Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2004.05a
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- Pages.179-184
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- 2004
Expriments on a High Precision Planar Magnetic Levitation Stage Structure
- Lee, Se-Han (Machine Control & Application Research Group, Industrial Applications Research Laboratory, KERI(Korea Electrotechnology Research Institute)) ;
- Caraiani, Mitica (Machine Control & Application Research Group, Industrial Applications Research Laboratory, KERI(Korea Electrotechnology Research Institute)) ;
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Jeon, Jeong-Woo
(Machine Control & Application Research Group, Industrial Applications Research Laboratory, KERI(Korea Electrotechnology Research Institute))
;
- Lee, Ki-Chang (Machine Control & Application Research Group, Industrial Applications Research Laboratory, KERI(Korea Electrotechnology Research Institute)) ;
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Kim, Yong-Joo
(Machine Control & Application Research Group, Industrial Applications Research Laboratory, KERI(Korea Electrotechnology Research Institute))
- Published : 2004.05.01
Abstract
This paper is an overview of the experimental work using a Planar Magnetic Levitation Stage System structure proposed by Dr. Won-Jong Kim in his PhD thesis. Based on his results, we built an Experimental Test Stand (ETS), which enabled us to get accustomed with the new technology and to create new control structures and algorithms. The ETS is controlled by a powerful controller made of 4 DSPs mastered by a PC. This controller structure increases the controller bandwidth up to 10 kHz leading to a better emulation of an analog controller and leaving enough room for further development. Based on analyzing all the factors that can affect the performances of the system, we achieved a great accurate positioning performance of sub-nanometer RMS value.
Keywords