• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2004년도 춘계학술대회 발표 논문집
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• pp.179-184
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• 2004

This paper is an overview of the experimental work using a Planar Magnetic Levitation Stage System structure proposed by Dr. Won-Jong Kim in his PhD thesis. Based on his results, we built an Experimental Test Stand (ETS), which enabled us to get accustomed with the new technology and to create new control structures and algorithms. The ETS is controlled by a powerful controller made of 4 DSPs mastered by a PC. This controller structure increases the controller bandwidth up to 10 kHz leading to a better emulation of an analog controller and leaving enough room for further development. Based on analyzing all the factors that can affect the performances of the system, we achieved a great accurate positioning performance of sub-nanometer RMS value.

• 반도체디스플레이기술학회지
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• 제7권2호
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• pp.23-27
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• 2008

Recently, regulation for THD (Total Harmonic Distortion) such as IEC 61000-3-2, IEEE 519 is being reinforced about a product which directly connects to AC line in order to prevent distortion of common power source in electronic equipment and electrical machinery. In order to satisfy these regulations, conventional circuits were used two-stage structure attached power factor correction circuit at ahead of converter but this method complicate the circuit and then a number of element increases thereupon the cost of production rises. in this paper, we propose a high efficiency single-stage 300W PFC fly-back converter that improved power factor and efficiency than conventional two-stage power module.

• 반도체디스플레이기술학회지
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• 제7권2호
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• pp.63-67
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• 2008

The MgO protective layer plays an important role in plasma display panels (PDPs). Our previous work demonstrated that the properties of MgO thin film could be improved, which were deposited by ion beam assisted deposition (IBAD). However arc discharge always occurs during the IBAD process. To avoid this problem, oxygen neutral beam assisted deposition (NBAD) is used to deposit MgO thin films in this paper. The energy of the oxygen neutral beam was used as the parameter to control the deposition. The experimental results showed that the oxygen neutral beam energy was effective in determining in F/$F^+$ centers, crystal orientation, surface morphology of the MgO thin film, and the discharge characteristics of AC PDP. The lowest firing voltage $(V_f)$ and the highest secondary electron emission coefficient $(\gamma)$ were obtained when the neutral beam energy was 300 eV.

• 한국산학기술학회논문지
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• 제6권5호
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• pp.432-438
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• 2005

본 논문에서는 반도체 제조를 위한 AC 서보 모터의 고정도 위치 제어에 관하여 연구하였다. 제어기는 150 MIPS의 고속 처리가 가능한 Tl사의 차세대 모터 제어용 DSP TMS320F2812를 이용하여 컨트롤러를 구성하였으며, 2,500 PPR 분해능의 광학식 증분형 엔코더가 장착 된 100W 용량의 PMSM을 위치 제어 하였다. 위치 제어기를 구성하기 위하여 속도 제어기와 전류 제어기를 하위 루프로 구성하였으며, 회전형 엔코더 4체배 된 신호를 이용하여 최대 10,000 PPR의 위치 제어를 수행 하였다. 이로부터 보다 많은 PPR을 지원하는 엔코더에서도 같은 방법으로 고정도 위치제어가 가능할 것이다.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2005년도 추계 학술대회
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• pp.83-88
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• 2005

유기 절연층을 갖는 유기 박막트랜지스터 (organic TFT)를 제작하여 소자 성능을 조사하였다. 유기 절연층의 형성에서는 polyvinyl 계열의 PVP(poly-4-vinylphenol)와 PVT(polyvinyltoluene)를 용질로, PGMEA (propylene glycol mononethyl ether acetate)를 용매로 사용하였다. 또한, 열경화성 수지인 poly(melamine-co-formaldehyde)를 경화제로 사용하여 유기 절연층의 cross-link 를 시도하였다. MIM 구조로 유기 절연층의 특정을 측정한 결과, PVT는 PVP에 비해 절연 특성이 떨어지는 경향을 보였다. 게이트 절연막의 제작에서 PVP를 cobpolymer 방식과 cross-linked 방식으로 실험 해 본 결과, cross-link 방식에서 낮은 누설전류 특성을 나타내었다. OTFT 제작에서는 PVP를 용질로, poly(melanine-co-formaldehyde)를 경화제로 사용한 cross-linked PVP 를 게이트 절연막으로 이용하였다. PVP copolymer($20\;wt\%$)에 $10\;wt\%$ poly(melamine- co-formaldehyde)를 혼합한 cross-linked PVP 를 게이트 절연막으로 사용하여 top contact 구조의 OTFT를 제작한 결과 약 $0.23\;cm^2/Vs$의 정공 이동도와 약 $0.4{\times}10^4$의 평균 전류점멸비를 나타내었다.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2005년도 추계 학술대회
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• pp.110-123
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• 2005

This paper proposes an intelligent method for the optimal load distribution of two cooperating robots(TCRs) using fuzzy logic. The proposed scheme requires the knowledge of the robots' dynamics, which in turn depend upon the characteristics of large flat panel displays(LFPDs) carried by the TCRs. However, the dynamic properties of the LFPD are not known exactly, so that the dynamics of the robots, and hence the required joint torque, must be calculated for nominal set of the LFPD characteristics. The force of the TCRs is an important factor in carrying the LFPD. It is divided into external force and internal force. In general , the effects of the internal force of the TCRs are not considered in performing the load distribution in terms of optimal time, but they are essential in optimal trajectory planning: if they are not taken into consideration, the optimal scheme is no longer fitting. To alleviate this deficiency, we present an algorithm for finding the internal-force factors for the TCRs in terms of optimal time. The effectiveness of the proposed system is demonstrated by computer simulations using two three-joint planner robot manipulators.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2005년도 추계 학술대회
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• pp.142-146
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• 2005

패턴화된 ITO (indium tin oxide)/Glass 기판 위에 정공수송층인 PEDOT:PSS [poly(3,4-othylenedioxythiophene):poly(styrene sulfolnate)]와 발광층인 MEH-PPV [poly(2-methoxy-5-(2-ethyhexoxy)-1,4phenylenvinylene)]를 사용하여 ITO/PEDOT:PSS/MEH-PPV/AI 구조를 갖는 고분자 유기 발광다이오드 (polymer light emitting diode: PLED)를 제작하였다. PLED 제작시 MEH-PPV 의 농도를 ($0.1\;wt\%\;{\~}\;0.9\;wt\%$) 변수로 하여 박막의 표면 거칠기와 박막 층의 마찰재수(friction coefficient) 측정을 통하여 농도에 따른 특성 변화를 조사하였다. MEH-PP 의 농도를 $0.1\;wt\%$ 에서 $0.9\;wt\%$ 로 증가함에 따라 발광 층의 RMS (root mean square)같은 1.72 nm 에서 1.00 nm 로 감소하여 거칠기가 개선되는 경향을 보여 주었다. 그러나 박막간의 마찰계수는 0.048 에서 0.035 로 감소하여 박막간의 접합상태가 나빠지는 현상을 나타내었다. 소자의 전기, 광학적 특성의 경우 MEH-PPV 농도가 $0.5\;{\~}\;0.9\;wt\%$ 범위에서 약 0.35 mA (at 9V)의 전류밀도를 나타내었으며, 최대 휘도는 $0.5\;wt\%$ 농도에서 $409\;cd/m^2$의 값을 나타내었다.

• 반도체디스플레이기술학회지
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• 제20권1호
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• pp.99-103
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• 2021

Warpage defect detecting of scaffold is very important in biosensor production. Because warpaged scaffold cause problem in cell culture. Currently, there is no detection equipment to warpaged scaffold. In this paper, we produced detection model for shape warpage detection using deep learning based CNN. We confirmed the shape of the scaffold that is widely used in cell culture. We produced scaffold specimens, which are widely used in biosensor fabrications. Then, the scaffold specimens were photographed to collect image data necessary for model manufacturing. We produced the detecting model of scaffold warpage defect using Densenet among CNN models. We evaluated the accuracy of the defect detection model with mAP, which evaluates the detection accuracy of deep learning. As a result of model evaluating, it was confirmed that the defect detection accuracy of the scaffold was more than 95%.

• 반도체디스플레이기술학회지
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• 제19권4호
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• pp.139-144
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• 2020

Recently, the electronic equipment industry has become active due to the continuous increase in portable storage media with high-speed information communication, and in particular, the production of SSD(Solid State Drives) for miniaturization of mobile devices and high-speed information communication has increased rapidly. When the SSD is ejecting in the SSD test gender, the necessary ejecting force must be kept constant to have a lifespan applicable to the test device. When the ejecting force increased, it leads to wear of the link for ejecting, which causes a problem in that repeated durability decreases and the ejecting of the SSD becomes impossible. In this paper, the repeated durability test analysis according to the material and the reducing ejecting force design were performed to increase the life of the test gender for SSD inspection. The wear level of the pusher head and ejector was analyzed through repeated durability tests according to the material of the pusher head. The validity of the design was verified through the ejecting force test and repeated durability test of the Test gender, which was designed by carrying out the design to reduce the size and ejecting force of the test gender.

• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.7-12
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• 2023

The edge ring placed on the outside of the electrostatic chuck (ESC) is a key component for protecting the ESC and controlling the etching uniformity of the edge of the wafer. Therefore, it is very important to understand the etching phenomenon of edge rings for edge ring management and equipment homeostasis. In this study, a specimen with SiO₂ hard mask and underlying Si mold was installed on the edge ring surface and the etching results were measured by varying the edge ring 2MHz RF power. By developing PI-VM model with high prediction accuracy and analyzing the roles of key parameters in the model, we were able to evaluate the effect of plasma and sheath characteristics around the edge ring on edge ring erosion. This analysis method provided information necessary for edge ring maintenance and operation.