• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.1379-1380
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.85-86
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• 2006

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.585-586
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.59-60
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.585-590
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• 1995

This paper describes strain distribution analysis of a multiple parallel plate structure for a multi-componenet force and moment sensor. A parallel plate structure which has higher rigidity than a simple beam structure are widely used for multi-component force and moment sensor. The strain distribution in the beams of a parallel plate structure should be accurately calculated to design a high precision multi-component force and moment sensor. We derived equations to calculate the strains for multiple parallel plate structure. It reveals that results from finite element analysis and experiment are in good agreement with results from the derived equations.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.461-462
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• 2013

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.283-286
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• 2002

In fiber optic sensor, the error of the measurement is influenced by the surface roughness of the target and surroundings, especially the outside light. To reduce or modify this error, the sensitivity of the fiber optic sensor and the noise change by the surface roughness of the target should be known. The purpose of this paper is to observe the sensitivity of the fiber optic sensor and the noise according to the surface roughness of the target.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.232-236
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• 1996

This paper deals with an on-the-machine measurement method for roughness of ground surface by using flux ratio of scattered lights. A sensor and control unit is developed so as to e applied to surface grinding processes. The performance of the sensor is compared with that of stylus. The experimental investigation shows that not onlythe sensor has good performance as a surface roughness sensor but alsothe sensor is very useful for monitoring grinding condition in order to detect ill-conditioned grinding or dressing time.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.317-322
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• 1994

The design and performance verification of collocated capacitance sensor system for magnetic bearing is presented. Noncollocation between actuators and sensors may cause unstable rotor behavior. The capacitance sensor is not affected by magnetic field. PCB type capacitance sensor is installed between magnetic bearing polse. so, collocation of sensors and actuators can be achieved. Experiment of sensor's static and dynamic charactistics is conducted. Modeling of the rotor system supported by magnetic bearing is made. And performance comparison between simulation and experiment is showed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.637-642
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• 1995

For measuring the error motion of ultra-precision spindle, eliminating the geometric errors is a must. Unless it is achieved, geometric errors will be dominant in data. Here, the roundness error and alignment error between spindle and sensor are to be removed. That's because typical error range of such spindle is muchless than geometric one. A capacitive transducer of cylidricalshape was developed, which takes full advantage of the spatial-averaging effect by using large area compared tpo the geometric error. This idea was first proposed by Chapman and here it is modified for better performance with nomical gap of 50 .mu. m and with newly designed guards which encompass the respective sensor to rectify the electrical field distribution in good shape. The measurement system is made to get the orbit of Ultra-Precision Air Spindle which is supposed to have its runout under 1 .mu. m. The Calibration data of this sensor is presented and the spindle orbit from 2000rpm to 5500rpm is showed. It is quite reasonable to use this sensor in the range of 60 .mu. m with an accuracy of several tens of nm.