• 한국재료학회지
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• 제17권9호
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• pp.469-474
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• 2007

Electroless deposition(ELD) was applied to fabricate Cu interconnections on a TaN diffusion barrier with Pd seed layer. The Pd seed layer was obtained by self-assembled monolayer method(SAM) with PDDA and PSS as surfactants. We were able to obtain about 10nm Pd nano particles as seeds for electroless Cu deposition and the density of Pd seeds was much higher than that of Pd seeds fabricated by conventional Pd sensitization-activation method. Also we were able to obtain finer Cu interconnections by ELD. Therefore we concluded that the Pd seed layer by SAM was able to be applied to form Cu interconnection by ELD for under 30nm feature.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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• pp.341-346
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• 2000

The effect of OTS(octadecyltrichlorosilane) SAM(self-assembled monolayer) on the micro-adhesion has been studied. OTS SAM was formed on the Si(100) surface and SPM (scanning probe microscope) tips with different radius of curvature were fabricated by a series of masking and etching processes. Pull-off forces of different tips on Si and OTS SAM surfaces were measured by SPM in different relative humidities. The surface of OTS SAM was changed to hydrophobic surface and the micro-adhesion force of OTS SAM was lower than that of pure Si. As the tip radius of curvature and the relative humidity increased. the micro-adhesion force increased. Based on the test results. the main parameter affected to the micro-adhesion was absorbed humidity on the surface.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권4호
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• pp.175-183
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• 2002

In this paper, the surface modification effect of self-assembled monolayer(SAM) of 1-dodecanethiol [$CH_3$($CH_2$)$_{11}$SH] used as an anti-adhesive film in micromolding process was studied. Monolayers of 1-dodecanethiol[$CH_3$(CH$_2$)$_{11}$SH] were obtained by immersing a metal place in pure 1-dodecanethiol. SAM film on the nickel plate has been examined by using X-ray photoelectron spectroscopy(XPS). The focus has been placed on S-Ni bonding. From the XPS analysis, sulfur atoms were detected from the SAM film as a chemical composition of S-Ni. In order to measure an adhesion force of the SAM-coated nickel surface, atomic force microscopy(AFM) was used in force-distance mode, which whows the micro-adhesive force on solid surface. It was shown that adhesion forces measured from the SAM-coated nickel surface and the Ni surface without SAM coating were 3.52nN and 5.32nN, respectively. In order to investigate the effect of SAM coating on the surface foughness the replica in demolding process, hot embossing experiments were performed using a SAM-coated nickel master and a nickel master without SAM coating. Surface roughness of replica from the SAM-coated master showed 25nm and that of replica from master without SAM coating was 35nm. The smoother surface roughness of the replica from the SAM-coated, master is believed to result from reduction in the adhesion forces.ces.

• Tribology and Lubricants
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• 제17권4호
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• pp.276-282
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• 2001

Nano adhesion between SPM (scanning probe microscope) tips and 075 (octadecyltrichlorosilane) SAM (self-assembled monolayer) was experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes in various conditions of relative humidity. OTS SAM was formed on Si-wafer (100) surfaces, and Si$_3$N$_4$ tips of different radius of curvature were used. When the surface was hydrophobic, the adhesion and friction forces were found lower than those of bare Si-wafer. Results also showed that micro-adhesion force increased as the relative humidity and the tip radius of curvature increased. The main parameter for affecting the micro-adhesion was found absorbed humidity on the contact surface. These results were discussed with the JKR model and a capillary force caused by absorbed water.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.3-4
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• 2007

고분자 반도체를 이용한 유기 박막트랜지스터(OTFT) 소자 제작시 특성 향상을 위해 Self-Assemble Monolayer (SAM)을 이용한 유기 Gate 절연막과 source/drain 전극의 표면처리에 대해 설명하였다. Gate insulator의 경우 소수성 SAM이 고분자 반도체와의 상호작용으로 배열도를 향상시켜 이동도를 증가시켰으며, 전극처리의 경우 접촉저항을 낮추어 injection을 증대시키는 효과를 나타내었다. 각각의 경우 적용되는 SAM 재료와 효과를 극대화시키기 위한 처리공정 전반에 대해 설명하였다.

• 센서학회지
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• 제19권2호
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• pp.142-148
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• 2010

We have compared and investigated the detection capabilities of antibody of immunoglobulin G(anti-IgG) immobilized by protein G and N-hydroxysuccinimide(NHS) at the end of the self-assembled monolayer(SAM). Surface plasmon resonance(SPR) sensor has been utilized to measure the interaction between biomolecules. After formation of the protein G and SAM, anti-IgG, bovine serum albumin(BSA) and IgG has been sequently injected. Through the reponse of the SPR, we can conclude that the protein G immobilized anti-IgG better than the SAM. In addition, IgG detection capability of the anti-IgG immobilized by the protein G showed better performance compared with that immobilized by the SAM.

• 통합자연과학논문집
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• 제3권2호
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• pp.96-102
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• 2010

It is still controversial where the improved stability of n-octadecyltriethoxysilane self-assembled monolayer (OTE SAM) on plasma-pretreated mica surface exactly originates from. To date, it has been well known that the extensive cross-polymerization between silane headgroups is a crucial factor for the outstanding mechanical strength of the monolayer. However, this study directly observed that the stability comes not only from the cross-links but also, far more importantly, from the direct chemical bonds between silane headgroups and mica surface. To observe this phenomenon, n-octadecyltrichlorosilane monolayers were self-assembled on both untreated and plasma treated mica surfaces, and their adhesion properties at various stress conditions and force profiles in pure water were investigated and compared through the use of the surface forces apparatus technique. It revealed that, in pure water, there is a substantial difference of stability between untreated and plasma treated cases and the plasma treated surface is mechanically much more stable. In particular, the protrusion behavior of the monolayer during contact repetition experiment was always observed in the untreated case, but never in the plasma treated case. It directly demonstrates that the extensive chemical bonds indeed exist between silane head-groups and plasma treated mica surface and dramatically improve the mechanical stability of the OTE monolayer-coated mica substrate.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.314-315
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• 2008

We have studied a property change of organic light-emitting diodes (OLED)s due to a surface reformation of indium-tin-oxide(ITO) substrate. An ITO is widely used as a transparent electrode in light-emitting diodes, and the OLEDs device performance is sensitive to the surface properties of the ITO. The ITO surface reformation could reduce the Schottky barrier at the ITO/organic interface and increase the adhesion of the organic layer onto the electrode. We have studied the characteristics of OLEDs with a treatment by a wet processing of the ITO substrate. The self-assembled monolayer(SAM) was used for wet processing. The characteristics of OLEDs were improved by SAM treatment of an ITO in this work. The OLEDs with a structure of ITO/TPD(50nm)/$Alq_3$(70nm)/LiF(0.5nm)/Al(100nm) were fabricated, and the surface properties of ITO were investigated by using seneral characterization techniques. Self-assembled monolayer introduced at the anode/organic interface gave an improvement in turn-on voltage, luminance and external quantum efficiency compared to the device without the SAM layer. SAM-treatment time of the ITO substrate was made to be 0/10/15/20/25min. The current efficiency of the device with 15min. treated SAM layer was increased by 3 times and the external quantum efficiency by 2.6 times.

• 전기학회논문지
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• 제65권4호
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• pp.628-634
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• 2016

This paper demonstrates a microfluidic electrochemical sensor for detecting endocrine disruptor such as estradiol at a very low concentration by using preconcentration technique. In addition, self-assembled monolayer(SAM) was also employed on the working electrode of the electrochemical sensor in order to increase the estradiol capture efficiency of the sensor. SAM treatment on the working electrode enhanced the specific binding between the surface of the working electrode and the estradiol antibody. The estradiol antibody was applied on the working electrode at different concentrations(10, 20, 50, 100, 200 pg/ml) for observing the concentration dependency. The measured electrochemical redox current changed with the amount of the bound estradiol on the Au working electrode surface and the sensor can detect all the target material when the immobilized antibody amount is more than the estradiol amount in the water. The elecrochemical estradiol sensor without SAM treatment showed a low current of 7.79 nA, while the sensor treated with SAM resulted in 339 nA at 200 pg/ml, which is more than 40 fold higher output current. When combining the preconcentration technique and the SAM-treated electrode, the measured current became more than 100 fold higher than that of the sensor without neither SAM treatment nor preconcentration technique. The combination of these two techniques can would enable the proposed microfluidic electrochemical sensor to detect a very low concentration endocrine disruptor.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.645-647
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• 2009

We investigated vertical liquid crystal (LC) alignment effects of a self-assembled-monolayer (SAM) prepared on an anisotropic $SiO_2$ surface where the field-induced LC reorientation produced a uniform single domain texture. We compared the results with the homeotropic-to-random planar reorientation results shown in LCs aligned on a SAM surface prepared on an isotropic $SiO_2$ surface.