system. Simulation results show that the proposed system have robust properties against parameter variations and external disturbances.

• Journal of Institute of Control, Robotics and Systems
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• v.9 no.6
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• pp.435-441
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• 2003

This paper addresses that an approximation and tracking control of realtime recurrent neural networks(RTRN) using two-dimensional iterative teaming algorithm for an electro-hydraulic servo system. Two dimensional learning rule is driven in the discrete system which consists of nonlinear output fuction and linear input. In order to control the trajectory of position, two RTRN with the same network architecture were used. Simulation results show that two RTRN using 2-D learning algorithm are able to approximate the plant output and desired trajectory to a very high degree of a accuracy respectively and the control algorithm using two identical RTRN was very effective to trajectory tracking of the electro-hydraulic servo system.

• Transactions of Materials Processing
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• v.13 no.3
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• pp.253-261
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• 2004

The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.844-847
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• 1996

This paper describes the servo position control for the 2-axis positioning table the servo controller consists of conventional feedback loops, disturbance observer. To reduce the contour error, which occurs in the multi-dimensions machines, cross-coupled controller(CCC) is suggested. A weak point of the CCC is their low effectiveness in dealing with arbitrary nonlinear contour such as circles and parabolas. This paper introduces a new nonlinear CCC that is based on control gains that vary during the contour movement The gains of CCC and adjusted in real time according to the shape of nonlinear contour. The feedback controller based on the disturbance observer compensated for external disturbance, plant uncertainty and bad effectiveness by friction model. Suggested servo controller which improve the contouring accuracy, apply to the 2-axis system. Simulation results on 2-axis table verify the effectiveness of the proposed servo controller.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.7
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• pp.43-52
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• 2022

Design of a controller for a high-precision servo control system has been a popular topic while finding optimal parameters for multiple controllers is still a challenging subject. In this paper, we propose a practical scheme to optimize multi-parameters for the robust servo controller design by introducing a new cost function and optimization scheme. The proposed design method provides a simple and practical tool for the systematic servo design to reduce the control error with guaranteeing robust stability of the overall system. The reduction of the position error by 24% along with a faster convergence rate is demonstrated using a typical hard disk drive servo controller with 41 parameters.

• 제어로봇시스템학회:학술대회논문집
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• 1989.10a
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• pp.1125-1128
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• 1989

In this paper, the inverse model of a servo system is realized in a PDP-type neural network. The neural network learns the mapping between the input and output of the servo system. Some simulation results show the effectiveness of this inverse model obtained here.