• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2007년도 춘계학술대회A
• /
• pp.1288-1293
• /
• 2007

The present study covers the design and analysis of a thermionic scanning electron microscope (SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. In the design process, the dimension and capacity of the SEM components need to be optimally determined with the aid of finite element analyses. Considering the geometry of the filament, a three-dimensional (3D) finite element analysis is utilized. Through the analysis, the beam emission characteristics and relevant trajectories are predicted from which a systematic design of the electron optical system is enabled. The validity of the proposed 3D analysis is also discussed by comparing the directional beam spot radius. As a result, a prototype of a thermionic SEM is successfully developed with a relatively short time and low investment costs, which proves the adoptability of the proposed 3D analysis.

• 한국전기전자재료학회논문지
• /
• 제30권11호
• /
• pp.728-733
• /
• 2017

Herein, for the quantitative analysis of the arc beads related to electric fire, we used electron backscatter diffraction (EBSD), a measuring device for grain orientation of materials, we compared and analyzed the surface texture of primary and secondary beads according to the difference in cooling rate at ambient temperature. This analysis revealed that the primary beads showed similar distribution at both low and high angles, while the secondary beads showed a higher distribution at low angles than at high angles. Thus, EBSD can be used for quantitative analysis of the beads and can be applied to identify beads in the future.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
• /
• pp.262-264
• /
• 2009

Ternary oxides with controlled band gap energy and reduced reactivity against moisture and carbon dioxide gas were designed and studied as a potential material for protective layer of ac-PDPs. The results showed a significant reduction in firing voltage and improved environmental stability.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제48권12호
• /
• pp.785-790
• /
• 1999

This research has been carried out to develop a low-energy large-aperture pulsed electron beam generator (LELA), 200keV 1A, for industrial applications. One of the most important feature of this electron beam generator is large electron beam cross section of $190cm^2$. Low energy electron beam generators have been used for water cleaning, flue gas cleaning, and pasteurization, etc. In these applications the cross sectionof the e-beam is related to reaction efficiency. Another important feature of this LELA EB generator is easy maintenance because of its simple structure and relatively low vacuum operation compared to the conventional EB generators. The conventional EB generators need to be scanned because the small cross section thermal electron emitters are used in the conventional EB generators which have small EB cross section. In this research, we use the secondary electrons generated by ion bombardment on the HV cathode surface as a electron source. Therefore we can make any shape of EB cross section without scanning.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
• /
• pp.921-924
• /
• 2006

In an attempt to enhance secondary electron emission characteristics of PDP, $12CaO{\cdot}7Al_2O_3$ electride was used as electron emission layer of PDP discharge cells. The compound was synthesized by Ca-treatment and its electron emission behavior during the glow discharge was measured. The results indicated that the spayed electride reduces the discharge voltage by ${\sim}20$ volts and decrease the discharge delay by more than 70%.

• Applied Microscopy
• /
• 제52권
• /
• pp.2.1-2.6
• /
• 2022

With the lightening of the mobile devices, thinning of electrolytic copper foil, which is mainly used as an anode collection of lithium secondary batteries, is needed. As the copper foil becomes ultrathin, mechanical properties such as deterioration of elongation rate and tear phenomenon are occurring, which is closely related to microstructure. However, there is a problem that it is not easy to prepare and observe specimens in the analysis of the microstructure of ultrathin copper foil. In this study, electron backscatter diffraction (EBSD) specimens were fabricated using only mechanical polishing to analyze the microstructure of 8 ㎛ thick electrolytic copper foil in plane view. In addition, EBSD maps and transmission electron microscopy (TEM) images were compared and analyzed to find the optimal cleanup technique for properly correcting errors in EBSD maps.

• 한국재료학회지
• /
• 제1권3호
• /
• pp.125-131
• /
• 1991

pMOS소자의 $p^{+}$게이트 전극으로 다결정실리콘과 비정질실리콘을 사용하여 고온의 열처리 공정에 따른 붕소이온의 침투현상을 high frequency C-V plot, Constant Current Stress Test(CCST), Secondary Ion Mass Spectroscopy(SIMS) 및 Transmission Electron Microscopy(TEM)를 이용하여 비교하였다. C-V plot분석 결과 비정질실리콘 게이트가 다결정실리콘 게이트에 비해 flatband전압의 변화가 작게 나타났으며, 게이트 산화막의 절연파괴 전하밀도에서는 60~80% 정도 향상된 값을 나타내었다. 비정질실리콘 게이트는 증착시 비정질로 형성되는 구조로 인한 얇은 이온주입 깊이와 열처리 공정시 다결정실리콘에 비교하여 크게 성장하는 입자 크기 때문에 붕소이온의 침투 경로가 되는 grain boundary를 감소시켜 붕소이온 확산을 억제한 것으로 생각된다. Electron trapping rate와 flatband 전압 변화와의 관계에 대하여 고찰하였다.

• 대한전자공학회논문지SD
• /
• 제44권12호
• /
• pp.12-17
• /
• 2007

본 연구에서는 전자빔 증착의 증착률이 MgO 보호막의 특성과 제작된 PDP의 방전 특성에 주는 영향에 대하여 연구, 분석 하였다. MgO 박막을 여러 조건의 증착률로 증착하였고, 이 후 결정 구조, 표면 거칠기, 박막 구조와 같은 특성을 XRD, AFM 등을 사용하여 측정, 평가하였다. 실험 결과와 Paschen law을 통해서 $5\AA/sec$의 증착률에서 이차전자방출이 최대가 되는 것을 확인할 수 있었으며, 동일 조건에서 방전 전압이 가장 작고, 발광 효율은 가장 큰 값을 갖는 것이 확인되었다. 또한 $5\AA/sec$의 (200) 결정 방향과 $F^+$ center 측정값도 가장 높게 측정되었다. XRD와 CL 스펙트럼의 결과를 통하여 이차전자방출계수가 MgO 박막의 분자 결정상의 $F/F^+$ centers구조와 관련 있음을 확인할 수 있었다.

• 전기화학회지
• /
• 제12권3호
• /
• pp.239-244
• /
• 2009

리튬 이차 전지의 전기화학적 특성 및 안전성 향상을 위한 음극 활물질 표면 처리 재료로 $Al_2O_3$와 $nano-Li_4Ti_5O_{12}$등이 사용된다. 표면 처리된 음극 활물질의 형상과 특성을 관찰하기 위해 주사전자현미경(Scanning electron microscopy, SEM), 투과전자현미경(Transmission electron microscopy, TEM)으로 관찰하였으며, 전기화학적 특성 및 안전성 평가를 위해 충방전기 및 가속 율열량계(Accelerating Rate Calorimeter, ARC)를 사용하였다. 각각의 금속 산화물에 따른 초기 효율 및 초기 용량은 82.5%와 350mAh/g로 동일하지만, 충방전 율속에 따른 특성 및 수명, 그리고 열적 안전성은 $nano-Li_4Ti_5O_{12}$로 음극 활물질을 표면 처리 한 활물질이 더 우수하였다.

• Applied Microscopy
• /
• 제16권2호
• /
• pp.14-24
• /
• 1986

The interrelation of secondary defects, intermediate S' phase and aging condition in Al-2.0 wt% Cu-1.1 wt% Mg alloy is studied by transmission electron microscope. The results obtained in this study are as follows. 1. High density of dislocation loops, helices and stacking faults are observed in this specimen with aging treatment. 2. The number of dislocation loops and the width of loop free zone (LFZ) are increased with aging time. 3. The intermediate S' phase precipitates and grows on the dislocations and secondary defects. 4. The misfit dislocations are formed around intermediate S' phase. 5. It is thought that the helices appear to be produced by the climb of screw dislocations, while the dislocation loops appear to be formed both by condensation of vacancies into collapsed discs and by interaction of helices with screw of opposite sign.