• 마이크로전자및패키징학회지
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• 제31권2호
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• pp.45-53
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• 2024

The maintenance of semiconductor equipment is crucial for the continuous growth of the semiconductor market. System management is imperative given the anticipated increase in the capacity and complexity of industrial equipment. Ensuring optimal operation of manufacturing processes is essential to maintaining a steady supply of numerous parts. Particularly, monitoring the status of substrate transfer robots, which play a central role in these processes, is crucial. Diagnosing failures of their major components is vital for preventive maintenance. Fault diagnosis methods can be broadly categorized into physics-based and data-driven approaches. This study focuses on data-driven fault diagnosis methods due to the limitations of physics-based approaches. We propose a methodology for data acquisition and preprocessing for robot fault diagnosis. Data is gathered from vibration sensors, and the data preprocessing method is applied to the vibration signals. Subsequently, the dataset is trained using Gradient Tree-based XGBoost machine learning classification algorithms. The effectiveness of the proposed model is validated through performance evaluation metrics, including accuracy, F1 score, and confusion matrix. The XGBoost classifiers achieve an accuracy of approximately 92.76% and an equivalent F1 score. ROC curves indicate exceptional performance in class discrimination, with 100% discrimination for the normal class and 98% discrimination for abnormal classes.

• International Journal of Fuzzy Logic and Intelligent Systems
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• 제2권1호
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• pp.33-37
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• 2002

Insulation aging diagnosis system provides early warning regarding electrical equipment defects. Early warning is very important in that it can avoid great losses resulting from unexpected shutdown of the production line. Since relations of insulation aging and partial discharge dynamics are non-linear. it is very difficult to provide early warning in an electrical equipment. In this paper, we propose the design method of insulation aging diagnosis system that use a electromagnetic wave and acoustic signal to diagnose an electrical equipment. Proposed system measures the partial discharge on-line from DAS(Data Acquisition System and acquires 2D patterns from analyzing it. For filtering the noise contained in sensor signals we used ICA algorithms. Using this data, we design of the neuro-fuzzy model that diagnoses an electrical equipment and is investigated in this paper. Validity of the new method is asserted by numerical simulation.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 2000년도 춘계학술대회 학술발표 논문집
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• pp.211-214
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• 2000

본 논문에서는 자석이 일정간격으로 설치된 도로의 자기장을 자기저항센서를 이용하여 검출하여 자율 주행하는 것에 대하여 연구한다. 모델식으로 계산된 자기장의 분포와 실제로 자기장을 측정하여 얻은 자기장 분포를 비교하여 모델식이 시뮬레이션에 사용될 수 있음을 검증하고, 앞바퀴의 조향각 제어기는 3축 방향의 자기장값을 입력받아 조향각을 출력하는 구조를 가지며, 신경회로망을 이용하여 설계한다. 제어기의 학습을 위한 학습패턴은 컴퓨터 시뮬레이션을 통하여 얻는다. 학습패턴의 획득과 학습 그리고 설계된 제어기의 타당성을 검증하기 위하여 시뮬레이터를 개발하고, 자율주행 시뮬레이션을 통하여 설계된 제어기가 우수한 성능을 보임을 입증한다.

• 한국멀티미디어학회논문지
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• 제20권8호
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• pp.1395-1405
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• 2017

In this paper, we analyses heart beat data to identify subjects stress state (binary) using heart rate variability (HRV) features extracted from heart beat data of the subjects and implement supervised machine learning techniques to create the mental stress classifier. There are four steps need to be done: data acquisition, data processing (HRV analysis), features selection, and machine learning, before doing performance measurement. There are 56 features generated from the HRV Analysis module with several of them are selected (using own algorithm) after computing the Pearson Correlation Matrix (p-values). The results of the list of selected features compared with all features data are compared by its model error after training using several machine learning techniques: support vector machine, decision tree, and discriminant analysis. SVM model and decision tree model with using selected features shows close results compared to using all recording by only 1% difference. Meanwhile, the discriminant analysis differs about 5%. All the machine learning method used in this works have 90% maximum average accuracy.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 2000년도 추계학술대회 학술발표 논문집
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• pp.281-286
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• 2000

This paper describes a lateral guidance system of an unmanned vehicle, using a neural network model of magneto-resistive sensor and magnetic fields. The model equation was compared with experimental sensing data. We found that the experimental result has a negligible difference from the modeling equation result. We verified that the modeling equation can be used in the unmanned vehicle simulations. As the neural network controller acquires magnetic field values(B$\_$x/, B$\_$y/, B$\_$z/) from the three-axis, the controller outputs a steering angle. The controller uses the back-propagation algorithms of neural network. The learning pattern acquisition was obtained using computer simulation, which is more exact than human driving. The simulation program was developed in order to verify the acquisition of the learning pattern, learning itself, and the adequacy of the design controller. A computer simulation of the vehicle (including vehicle dynamics and steering) was used to verify the steering performance of the vehicle controller using the neural network. Good results were obtained. Also, the real unmanned electrical vehicle using neural network controller verified good results.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 심포지엄 논문집 정보 및 제어부문
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• pp.24-26
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• 2005

At present, KS-1000 which is one of a commercial measurement instrument for motor fault diagnosis has been used in industrial field. The measurement system of KS-1000 is composed of three part : harmonic acquisition, signal processing by KS-1000 algorithm, diagnosis for motor fault. First of all, voltage signal taken from harmonic sensor is analysed for frequency by KS-1000 algorithm. Then, based on the result values of analysis skilled expert makes a judgment about whether motor system is the abnormality or degradation state. But the expert system such a motor fault diagnosis is very difficult to bring the expectable results by mathematical modeling due to the complexity of judgment process. In this reason, we propose an automation system using fuzzy model based on genetic algorithm(GA) that builded a qualitative model of a system without priori knowledge about a system provided numerical input output data.

• 한국군사과학기술학회지
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• 제15권2호
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• pp.155-160
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• 2012

In this paper, a strip modeling method is developed for the acquisition of target positions in remote area and validated using the imagery of SPOT satellite. This method utilizes the parameters given in header files and constructs a camera model without ground control points. In most cases, the root mean squared error of check points is less than pixel size with one ground control point. The model error of reference image is evaluated using ground control points and used to remove the model error of target images acquired along the same satellite orbit, which enables one to calculate target positions in remote area where no ground control points are available.

• 한국정밀공학회지
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• 제21권12호
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• pp.100-108
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• 2004

In reverse engineering, data acquisition methodology can generally be categorized into contacting and non-contacting types. Recently, researches on hybrid or sensor fusion of the two types have been increasing. In addition, efficient construction of a geometric model from the measurement data is required, where considerable amount of user interaction to classify and localize regions of interest is inevitable. Our research focuses on the classification of each bounded region into a pre-defined feature shape fer a hybrid measuring scheme, where the overall procedures are described as fellows. Firstly, the physical model is digitized by a non-contacting laser scanner which rapidly provides cloud-of-points data. Secondly, the overall digitized data are approximated to a z-map model. Each bounding curve of a region of interest (featured area) can be 1.aced out based on our previous research. Then each confined area is systematically classified into one of the pre-defined feature types such as floor, wall, strip or volume, followed by a more accurate measuring step via a contacting probe. Assigned to each feature is a specific digitizing path topology which may reflect its own geometric character. The research can play an important role in minimizing user interaction at the stage of digitizing path planning.

• 한국구조물진단유지관리공학회 논문집
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• 제11권2호
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• pp.134-144
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• 2007

본 연구에서는 구조물의 모니터링 시스템을 위하여 최근에 급속하게 발전하는 스마트 센서 기술을 이용하여 스마트 센서 장치를 개발하였고 다양한 실험을 통하여 개발한 스마트 센서의 기본적 성능 평가와 모형 구조물을 이용한 손상 검출 실험을 실시하였다. 본 논문은 Part 1로써 스마트 센서의 개발과 성능 평가에 관한 것이고 Part 2에서는 스마트 센서를 이용한 손상 검출 결과를 유선 계측 시스템을 이용한 실험결과와 비교하였다. 스마트 센서는 고 출력의 무선 모뎀과 고 성능 MEMS 센서, AVR 마이크로컨트롤러를 이용하여 개발하였으며 센서의 제어와 운영을 위한 임베디드 프로그램을 개발하였다. 스마트 센서의 성능을 검증하기 위하여 민감도와 분해능 분석 실험과 캔틸레버 보와 가진기를 이용한 데이터 획득 실험, 실 구조물을 이용한 현장 적용 실험을 실시하였다. 실험 결과, 개발한 스마트 센서의 성능에 대한 만족스런 결과를 얻었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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• pp.287-288
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• 2007

This paper is for a Real-time Active Control System to operate a boiler. By sensing of flame we wanted to get status of a furnace as many as possible, like load, efficiency, and/or amount of pollutant. These data can be used to make optimal running point by controlling the ratio of air and fuel. So the last object is to make a closed actual control loop from optical head to valve controllers. The first job was to design and to develop a optical data acquisition system. including optical sensor module. And we gathered flame data in variable situations for taking the trend of flame against burning environment. Currently we are developing a general system model, designing some control strategy and testing this active control system.